How Grip: Pinch, Chuck Type / Open, Chuck Type, Number of Fingers: 3 Pcs., Open Dimension L1(mm): 65, Closed Dimension L2(mm): 41, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Cylindrical Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 750, Gripping Force (Open Side at 0.5 Mpa)(N): 780, Environment, Applications: Standard, Additional Function: High Accuracy

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Cushion: Air Cushion, Port thread type: Rc, Auto Switches: M9BA, Lead Wire Length(m): 5, The number of the switches:

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Support bracket

Bore: 32mm, Thread: Rc, Piping: Standard Type, Stroke: 1600mm, Stroke Adjustment Unit: Left: w/Low Load Shock Absorber & Adjustment Bolt; Right: w/Low Load Shock Absorber & Adjustment Bolt, Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number: 1 pc.

Magnet: Built-in Magnet, Mounting: Rod Flange, Bore: 63mm, Port Thread: Rc, Stroke: 150mm, Cushion: Rod Boot None; Air Cushion on Both Sides, Pivot Bracket: No Bracket, Rod End: No Bracket, Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number: 1 pc.

Magnet: Built-in Magnet, Mounting: Axial Foot, Cushion Type: Rubber Bumper, Bore Size: 40mm, Stroke: 25mm, Thread: Female Rod End, Rod Boot: None, Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number: 1 pc.

Magnet: Built-in, Mounting: Through Hole, Standard, Bore Size: 20mm, Water Resistant: None, Port Thread: Bore 12, 16: M Thread; Bore 20 to 50: Rc, Stroke: 15mm, Action: Double Acting/Spring Loaded, Rod End: Roller Type, Direct Mount Switch Groove: None, Mounting Bolt: None, Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number: 1 pc

Magnet: D (Built-in Magnet), Mounting: L (Axial Foot), Cushion Type: N (Rubber Bumper), Bore Size: 40mm, Stroke: 25mm, Thread: F (Female Rod End), Rod Boot: None, Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: Z (5m), Number: S (1 pc.)

IC

Note) If the set pressure is 250 kPa and the output pressure on the pressure sensor is 245 kPa, the deviation is 250 245 = 5 kPa. In order to correct the deviation, the controller increases the output signal until the pressure on the pressure sensor converges at 250 kPa. Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

F

T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R KCT KCJ KCE KCL KCL P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R KCE KCU H O W T O O R D E R U N I O N E T O U C H F I T T I N G S KC S E A L A N T S C O N F I G U R AT I O N H Straight L Elbow T Tee J Straight plug U Y Connector E Bulkhead

2 Phase Stepper Motor/Without Motor Brake Series LXS

(5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

AC

C Auto drain float style (N.C.)

Free Mount Cylinder

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28(38) 25(35) 22(27) 48(58) 40(50) 36(41) 71(101) 56(86) 50(75) 133(170) 106(143) 95(128) 235(294) 193(252) 176(230) 347(425) 286(364) 262(335) For the weight of auto switch, refer to page 68 to 72.

PF-OMN0011_C

4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521 30 250 -69No.PF-OMN0011CN-C / A B C D 0.6 V 1 V 5 V 5.4 V 2.4 mA 4 mA 20 mA 21.6 mA -70No.PF-OMN0011CN-C -71No.PF-OMN0011CN-C 0.58 mm(0.56 mm) (ZS-40-W) -72No.PF-OMN0011CN-C Revision history A B C SMC URL http://www.smcworld.com 2008-2013 SMC Corporation All Rights Reserved No.PF-OMN0011CN-C

MY1

4 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 7.15 x 3.75 x 1.7 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 8.3 x 4.5 x 1.9 C-7 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 Note) Two types of dust seal band are available.

MY1

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

Table of Contents

D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

HRS100/150

V : 150 [L] Cooled substance specific heat C : 1.0 x 103 [cal/(kgfC)] HRS 100/150 HRS 100/150 HRSH 090 HRSH Cooled substance temperature when cooling begins T0 : 30 [C] Cooled substance temperature after t hour Tt : 20 [C] Cooling temperature difference iT : 10 [C] (= T0 Tt) Cooling time it : 15 [min] Conversion factor: hours to minutes : 60 [min/h] Conversion factor: kcal/h to kW : 860

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-