VCW

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing November, 1998 D-SMC.L.A. P-77.5 (JT)

ISO Interface

Location and size A, B port 02 Side 1/4 03 Side 3/8 04 Side 1/2 06 Side 3/4 10 Side 1 02B Bottom 1/4 03B Bottom 3/8 04B Bottom 1/2 Size of P, EA, EB port 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Option No option TBU With terminal box SU With SI unit W Splash proof DISTRIBUTED BY: NATIONAL AND WORLDWIDE SERVICE NETWORK FOR A BRANCH OFFICE NEAR YOU, CALL United States Branch Offices Oceania SMC Corporation

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZFC101-03 5/32" 10 11.5 ZL ZFC101-07 1/4" 20 Inch size ZFC201-07 1/4" 30 ZY 21.5 ZFC201-09 5/16" 50 ZQ Note) Flow rate when initial pressure drop is 3 kPa or less.

-fl Seies

All Bases: 02= 1/4" NPTF| 03 = 3/8'NP'F. lExternal pilol type order SPF02 i'R-" 5 Port Pilot Type/Rubber Seal Series NVFR4000 Plug-in Type, Non Plug'in Type Symbol 3 position (Additional func{ons achieved by using extemal pilot option).

Vacuum

Example) Due to lhe common supply/exhaust fealure, nole that ditlerenl pressLrre rdnge colnbinalions are nol avarhbb. lfv00-03 .1 set (Manitold part number) I loption lfa DIN raillonger lhan the specilied shlions is required, specily the applicable shlions in l'&o digils ([/a]imumlO slations) Erample) llW0O05-07 I ot-lZ;r"f"* Tos.3-r"!"

The MHZ2 series is a standard type parallel air gripper, taking the place of the MHQ*2 series. A linear guide provides high rigidity and high accuracy. MHZ2 can operate under higher pressure even at a larger holding point and overhang. High degree of mounting precision is achieved and mounting repeatability is improved. Standard parallel type air gripper, Bore sizes from 10mm to 40mm, Double

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12 FLOW CONTROL. SPEED CONTROLLER. 126.00000 lb. SVD.

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa), SUP: 03 (Screw-in Rc 3/8), VAC: 03 (Screw-in Rc 3/8)

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

Stations: 03 (3 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

SMC Pneumatic Clean Series

-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MT printing MT 16400SZ Printed in Japan.

Speed Controller: Standard Type Large Flow In-line Type AS Series

Free flow Controlled flow Weight (kg) Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio AS420-02 AS420-03 AS420-04 AS500-06 AS600-10 AS800-12 AS900-14 AS900-20 1/4 3/8 1/2 3/4 1 1 1 2 10 13.3 18.6 22.5 47 107 132 169 3,600 4,800 6,700 8,100 16,900 38,500 47,500 60,800 6.9

Battery-less

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

Round Type Hydraulic Cylinder

M30 x 1.5 1/8 18.5 87 20 160 178.5 40 34 f8 Up to 800 21 M33 x 2 M16 x 1.5 24 24 12 24 18 21 14 11 54 10 48 7.5 19 44 24 21 1/4 22.5 108 20 182 204.5 322 Round Type Hydraulic Cylinder: 3.5 MPa CHM Series Accessories (Standard) Rod end nut Mounting nut 30 30 d d CHQ C D D C CHK H B B H Material: Carbon steel Material: Carbon steel CHN Part no. d H B C D Applicable bore size (mm) NT-02 NT-03