Series KV2 Fittings

(g) Bag/Box Quantity MB D2 D3 D4 D5 D6 L1 L2 L3 5/32** 5/32 5/32 5/32 1/4** 1/4 1/4 1/4 3/8** 3/8** 3/8 3/8 3/8 1/2** 1/2** 1/2** 1/2 1/2 1/2 5/8** 1/4 5/32 5/32 5/32 3/8 1/4 1/4 1/4 1/4 1/4 3/8 3/8 3/8 1/4 3/8 3/8 1/2 1/2 1/2 5/8 1/4-18 1/16-18 1/8-27 1/4-18 1/4-18 1/8-27 1/4-18 3/8-18 1/4-18 3/8-18 1/4-18 3/8-18 1/2-14 1/2-14 3/8-18 1/2-14 1/4-18 3/8-18 1/2-14 1/2-14 KV2Y03-07-35S KV2Y03

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes (mm) Inch sizes (inches) Cylinder side port size Elbow type Model AS121F AS221F AS321F AS421F 3/16 1/4 5/16 3.2 4 6 8 10 12 6 to 20 20 to 40 40 to 63 63 to 100 1/8 5/32 3/8 1/2 M5 1/8, 1/4 1/4, 3/8 1/2 Universal type AS131F AS231F AS331F AS431F 6 to 20 20 to 40 40 to 63 63 to 100 M5 1/8, 1/4 1/4, 3/8 1/2 Speed controller with One-touch fitting

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

2 5 1 2 3 4 5 1 2 3 4 5 1 2 3 4 5 5 2 1 3 4 32.4 32.6 15 18 M12 SPEEDCON w 4 3 5 1 2 Plug connector pin assignment A-coded (Normal key) 4.2 M12 SPEEDCON M12 SPEEDCON 17 3 4 Socket connector pin assignment A-coded (Normal key) Wiring #7 PCA-1557798 Y connector (2 x M8-M12) Socket connector pin assignment 40.7 9.9 15.8 8.3 14.8 1 q 1 3 3 4 1 2 3 4 1 2 1 4 21.8 21.7 13 12 M8 4 3 w 1 3 3 4 Plug

5 Port Air Operated Valve

EXH port EXH port VF 000 75 A 1 3 Series Thread type Nil F N T Rc Symbol 3 5 Series Port size VFA3000 1/8 G VFA5000 1/4 NPT NPTF 1514 5 Port Air Operated Valve Body Ported/Manifold VFA1000/3000/5000 Series Dimensions: VFA1000 Series Type 30: VV5FA1-30-1-: Common exhaust 1/8 [4 (A), 2 (B) port] 12 L2 L1 SYA M5 5 10 17.5 17.8 27.8 M5 x 0.8 [4 (A), 2 (B) port] 10 SYJA 20.3 20.3 4A 2B VZA P R

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

70pvpump

N03 T03 NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P11 P11F Compact, lightweight (Without foot) P11N P11T PAP331 (Assembled in clean room) NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P13 P13F 140 mm 120 mm P13N P13T NPTF 1/4 Threads 110 mm Option Reset button Weight: 2.1 kg Air operated type is also standardized.

SFOD-OMT0005CN

0 () 1 2 () 3 () 4 5 6 1 7 8 9 ON 10 11 12 13 1 14 2 15 Word2/ Word Bit 0 OFF ON*1 1-7 () 2 8-9 1:ABS() 2:INC() *2 10-15 () Word3 Word Bit 3 0-15 1 1 mm/s Word4,5 Word Bit 4 0-15 () (-)(+)*3 0.01 mm 5 0-15 () Word6 Word Bit 6 0-15 1 *1 1 mm/s 2 *1 ON ONOFF PLC *2 1(ABS)2(INC) *3 20(P.83) -39- Word7 Word Bit 7 0-15 1 *1 1 mm/s 2 Word8 Word Bit 8 0-15 *1 1% Word9

ZR

Dimensions: ZR1-FX Circuit diagram Suction filter 1 1 1 1 1 1 (Mounting hole) Suction filter M5 PD port (Vacuum release pressure port) Remove tha plug from PD port at external release.

Vacuum Pad

Qmax 55.5 C = Qmax: Max. suction flow rate L/min (ANR) C: Conductance [dm3/(sbar)] Front matter 14 Model Selection 7 Vacuum Equipment Selection Example #Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.

EXxx-OMW0014CN

Diagnostics type 1 . 5-1 Diagnostics type 1 Byte 0 General diagnostics 1 1 General diagnostics 2 2 Valve diagnostics 1 3 Valve diagnostics 2 General diagnostics 1 . 5-2 General diagnostics 1 Bit 0 System fault 0Diagnostics type 1Diagnostics type 1 1 Valve-coil(s) short circuit 0() 1 1 2 Module error 0 1 1 3 Changed module layout 0 1 1 4 US1 Diagnostics 0US1 ON 1US1 (DC19.2 V )

4-channel Flow Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0:

Possible to transfer a workpiece at low-speed.

M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 Rc 1/8 M10 x 1.5 15 M6 x 1 M10 x 1 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 Rc 1/8 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9

Lubrication Equipment

-ISALT-9 ALT-9-IS2 1 1 1 1 2 4 1 4 3 AIR: OIL: 4 1 4 3 2 1 4 1 Port size 8 3 8 3 1 Fluid Proof pressure Max. operating pressure Air 1.5MPa 0.7MPa 1.0MPa Operating pressure differential range (1) 0.1 to 0.6MPa Vibration resistance {Differential pressure 0.3MPa } 2 1G(9.81m/sec ) or less 120 : 65 : 100 : 120 190 220 1800 4 1 8 3 1 : 460 1 : 650 4 1 Min. operating flow (l/min (ANR)) (2) 2 1

SZ3000

Station 1 14 14 Station 1 SOL.A SOL.A SOL.A 1 1 1 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor The common polarity should be the same as the common specifications of the valve to be used.

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

Title not found

1]I!

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Control 0 1 Meter-out Meter-in 15-9-89 16 Construction AS2200

OMR0032

Controller Product name Quantity Counter plug Power supply plug Controller (LATCA-) 1 pc. Power supply plug 1 pc. Counter plug 1 pc.

Rotary Actuator/Vane Type

1 i o !