CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Maintenance check Model Connect(Flange) 2B/3B 8B C 2B/3B/4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 X l 400 Anchor bolt Caution M20 X l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 q The replacement interval for the element for models AMD150 to AMD850 is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first.

Digital Flow Switches

CM01-8DP4S DDK Ltd. 10 Series PF2A Dimensions PF2A703H, 706H, 712H D E Internal circuits and wiring examples to are terminal numbers.

PF3A8xxH.eng

PF3A802H AC40#-D Y400-D Y400T-D E400-#04-D 4 : For more information about the options, refer to our website (URL https://www.smcworld.com). Do not apply torsion or bending moment other than the weight of the product itself. External piping needs to be supported separately as it may cause damage.

HRX-OM-O021

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

air-filter-e

Pressure Control Equipment Air Preparation Equipment One element included Pressure gauge FGF S A E B D 1 20 005 Symbol Pressure gauge Without pressure gauge (with plug) Nil Three, five elements included FGF S With pressure gauge (1 MPa: Brass for wetted parts) 3 005 A 40 E D G Bag filter Option Material Option Applicable model FGF3 FGF5 FGF1 None Vessel material Applicable model FGF3 FGF5

Air Preparation Equipment

Pressure Control Equipment Air Preparation Equipment One element included Pressure gauge FGF S A E B D 1 20 005 Symbol Pressure gauge Without pressure gauge (with plug) Nil Three, five elements included FGF S With pressure gauge (1 MPa: Brass for wetted parts) 3 005 A 40 E D G Bag filter Option Material Option Applicable model FGF3 FGF5 FGF1 None Vessel material Applicable model FGF3 FGF5

4-channel Flow Monitor ( compatible)

L/min and PD=500) Pr = a x (PD) + b = 0.016 x 500 + 0 = 8.00 [L/min] (2) Conversion from the flow measurement value to the process data (For range: 100 L/min, unit specification cfm and Pr=2.0[cfm]) (PD) = (Pr b) / a = [2.0 (0)]/(0.00353) 567 -74No.PF-OMA1011-A IO-Link parameter setting IODD file IODD (I/O Device Description) is a definition file which provides all properties and parameters

Electric Actuator with Integrated Guide Series LTF

800 900 1000 36 LTF6EPH 4 to 500 to 390 40 LTF6ENH 8 to 500 to 390 44 LTF8FPL 12 to 1000 to 890 to 710 to 580 to 480 48 LTF8FNL 16 to 890 to 710 to 580 to 480 to 1000 71 34 LTF6EPF 2 to 300 to 230 38 LTF6ENF 6 to 300 to 230 42 LTF8FPH 10 to 500 to 440 to 350 to 290 to 240 46 LTF8FNH 14 to 500 to 440 to 350 to 290 to 240 52 LTF6EPH-K 20 to 500 to 390 56 24 LTF6ENH-K to 500 to 390 60 28 LTF8FPL-K

Auto Switch Guide

/E76A/E80A D-R731/R732 D-R801/R802 D-R731C/R732C D-R801C/R802C General Purpose Auto Switch Connector D-H7A1/H7A2/H7B D-G59/G5P/K59 D-H7C D-G39/K39 D-G39A/K39A D-F79/F7P/J79 D-F7NV/F7PV/F7BV D-J79C D-F59/F5P/J59/J51 D-G39C/K39C D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2

Flow Control Equipment

D The air in the cylinder initially opens the piston valve and the check valve and discharges rapidly through the switching valve. The fully opened piston valve closes as shown in Fig. D when the pressure in the cylinder is lower than the set pressure. Then the air passes through the check valve and becomes discharged (Fig. D).

Modular Type Regulator Series AR

Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 5000 10 0 0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) 37 Regulator AR10 to 60 Conditions: Inlet pressure 0.7MPa Outlet pressure 0.2MPa Flow rate 20L/min (ANR) Pressure Characteristics (Representative values) AR10 AR40 0.3 0.25 Set point 0.25 Set point Outlet pressure MPa Outlet pressure MPa 0.2 0.2

Air Cylinder

MB1 D-G5/K5/G5W/G5BA D-K59W, D-G59F, D-G5NT 20 to 100 D-C7/C8, D-C73C/C80C 20 to 63 CA2 CS1 Hs Hs CS2 24.5 16 A B B A D-B5/B6/B59W 20 to 100 D-H7/H7W D-H7NF/H7BA/D-H7C 20 to 63 Hs Hs 24.5 16 B A A B Auto Switch Mounting Height (mm) D-H7 D-H7W D-H7NF D-H7BA D-C7/C8 Auto switch model D-G5/K5 D-G5W D-K59W D-B5/B6 D-B59W D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) D-G5NT D-G59F D-H7C D-G5BA D-C73C D-C80C

2–4

Note 12 16 20 25 32 40 50 D-F7 , J79 D-F7 V D-J79C D-F7 W, J79W D-F7 WV D-F7BAL, F7BAVL D-F7 F D-F7NTL D-F7, D-F7V D-J79, D-J79C D-F7W, D-F7WV D-J79W D-F7BAL, D-F7BAVL D-F7NTL, D-F79F Switch mounting screw (M3 x 0.5 x 10 ) Switch spacer Switch mouinting nut D-A7 , A80 D-A73C, A80C D-A7 H, A80H D-A79W 6 6 6 32, 40 50 BQ-2 D-F7LF 8 7 8 D-F9V D-F9W, D-F9WV D-F9BAL Switch mounting bracket Switch

F

I F F E R E N T D I A.

CXT

D-F7BAL D-F79F D-F7LF D-F7NTL D-F79 D-F7P D-J79 D-F79W D-F7PW D-A72H D-A73H D-A76H D-A80H 32, 40 (mm) D-A72H D-A73H D-A76H D-F79W D-F7PW D-J79W D-F7NTL D-F7BAL D-F79F D-F7LF D-A80H D-F79 D-F7P D-J79 Auto switch model A B Hs A B Hs A B Hs A B Hs Symbol Standard stroke 32 40 9.5 13.5 6.5 9 32.5 36 9.5 13.5 10.5 13 32.5 36 14.5 18.5 10.5 13 32.5 36 6.5 9 32.5 36 13.5 17.5 Bore size (mm) Long

REC

30.0 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.5 37.0 67.0 36.5 63.5 33.0 Auto Switch Mounting Height (mm) D-C7 D-C8 D-H7 D-H7lW D-H7lF D-H7BAL D-B5 D-B6 D-B59W D-G5NTL D-H7C D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C73C D-C80C D-A44 HS HS HS HS HS 20 24.5 27 62 69.5 27.5 25 27 29.5 64.5 72 30 32 30.5 33 68 75.5 33.5 40 35 37.5 72.5 80.0 38 4.9-16

VQ4000

(Except L kit) U D U D The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.)

VQ5000

Specify the wiring specifications on the manifold specification sheet. 12 12 stations Note 1) U D U D Note 2) Note 3) 2-6-10 11 Base Mounted Series VQ5000 Plug-in Unit Electrical wiring specifications Standard wiring D-sub connector assembly (AXT100-DS25) Wire colors 015 030 050 D-sub connector Terminal no.

2/3 Port Valve

Note 3) "D", "E", "N", "P" etc. in the parenthesis are option symbols.