Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.
HS D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NT D-F7BAL 40, 50 25, 32 Approx. 30.5 A A Approx. 22 A A Approx. HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.
17 M10x1.5 5 14 MXW25 15 50 MXW-A2512-X11 Maintain a minimum adjustment of at least 1mm from the end blocks.
, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both
, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both
) 112 93 12 Y 25 (14 port) PE port 5 3 37 25 22 14 1 25 25 9 1/8 12 port 3/8-2 port 3, 5 port 1/4, 3/8 1 port 14 port 1/8 1/4, 3/8-2 port 2, 4 port EVS7-6-FG-D-M0 EVS7-6-F G-D-M0 H J I 186 196 89 89 13 (4 port) 50 50 13 (2 port) 13 (4 port) 50 50 13 (2 port) B A B A 50 62 50 62 38 14 38 12 14 12 Manual override Manual override P R1 R2 P R1 R2 Indicator light 2-6.5 mounting hole 42.5 42.5
A 1 () () A 2 LECSCSeries/ / *3) 1 1.5 3) 1 1 () A 3 1. 15P()-N() 2. L1L2L3(MC) (MC) 3. () () A 4 4.
/60 Hz) (kW) 7.5/8.7 9.2/10.8 10.4/12.4 Air ow capacity scfm (m3/min) Rated conditions Power supply voltage (Frequency) Note 7) Three-phase 200 VAC (50 Hz)/200, 220 VAC (60 Hz) Power consumption (50/60 Hz) Note 8) (kW) 2.8/3.3 3.8/4.5 3.8/4.5 Operating current (50/60 Hz) Note 8) (A) 8.9/9.9 13.0/14.5 13.0/14.5 Electric Applicable earth leakage breaker capacity Note 9) (A) 20 30 Condenser
) Side Support Side support A MY-S25A 9.5 5 35 5.5 8 50 77 91 Side support B MY-S25B M6 x 1 35 77 8 50 91 A set of side supports consists of a left support and a right support.
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
116 23 1.6 76.2 Brown (1) DC(+) Main circuit Black (4) OUT White (2) NC / Analog output 54 44 34 Blue (3) DC() Use this sensor by connecting to P/A remote type display unit Series PF2A3. 4-4.5 2-Port size 30 40 50 Connector pin numbers 2 1 (43.5) A 4 3 (mm) A B Output specification Pin no.
When a load, such as a relay or solenoid, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.
With(Wihtout light) Note) Standard lead wire length: 300mm Coil voltage 1 2 3 4 5 6 9 100VAC(50/60Hz) 200VAC(50/60Hz) 110VAC(50/60Hz) 220VAC(50/60Hz) 24VDC 12VDC Others 23 Series VQZ 3 Port Solenoid Valve Manifold Options Manifold Options Blank plate VVQZ100-10A-2 VVQZ200-10A-2 VVQZ300-10A-2 Used to reserve a valve mounting space on the manifold for future use.
A, H DimenSions when Mounting a Single/Double Knuckle Joint together with a Rod End Nul H, Applicable knuckle joint part number ~bol B~ L, H, H A I type single knuckle sIZe (mm) Ytype double knuckle " Bore size (mm) A H 125 3.5 100 1-12A Y-12A 50 156.5 110 125 65 125 ~ 140 3.5 105 1-14A Y-14A 50 161.5 110 140 65 125 160 1-16A Y-16A 56 3.5 110 170.5 120 160 76 140 11 ., Ie 'I.'"
B F Accumulated pulse output Brown 1 Load ON OFF OUT1 Main circuit Main circuit 4 Black Analog output White A 50 msec 2 + 24 VDC Load DOWN MODE SET U P 3 Blue C 2-G 60 Load is an analog input equipment such as a voltmeter, ammeter.
40 100 8 70 125 M40 X 1.5 54 42.5 69.3 60 23 57 M40 X 1.5 Y-20 50 40 100 8 70 125 M45 X 1.5 54 42.5 80.8 70 27 67 M45 X 1.5 Y-25 9 86 160 81 63 50 126 M56 X 2 53 98.1 85 34 82 M56 X 2 Y-30 9 175 87 M64 X 2 66 105 80 63 160 95 38 92 M64 X 2 110.0 Use a single knuckle joint or a double knuckle joint individually.
(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A
(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A
of 20, 50% for 32, 55% for 40 and 60% or less for 50, respectively.