Booster Regulator/Air Tank

set (Supplied with product) SRF Connected to VBA20A, 40A Connected to VBA22A, 42A ITV Tank IN port Rc1/2 IC Booster regulator IN port Booster regulator IN port C C ITVH ITVX EXH: C EXH: C (A) (A) D PVQ (B) (B) OUT OUT 355 Tank OUT port Rc3/4 VY1 256 256 205 4 x 13 4 x 13 VBA VBAT VBA VBAT 50 50 Drain valve Drain port Rc1/4 150 150 AP100 500 250 250 824 Booster regulator model A B C D VBA20A

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

PSxx-OMM0006CN

X B(ZS-24-B) M45L B -16No.PS-OMM0006CN-E M8(3) (ZS-35-C/ZS-35-D) +(ZS-35-F/ZS-35-G) () ZS-35-C/D -17No.PS-OMM0006CN-E 79 Nm M5 (12mm) 1 2 1) 0.1 mm 2)0.1 mm 3)+0.15 mm -0.2 mm -18No.PS-OMM0006CN-E () TU0425 ( 4 2.5) -19No.PS-OMM0006CN-E (M8(3)22) Z/ISE40A--DC(+) -S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 OUT1 OUT2 DC(-) DC(+) -S/-R () NPN 2

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

VK3000

Port size (P, A and B port) Rated voltage M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz R1, R2: M5 4 Option 5 6 24 VDC 12 VDC Nil None With bracket (Not assembled) 7 240 VAC, 50/60 Hz 9 Other Option F Option Part No. Description Part no.

Compact Hydraulic Cylinder

Mounting bolt CHQ CHQ C D CHK Model C D Mounting bolt part no. Model C D Mounting bolt part no.

Compact Type

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

VXZ

LQ K P 88 97 108.5 113.5 VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 60 60 62 62 48 48 50 50 72 80 95 100 LVN TI/ TIL PA Conduit terminal: T N.C.Normally closed N.O.Normally open PAX PB Model N N.C. N.O. N.C. N.O.

C95Series

~htening (mm) across flats or u9(Ft'lbs) Ackhtional weighl .. ' 0.24150 stroke 32, 40 MS32 4mm 5.1 -4S-C1247 e Cylinder stroke '100 stroke 1.23 + (0.24 X 100150) ..1.71 Ibs. 50. 83 MB-50 Smm 8. 1 -48-C I 249 Allowable Kinetic Energy Cushion Mechanism Maximum Kinetic Energy Absorption FOOl , MB80 80, -48AC1251 p t 900 I500 I-: 300 " 80 ...3 ~Bore sIze Er.,,;..,cush1OO kIrlgIh Allowable kineiiC

Series VCL

Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm

COQ2BP

Foot , u Flange Clevis Moun~ 50 CQ-L050 CQ-F050 CQ0050 f~ ",,~~.~ 50 25, 30, 35, 40, 45, 50, 75, 100 ..63 CQ-L063 CQ-F063 CQ0063 63 25. 30. 35, 40, 45, 50, 75, 100 . 60 " CO-LOBO CO-FOeD CO-DOSO Notes. If foot bracket is required, order 2 pcsIcylinder.

Title not found

Compact 35mm Light weight 120g 50mm 66mm 270g 700g Pressure gauge can be mounted from the front or rear Rear pressure gauge mounting Standard Back Pressure gauge VAC SET SMC P (Vacuum pump side) (Pad side) K U C S O H L VAC SET L H O S C Pressure gauge Panel mounting capability is standard U K P SMC (Vacuum pump side) (Pad side) Front Applications Lifting of work pieces Leak tester Pressure

SFOD-OMT0009CN

b) 2 1 (8) (14) (a) B1 A1 (17.7) 6 5 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 10.4 [820m] (a) (b) L E C P * A B-1 2 L 1 A A-1 6 B B-2 ) 8 8m 5 B A-2 ) 3 A 10m COM-A/COM B-3 4 COM-B/ A-3 ) B 15m (c) Shield ) C 20m Vcc B-4 12 GND A-4 13 ) A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) (b) 2 1 (5.5) (14) (a) B A1 5 6 (17.7) 1 (c) 2 1 (18) A6 B6 (6.3) 15 16 L (11) (30.7) 82 No.SFOD-OMT0009CN-B

VG342

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

IDX-OM-Z004

50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1. 1.5 2. 4.2 IDF100150F-W

AC Servo Motor Driver (CC-Link Type)

Please change the parameter in the initial setting. *3 The minimum unit of the travel distance of the actuator should be 1 [m]. -27- Recommended Parameter Values [LEY] LEY25/LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

IDX-OM-O004C

C01 C02 PRS PC C01 C02 C11 FM C11 PRS P 6 2 6.

AC Servo Motor Driver (MECHATROLINK-II type)

It is necessary to set it on the PLC side according to the kind of PLC. 38 - 6.3 The recommended value of the parameter [LEY] LEY25/ LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Initial value Recommended value Parameter *1,*2 Para.