Magnet: Built-in Magnet, Mounting: Through-hole, Standard, Type: Pneumatic, Bore Size: 40mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke 1: 25mm, +: None, Stroke 2: 25mm, Body Option: Standard, Rod End Female Thread, Auto Switch Groove: None (for 12-25 Bore w/o Magnet), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number

Magnet: Built-in Magnet, Mounting: Through-hole, Standard, Type: Pneumatic, Bore Size: 40mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke 1: 25mm, +: None, Stroke 2: 50mm, Body Option: with Rubber Bumper, Auto Switch Groove: None (for 12-25 Bore w/o Magnet), Auto Switch: No Switch, Lead Wire or Prewired Connector: 1m, Number: 2 pcs. (Or None in the Case of No Switch), Stroke

Magnet: Built-in Magnet, Mounting: Through-hole, Standard, Type: Pneumatic, Bore Size: 40mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke 1: 25mm, +: None, Stroke 2: 75mm, Body Option: with Rubber Bumper, Auto Switch Groove: None (for 12-25 Bore w/o Magnet), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or

Magnet: Built-in Magnet, Mounting: Through-hole, Standard, Type: Pneumatic, Bore Size: 40mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke 1: 30mm, +: None, Stroke 2: 50mm, Body Option: with Rubber Bumper, Auto Switch Groove: None (for 12-25 Bore w/o Magnet), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or

Magnet: Built-in Magnet, Mounting: Through-hole, Standard, Type: Pneumatic, Bore Size: 40mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke 1: 5mm, +: None, Stroke 2: 5mm, Body Option: Standard, Rod End Female Thread, Auto Switch Groove: None (for 12-25 Bore w/o Magnet), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number:

Magnet: Built-in Magnet, Mounting: Through-hole, Standard, Type: Pneumatic, Bore Size: 40mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke 1: 50mm, +: None, Stroke 2: 50mm, Body Option: with Rubber Bumper, Auto Switch Groove: None (for 12-25 Bore w/o Magnet), Auto Switch: No Switch, Lead Wire or Prewired Connector: 1m, Number: 2 pcs. (Or None in the Case of No Switch), Stroke

Magnet: Built-in Magnet, Mounting: Through-hole, Standard, Type: Pneumatic, Bore Size: 40mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke 1: 30mm, +: None, Stroke 2: 20mm, Body Option: Standard, Rod End Female Thread, Auto Switch Groove: ø12 to ø25, 2 Surfaces; ø32 to ø100, 4 Surfaces, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Free Mount Cylinder

rod No. of auto switches mounted D-A9, D-A9V D-M9, D-M9V D-F9W, D-F9WV 1 pc. 5 5 5 2 pcs. 10 5 10 Weight/( ): Denotes the values with D-A93.

Table of Contents

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

ISO Cylinder

5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9lV*2 5 10 10 + 15 (n 2) (n = 4, 6) D-A7l D-A80 D-A73C D-A80C Rail mounting 5 10 15 + 10 (n 2) (n = 4, 6) 5 10 15 + 10 (n 2) (n = 4, 6) D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) D-F7lWV D-F7BAV D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) D-M9l D-A9l*2 10

Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Table of Contents

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

Table of Contents

9 10 10 11 D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65

Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Single acting, single rod, compact cylinder , Bore sizes *: 12, 16, 20, 25, 32, 40, 50, Standard stroke range *: 5, 10, 20 , Port threads: M *; Rc, NPT or G * , Auto switch capable, "Compact Cylinder, COMPACT CYLINDER

Smooth Cylinder/Low Speed Cylinder

7.5 10 25 7.5 2.5 10 7.5 4.5 3.5 [1] 7 5.5 7 5.5 24.5 11 9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.

Compact Type

47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

MY1

(Except 10.) For other lengths, consult SMC.

CXS

/s 1 Graph V = up to 300mm/s 2 0.5 0.4 CXSL6 0.05 CXSM6 Weight m (kg) Weight m (kg) 0.1 CXSL6 0.05 CXSM6 5 0.03 5 0.01 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L (mm) Overhang L (mm) 10 to 32 Graph V = up to 200mm/s 3 Graph V = up to 400mm/s 4 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30

Compact Type Dual-Rod Cylinder Series CXSJ

47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.