Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 35, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Type: Standard, Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 50mm, Body Option: CM (C+M), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Type: Standard, Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 35mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Type: Standard, Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 100mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Type: Standard, Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 50mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Type: Standard, Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 75mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: W (Double Knuckle Joint)

Variation: D (2-step Control, Single Acting/Bellows Seal, O-ring Seal), Flange Size: 40, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: A93 (A93--Reed, DC Volt, AC Volt, LED, Horizontal), Lead Wire: L (3m), Number of Switches, Mounting Position: A (2 pcs, Valve Open/Closed)

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

SMC has redesigned the NCQ2 compact cylinder with a new body, making it possible to mount auto switches on any of the 4 surfaces, depending on the installation conditions.  Auto switch mounting grooves have replaced the NCQ2's mounting rails, preventing projection of auto switches and improving ease and safety of work.Compact, double acting, single rod, large bore , Bore size (mm): 125, 

Table of Contents

7 No. q w e r t y u i o !

1

MY1M(W) MB 8 Mechanically jointed rodless cylinder MY1 Cam follower guide type With cover (W) is also available.

Sine Rodless Cylinder Series REBR Direct Mount Type

First tentative bore size determination W D 1.6 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation (Refer to page 75 for vertical operation.)

RSQ

1 w o @0 !7 i !9 !

SMC Pneumatic Clean Series

With air cushion WB 2-P (Rc, NPT, G) WA GB Relief port M5 x 0.8 10 GA W W RA Relief port Width across flats B1 MM H1 D MAX.

Basic Type/Direct Mount Type

9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.