Clean Regulator

200 300 100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa

W2M/4M

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

R P R 26.6 22 Approx. 300 (Lead wire length) 48.8[51] L1 2-3.5 (For mounting) L2 3.5 Manual override Manual override (Pitch) P = 10.5 Approx. 300 (Lead wire length) 12.5 5 M5 x 0.8 (P, R port) 2-3.5 (For mounting) 48.8[51] P R 26.6 P R 13 22 (Station n) (Station 1) 11 (Pitch) P = 10.5 12.5 4.5 41.5[48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5[48.5] (Pitch) P = 10.5 13.5 M3

4/5 Port Air Operated Valve Series SYJA3000

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Micro Mechanical Valve Series VM1000

(Total Travel) 3 P .T.

CQ2

Refer to p.2.3-18 for rod end nut and optional bracket.

Stability of suction position,

P ZP3 P Vacuum Ejector or Pump and Number of Vacuum Pads ZP3E ZP3E Ejector and number of pads Vacuum pump and number of pads Vacuum line ZP2 ZP2V Tank ZP ZPT ZPR XT661 P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

Table of Contents

P Applicable tubing O.D.

A

I L O T O P E R AT E D P R E S S U R E R E G U L AT O R ACCESSORIES P I L O T O P E R AT E D P R E S S U R E R E G U L AT O R Mounting Bracket B24 NAR425 B25 NAR625 S Y M B O L S Bracket Dimensions Bracket No.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8, 5/16" [With External Pilot Specifications] 13.3 25 (Pitch) P = 10.5 25 13.3 16.2 16.2 17 36.7 34 34 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4"

7

P. 142 Body material: CAC408 . P. 146 For Heated water/High temperature oil Body material: C37, Stainless steel . P. 148 Body material: CAC408 . P. 153 Replacement Parts . P. 155 Glossary of Terms . P. 156 Solenoid Valve Flow Rate Characteristics . P. 157 Flow Rate Characteristics . P. 162 Specific Product Precautions .

JXCx-OMT0061CN

->/P.32 10.1 ->/P.15 3.4 ->/P.47 11. 5 (CN1: EMG ->/P.12 3. ) SV1.00 INP ON (INP INP OFF PLC ) ->/P.32 10.1 ->/P.12 3. PLC (PLC) 15ms30ms ->/P.55 12.4 91 - () ->/P.47 11. ->/P.12 3. ->/P.19 5. ->/P.32 10.1 ->/P.12 3. PLC 5 (PLC) 15ms30ms ->/P.55 12.4 () () (LED() ->/P.13 3.2 ) ->/P.47 11. ->/P.47 11. ->/P.47 11. ->/P.12 3. (CN1: EMG ->/P.12 3. ) 92 - 22. 10.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 3) Value for quick response type Symbol 2 position single 3 position closed center 3 position exhaust center 3 position pressure center 2 position double (Double solenoid) 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) Manifold Specifications Piping specifications Note 4) 1 station weight (g)

VS 8-2/VS 8-4

P.3, 12 P.3, 12 D-sub connector D-sub connector 25 pins 26 pins Terminal block is compactly arranged on one side. ( ( ) ) ( ) ( ) ( ) Conforming to MIL D-sub connector P.3, 13 P.3, 13 F kit Flat ribbon cable Flat ribbon cable Conforming to MIL flat ribbon cable connector P.3, 15 P.3, 15 P kit Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type

2/3 Port Valve

Water Air Oil Low vacuum (1 Torr) Coolant Steam Applicable fluid 1 8 1 4 3 8 1 2 3 4 Rc(PT) 1 Port size 1 4 1 1 2 1 2 32A 40A 50A Flange 65A 80A Page P.4.2-3 to P.4.2-10 P.4.2-11 to P.4.2-18 P.4.2-19 to P.4.2-27 P.4.2-28 to P.4.2-34 P.4.2-35 to P.4.2-42 4.2-2 2 Port Valve for Comressed Air and Air-hydro Circuit Control Process Valve SeriesVNA Universal 2 Port Valve Exclusively for air pressure

•

fl tube (mm: N6 (Nylon tube ~/4) 16.5 7 2,5 I P Q, R 'U6 ($Oft IIj).'>'6!

VQ5000

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 position double 3 position exhaust center Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber 4 Bore 6.1 Bore 6.1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) PUSH TURN LOCK 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 Light/Surge voltage suppressor 1 (P) 5 (R1)

CRB2/CRBU2/CRB1

(mm) L2(3 x P) Size 10 X L1 max.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K J K T T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be