Round Type Low Pressure Hydraulic Cylinder Series CH
M

Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Standard stroke: mm Long stroke: mm Basic mounting Through-hole/Both ends tapped Operating piston speed 50 to 500mm/s (2 to 20in/s) Minimum Strokes for Auto Switch Mounting Unit: mm D-A9, D-F9WV D-M9 , D-F9W D-A9V D-F9V D-M9N B P D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult P/A for shorter stroke lengths than indicated in the table.

CXT

M 20 100 B A90 S Platform cylinder Number of auto switches Bearing 2 M Slide bearing S 1 L Ball bushing bearing n n Auto switch Bore size/Stroke (mm) Without auto switch (Built-in magnet) Refer to p.3.8-10 for common specification and wire specification.

Refrigerated Air Dryer

Combination of R and S (Because S function is also included in R.) Combination of S and T (Because S function is also included in T.) Combination of K and V (Only one or the other may be attached.) Note 2) Standard specification is the power cable with plug.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Dimensions inside are for rubber seal. 6-1/2, 3/4 1, 3, 5 port 32 (35) 32 (35) 35 35 3-11-9 10 Series EVS7Dimensions EVS7-10-FG-S-M0 1/2, 3/4-5 port 1, 4, 2, 5, 3 port 200 124 124 45 (14 port) 76 39 37 2-8.5 mouting hole 45 (12 port) 5 1 3 22 (4 port) 22 (2 port) 22 12 2 4 14 14 80 26 33 80 95 50 B A 4 2 19 19 5 1 3 1/8-2 port 12, 14 port 47 47 Manual override 8 71 65 2-8.5 mounting hole

4/5 Port Air Operated Valve Series SYJA3000

11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2

VXP21/22/23

TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Connection Applicable model VXP2142-03 VXP2142-04 VXP2152-06 VXP2262-10 Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Size Class B Class H G PAX C D, T G, C S T 3 8 1 2 3 4 S L, Z S L, Z PB

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

ISA2

Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

The port on the piston rod B side for 10-/12-, 21is plugged since unlike the vacuum, it is not necessary to exhaust from 2 ports.

HRX-OM-S004

capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-7 Cooling capacity(HRS100-W-20/40/46-) 8.4.4 HRS150-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 20 20 18 18 16 16 Cooling capacity [kW] 14 14 Cooling capacity [kW] 12 12 10 10 8 8 6 6 4 4 2 2 0

Air Fittings & Tubing

Weight (g) a b M2 L d M1 16 17 2 2 4 6 KQ2N04-06 KQ2N06-08 17 18.5 6 8 10 12 16 38 42 47 51 55 2.5 4 6 8 9 8 KQ2N08-10 21 18.5 13.2 10 KQ2N10-12 22 21 18.2 12 KQ2N12-16 25 22 29 Tube cap: KQ2C Tube O.D.

Rotary Table Series MSU

Auto switch type MDSUB1, 3 MDSUB7, 20 D-90/97, D-90A/93A D-R7, R8 Reed switch Adjustment bolt (B) adjustment range (S): 10 Adjustment bolt (A) adjustment range (S): 10 D-S99, D-T99, D-S9P D-S7, S7P, T7 Solid state switch 90 Weights Unit: g (oz) Rotation Auto switch unit + Auto switch 2 pcs.

MIW/MIS

12 12 1 A S D F9NV S MIW Double finger type 20 30 1 A S D F9BV S Single finger type MIS Scraper Cylinder bore Nil S No Yes Number of auto switches 12mm 20mm 12 2 pcs. 1 pc.

MLU

Allowable Kinetic Energy Extension locking direction Retraction locking direction 100 100 50 50 Load weight kg Load weight kg 10 10 50 W 50 5 5 40 40 B 32 32 0.5MPa 0.4MPa 0.5MPa 0.4MPa A A 25 25 1 1 100 500 100 500 B W Maximum speed mm/s Maximum speed mm/s B: Retraction locking direction F: Extension locking direction 9-13-4 4 Series MLU Specific Product Precautions 2 Be sure to read before

125

: VEX3220 Note) VVEX4-2-3-B * VEX3420-12 pcs. * VEX4-5-3A1 pc. 2 6 6 stations 02 1/4 2 Common external pilot Air operated 8 8 stations 2 2 stations A 3/8 1/4 4 1 Internal pilot VEX3422 Air operated: VEX3420 Note) Air operated VEX3420-1 (2 sets) B 3/8 2 Common external pilot 6 6 stations C 1/2 3/8 Blanking plate VEX4-5-3A (1 set) Manifold base (3 stations) VVEX4-2-3-B Stations Station

Cylinder with Lock Series CLS

Also when switches are shipped separately, BBA1 is included with them. 35 + 30 (n 2) 110 + 30 (n 2) n = 2, 4, 6, 8 ... Different side "n" pcs. 100 + 10 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 ... Same side 15 110 1pc. 35 110 Different side 2pcs. 55 110 Same side D-A44 35 + 30 (n 2) 110 + 30 (n 2) n = 2,4,6,8...

240

D0.01 20 40 60 80 100 0 -X Overhang L (mm) 17 MXH Series Selection Graph v to 2 (Horizontal Mounting) Maximum Speed 100 mm/s or Less Maximum Speed 500 mm/s or Less Maximum Speed 300 mm/s or Less Graph 0 Load Eccentricity 50 mm Graph m Load Eccentricity 50 mm Graph v v Load Eccentricity 50 mm 1 100 10 Mass m (kg) Mass m (kg) Mass m (kg) Mass m (kg) 1 10 20 16 20 16 10 6 0.1 20 16 10 6 1 0.1

4-channel Flow Monitor ( compatible)

System error (Er0, 4, 6, 8, 40) is displayed. (2) Check if the power supply voltage 6 is in the range 12 to 24 VDC 10%. (2) Supply power in the range "HHH" is 12 to 24 VDC 10%. displayed. (1) Reset applied flow to a (1) Check if the flow exceeds the level within the set flow range.

Compact and Lightweight

44.1 NPT1/2 NPT1/2 Inch Dimensions when the standard bracket is mounted 229 A ZH Series Body Ported: ZH05D A--to ZH20D A--S L S L L-bracket (Bracket on a single side) K J H E F G 2 x D t C B A Long clamping screw set for 1 station required for assembly needs to be ordered separately.