Magnet: None, Mounting: U (Rod Trunnion), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 75mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: No Switch, Lead Wire or Prewire Connection: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None

Magnet: None, Mounting: Rod Trunnion, Type: Rubber Bumper, Bore: 40mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 75mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: No Switch, Lead Wire or Prewire Connection: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the

Magnet: None, Mounting: Rod Trunnion, Type: Rubber Bumper, Bore: 40mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 50mm, Thread: Female Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: No Switch, Lead Wire or Prewire Connection: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in

Magnet: None, Mounting: U (Rod Trunnion), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 50mm, Thread: F (Female Rod End), Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled)

Magnet: None, Mounting: Front Trunnion, Style: Non-lube Rubber Bumper, Bore Size: 40mm, Thread: NPT, [ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion, Piping: Screw-in Piping, Stroke: 75mm, Stroke Adjust Symbol: None, Rod Boot: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option

Magnet: None, Mounting: Front Trunnion, Style: Non-lube Rubber Bumper, Bore Size: 40mm, Thread: NPT, [ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion, Piping: Screw-in Piping, Stroke: 25mm, Stroke Adjust Symbol: None, Rod Boot: Nylon Tarpaulin, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch

Magnet: None, Mounting: Rod Trunnion, Type: Rubber Bumper, Bore: 40mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 25mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewire Connection: -, Number: -, X Option: -

Magnet: None, Mounting: Rod Trunnion, Type: Rubber Bumper, Bore: 40mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 600mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Single Knuckle Joint, Auto Switch: -, Lead Wire or Prewire Connection: -, Number: -, X Option: -

Magnet: None, Mounting: Rod Trunnion, Type: Rubber Bumper, Bore: 40mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: Nylon Tarpaulin, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Single Knuckle Joint, Auto Switch: -, Lead Wire or Prewire Connection: -, Number: -, X Option: -

Magnet: None, Mounting: Rod Trunnion, Type: Rubber Bumper, Bore: 40mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 50mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewire Connection: -, Number: -, X Option: -

Magnet: None, Mounting: U (Rod Trunnion), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 25mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled)

Magnet: None, Mounting: U (Rod Trunnion), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 600mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: V (Single Knuckle Joint)

Magnet: None, Mounting: U (Rod Trunnion), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: J (Nylon Tarpaulin), Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: V (Single Knuckle Joint)

Magnet: None, Mounting: U (Rod Trunnion), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 50mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled)

Cylinder with Lock

100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Ordering Example of Cylinder Assembly Cylinder model: CP96NDD50-100C-NW-M9BW

XLAQ/XLDQ

Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) 5 14 45 80 Internal 1.3 x 10-10 at normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Port size M5 Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

LEC-OM07605CN

(1) LECSS2-TAC200V240V (4) (4) RA1 ON OFF RA1 MC MC SK MCCB CNP1 MC (7) MC (6) (11) (10) L1 CNP3 (6) AC 200 V 240 V U U L2 AC200240V V V L3 M W NW P3 (1) (10) (1) (9) PE P4 CNP2 P+ (2) C (2) (11) (3) (10) (3) D CN2 L11 L21 (7) (8) CN3 CN3 DC 24 V ( 12) DC24V (11) (5) 2 EM2 DOCOM (5)2 (5) (5) (4) RA1 ALM (4) DICOM DC 24 V ( 12) DC24V (11) (8) CN8 (9) () () 1. P3P4() 2.

17

O-ring MY1B25-PS MY1B32-PS MY1B40-PS Note) For the replacement procedure of replacement parts/seals, refer to the Operation Manual. 1192 MY1B Series Mechanically Jointed Rodless Cylinder Basic Type Standard/Centralized Piping Type 25, 32, 40 MY1B25 /32 /40 Z Stroke (LL) L 2 x 2 x B counterbore depth C LD through-hole 4 x MM depth M P(MY1BG) (Hexagon socket head taper plug) PA YW PP QQ RR QW NW