MHS VG32 4 4-1 1 2 3 14 4-2 MHS2 MHS3 MHS4 C O O MHS2MHS4 MHS3 15 MHSJ3 C J O O J J J 16 MHSH3 C A O O O A A 17 / / C S (P) P O O S O P P C / ; ; ; ; C 18 4-3 3 MHS2 MHS3 MHS4 1 C C 4 2 5 mm Nm 16 M30.5 2.5 0.6 20 M30.5 2.5 0.6 25 M40.7 3 1.4 32 M50.8 4 5.1 40 M50.8 4 5.1 50 M61 5 8.6 63 M81.25 6 21.6 80 M101.5 8 24 100 M121.75 10 42.2 125 M142 12 67.7 19 MHSJ3
mounting groove (4 locations) Width across flats 8 (4 locations) 18.2 M5 x 0.8 (Finger closing port) 4 x M5 x 0.8 (Piston rod thread and rack thread) 5.5 2 x M5 x 0.8 Vacuum port H 7 8.4 16.8 0.5 7 9 7 12.5 8 6 6 O S 15 31 (46) 20 K 12.4 15 15 7 7 4 4 20 When open F 10 4 x M4 x 0.7 through (Thread for mounting attachment) 34 10 When open G (mm) J 24 39 57 H 116 158 196 G 92 134 172 F 72
-,I T _ I I 1sri61 @ll: p ( j iPilot ExH) (63.5) 2.58( Ll : with indicator light and surge voltage suppres6or e . [ o l a ' l s 1 6 e ' 9 r , p , . 1 4 . ; 116 17 l!
J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5
Selecting Conditions/Table 1 Vertical Upward facing Downward facing Horizontal l = Eccentric distance l = Distance between the plate and load center of gravity m Mounting orientation m m l = Eccentric distance Maximum load speed V Graph (Slide bearing type) Graph (Ball bushing type) 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 1 , 2 3 , 4 1 3, 1 4
Selecting Conditions/Table 1 Vertical Upward facing Downward facing Horizontal l = Eccentric distance l = Distance between the plate and load center of gravity m Mounting orientation m m l = Eccentric distance Maximum load speed V Graph (Slide bearing type) Graph (Ball bushing type) 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 1 , 2 3 , 4 1 3, 1 4
+ Stroke Relief port With air cushion Cushion valve (Width across flats WH) WA GA RA Relief port M5 x 0.8 WB 20 10 S + Stroke ZZ + Stroke (mm) AL Bore size Stroke range 1 2 A GB I J MM P S ZZ K NA C H RA B1 KA D H1 E F GA Standard Long 20 25 32 40 50 63 80 100 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 10 10 10 10 10 15.5 19.5 19.5
-,I T _ I I 1sri61 @ll: p ( j iPilot ExH) (63.5) 2.58( Ll : with indicator light and surge voltage suppres6or e . [ o l a ' l s 1 6 e ' 9 r , p , . 1 4 . ; 116 17 l!
40 50 60 70 80 90 100 [mm] [mm] c 180[mm] 290[mm] AREAON 100[mm]-0.5[mm] = 99.5[mm] INPON 2[mm] j 1[mm] j 100 b 0 [mm/s] AREA ON OFF ON [mm] k INP INP OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] -23- (2 INC a b c d e f g h i j k ABS()/ / INC()// )30[mm] No.0 No.0INC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 INC 100 10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1
I direction \ j '--r:_ _ _ System diagram Supply by Lrser comFcrnecFic rouilo|'s $.0nie$ ll( Proilrd tooumr 30 :t0.03. 08; 2mm lead o5 stepping a a a a 80 08; 5mm lead 100 08; 6mm lead t0.05 200 @8; 12mm lead :a]8:?lrrin:Faq l: ':l ' :S? sleptrr.lS 19!1{11n]!
The INP output signal is turned on from 100[mm] 0.5[mm]=99.5[mm] Table Position[mm] c Area2[mm] j Area1[mm] j b Speed[mm/s] 100 0 AREA Output signal ON OFF INP Output conodition INP Output signal ON In pos[mm] k OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] 27 - Example of step data input (2) Positioning operation Relative a b c d e f g h i j k Step data No.
s' i20mh) w'Bool CPA1TN ROD BOOT with Boof BORE B D E J K MM P s dTDeB TT TX TY TZ H z zz h zl 1 3 4 (351 2 7 6 2.O5 152\ o.79 1.57 0 3 9 i10l 067 117\ M8x1.25 0.28 (7\ M16x1.5 1 1 4 (30) 3.54 i90l o 5e 8;tjj (15 3,'* 1 . 1 4 (30) g 7 (95t 2.99 5.31 t135) 2.24 (581 (1031 6.06 (1541 2.05 (521 11.2) 260 (66) s T o 1 1 1 1 6 3 8 1.38 l35l 3 3 5 (85) 2.52 (64) 0.79 (2Ol 1.57 0.39 0.67 t17l 0
piLl lanp lighls wh6n hlo swilches a turned ON Eran0e P$s!
piLl lanp lighls wh6n hlo swilches a turned ON Eran0e P$s!
30 to 800 mm/s 30 to 700 mm/s 30 to 600 mm/s Precautions MX Bumper is standard on both ends Cushion Port size M5 x 0.8 Rc 1/8 Be sure to read before handling.
kit 1 to 8 stations 16 Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 output points) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 output points) DeviceNet OMRON Corp.: CompoBus/S (16 output points) OMRON Corp.: CompoBus/S (8 output points) CC-Link 1 to 4 stations 8 D side 1 to 8 stations 16 Serial transmission kit EX140 Integrated-type (For Output) Serial Transmission
W 2 J D C 21 B Nil Built-in magnet No Number of auto switches D With auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc. n pcs.
Normal Close High Vacuum Solenoid Valve *1 RoHS Minimum operating pressure *1 Excluding grommet/AC *1 OUT side 1x10 6 Pa(abs) *1 Leakage Internal External 1.3x10 9 Pam3/s 1.3x10 11 Pam3/s Power consumption Fluid temperature 5 to 60C Size XSA [W] Previous model [W] 25% reduction Max. Max.
U Q F I 22 M E Z D 11 Minimum bending radius for lead wire 10 Auto switch D-A7, A8 K L B + Stroke M E S A + Stroke J 2-cushion needle Rod end male threads H1 C1 L1 X Rod end nut Auto switch D-A9, F9 Rod end male threads mm Bore size (mm) X C1 H1 L1 32 40 50 20.5 23.5 M14 x 1.5 28.5 20.5 23.5 M14 x 1.5 28.5 26 28.5 M18 x 1.5 33.5 Standard type mm A B C D E F H I J K L M N Bore size (mm) 32
to the control panel,s protective earth (PE).