VP3145/3165/3185

Ambient and fluid temperature (C) Response time (ms) (1) (at the pressure of 0.5 MPa) 0 (No freezing) to 60 OFF AC 30 or less ON AC 30 or less DC 30 or less DC 40 or less Max. operating frequency (Hz) 3 Required (Equivalent to turbine oil Class1 ISO VG32) Lubrication (2) Yes (Non-locking) Manual override Mounting orientation Unrestricted 150/50 Note 1) Based on dynamic performance test, JIS

Compact Guide Cylinder End Lock Type SeriesMGP

B + Stroke A + Stroke FA FB S HR E b a With front lock XAH7 c d e MO XB T-slot dimensions (mm) DM HN XAH7 XC XL Bore size (m) a b c d e End lock mechanism (locking type manual release ) 6.5 10.5 5.5 3.5 9.5 32 Section XX detailed diagram 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA

Modular Design with Uniform Body Style

AD27-D With bowl guard AD27-C-D AD37m-D AD47m-D Normally open (N.O.)

HEC_W-E

used for PID control. 0.3 to 9.9 C (0.1 C) 0.6 (3.0) 4 ARW Range Sets integral operation range of PID control. 0.3 to 9.9 C (0.1 C) 1.0 ARW: Anti Reset Windup (3.3) 5 I Constant Sets integral time used for PID control. 1 to 999sec (1sec) 150 (80) 6 D Constant Sets differential time used for PID control.

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j A AulO switch o o c: C' iii' JJ o Q, .J!

XL

(a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

Free Mount Cylinder

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28(38) 25(35) 22(27) 48(58) 40(50) 36(41) 71(101) 56(86) 50(75) 133(170) 106(143) 95(128) 235(294) 193(252) 176(230) 347(425) 286(364) 262(335) For the weight of auto switch, refer to page 68 to 72.

New

B B DIN terminal Conduit terminal F Q Cable 0.24 to 0.47 D S G1/2 1.34 Qp0.08 F (1.73) 1.24 0.99 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp0.08 B B1 B Conduit Faston type Q F D Q F 0.44 z11 G1/2 0.90 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part Faston connector (inch) 250 Series Electrical entry Size Port size Grommet (with surge P A B B1 C D E

42

C kit (Plug lead type) 6.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

RB/RBL/RBQ

RB(C)0805 RB(C)0806 RB(C)1006 RB(C)1007 RB(C)1411 RB(C)1412 Model RB(C)2015 RB(C)2725 O.D. thread (mm) M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 Thread prepared bore (mm) 9.1 + 0.1 0 18.7 + 0.1 0 7.1 + 0.1 0 12.7 + 0.1 0 25.7 + 0.1 0 Tightening torque (Nm) 1.67 3.14 10.8 23.5 62.8 Operating Environment 2.

SFOD-OMT0009CN

USB 7. 106 No.SFOD-OMT0009CN-B 7. 7. 4. ( EMG ) 4. 107 No.SFOD-OMT0009CN-B 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 () [mm/s] 22 12 6 26 13 7 34 17 9 34

Vacuum System Peripherals:

ZP Flow characteristics C (dm3/(sbar)) Effective area (mm2) (Cv) Port size Rc Model Orifice dia.

Modular Type Filter Regulator Series AW

R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H 1 2 6 8 C J N R W Z With bracket (with set nut) Accessories Float type auto drain (N.C.)

Refrigerated Air dryer Series IDU/IDF

(C) 35 40 45 50 30 Outlet air pressure dew point (C) Ambient temp.

Rotary Actuator

Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated

LVQ

LVQ20 C A B D (Max.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Lubrication Manual override Impact/Vibration resistance (2) Enclosure VV061 Non-locking push type 150/50 m/s2 VT325-C VV100 Dustproof Note 1) Based on dynamic performance test, JIS B 8419: 2010.

3

This is the same concept representing the easy to run through as sonic conductance C.

ZP3

Lock ring Adapter z c x Pad 165 A