SMC Corporation of America
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Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

AV AU AF AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ALF500/600 IR Port size D VEX AMR ITV IC Model Port size VBA C D A B , 1 4 3 8 1 2 , ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 80 85 90 100 100 100 238.5 246.5 295.5 319.5 338.5 344.5 44 46 48 51 59 63

$6" " 6 " " " w 0C4,D 4 e B 6 !" r B " " $6y t " 5 ' % " $60C4,D 4 B u % " " B 17-3-98 3 Series VVXA21/22 Direct Air Operated 2 Port Valve/Manifold For Air, Gas, Vacuum and Oil The VX series will be revised shortly.

Adjustable range of display value fine adjustment function C Peak/Bottom value indication function D Keylock function Prevents operation errors such as accidentally changing setting values. This function constantly detects and updates the maximum (minimum) pressure when the power is supplied, and allows to hold the maximum (minimum) pressure value.

E 3 Auto drain Additional symbol Port size 1 None With auto drain 0 Flow direction: left to right MR unit Flow direction: right to left 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR3l00-02 to 03 AMR4l00-02 to 04 AMR5l00-04 to 06 AMR6l00-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.)

Rc 1/4 108 Head end cylinder port Rc 1/4 Dustproof cover Rod end cylinder port (Manual lock release) D (Stroke) Rc 1/8 Unlocking port IN OUT (125) (102) C B A Rc 1 DRAIN 195 (270) Dimensions (mm) A B C D Model Bore size (Nominal size B) FN111 FN112 610 (730) (844) 20 Rc 1 860 (1000) (1134) 40 8 Series FN1 Options Reservoir Dust removal filter 108 32 0 315 45 P.C.D.220 70 70 90 270 (80) 50

PA03 02: LEC-MR-RB-032 03: LEC-MR-RB-12 Set this parameter to enable the absolute position detection system. For details, refer to "LECSN-T Operation Manual, Chapter 12.

VS7-8-FG-D-3M 1 pc. (Third station of manifold where 1 piece of VS7-8-FG-D-3M is added to the basic unit of VER2000-A and VS7-8-FG-S-3N.) AL Dimensions DXT334-X72-04R-04U L side U side D side Exhaust port R side Rc 1/2 supply port (L side) 2-Rc 1/2, Output port 14-9-23

2 VX3 ) VXA How to Order VN VXH2230 02 1 G LVC LVA Bracket Nil B 3 -B JIS Symbol LVH LVD Valve/Body 0 3 ' +0 Electrical option Nil 3 LVQ S ( L LQ Z + ( Port size 6 ( 2 (-' LVN 02 03 04 6 +" 6 &+$ 6 +! TI/ TIL Electrical entry G 8 PA Rated voltage C ) 2 ! >) +# = 1 >) +# = D 543 PAX T ) 3 >) +# = 6 ( 4 !! >) +# = PB 7 !"

Fluoro rubber is used for the rubber parts of seals How to Order Manifolds -lI O Ozone resistant specifications ilTv2o port size EI 114 {xt 3/8 type How to Order Manifold Assemblies shtionu "o,.,) llTV20-02-3. lset (3 station manifold base part no.) lTV2030-312S-X26 . . .. .. . . l set (Electro-pneumatic regulator part no.)

dm3/(sbar) 2.3 Critical pressure ratio 0.35 Flow rate (L/min (ANR)) 810 Controlled flow Sonic conductance dm3/(sbar) 2.3 Critical pressure ratio 0.2 How to Order 02 AS3500 Thread type Rc NPT G Material for handle Resin Metal Nil 2 Nil N F Port size 1/4 3/8 02 03 Metal handle Resin handle Needle Valve/ Flow Rate Characteristics Note) The flow rate characteristics are representative values

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

F(mm) Port B min. port size Weight (g) L1 L2 L3 L4 L5 L6 P Q1 Q2 M KM12-04-02-6 6 17 89 110 99 125 108 139 40 67 75 84 96 100 117 1 4 4 10 18 29.5 19.5 29 10.6 16 6 12 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 61.5 47 1 4 6 17 10 19.5 31.5 21.5 31 13 17 7.5 13.5 73 55 3 8 8 19 11.5 22.5 35.5 24 34.5 15.5 18.5 9 14.7 86 63 Series KM One-touch Fittings

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: C (w/Bowl Guard), Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge

Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: C (w/Bowl Guard), Drain Port: w/Drain Cock, Exhaust Mechanism: N (Non-relieving), Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure

Size: 1/8, Reverse Flow Function: Standard, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory 1: None, Accessory 2: None, Option 1: Non-standard Rated Filtration, Option 2: C [Bowl Guard (Size 2000 Only)], Option 3: None, Rated Filtration: 10μm

Size: 1/8, Reverse Flow Function: Standard, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory 1: None, Accessory 2: None, Option 1: Non-standard Rated Filtration, Option 2: C [Bowl Guard (Size 2000 Only)], Option 3: None, Rated Filtration: 40μm

Body Size: 20, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 02 (1/4), Option: Standard, Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Standard