High Speed Pilot Operated

Flow Rate Characteristics Operating Frequency Port size Valve flow rate characteristics 70 Ambient and fluid temperatures (Upper limit) [C] 1, 5, 3 (P , EA, EB) 4, 2 (A, B) 1 R 4/2 (P R A/B) 4/2 R 5/3 (A/B R E) Model 60 C [dm3/(sbar)] b C [dm3/(sbar)] b DXT1215 1/8 1/8 1.3 0.37 1.3 0.23 50 Calculation of effective area S and sonic conductance C: S = 5.0 x C 40 30 20 10 0 0 200 Operating

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output Max. 30 V, 80 mA Residual voltage 1 V or less 1.5 MPa Withstand pressure 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at no load) Current consumption

CEx-OMQ0010

PNP C E U 1 C E U 5 AC80120V AC100240V DC24V DC24V NPN RS-232C P PNP RS-232C+BCD NPN P PNP C E 1 R *1) (CE1-ROOC) 05 5m 10 10m 15 15m 20 20m *1)() C ()(CE2)(CE2**-*Z ) CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 11 3 100 200 200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES YES

Electronic Pressure Switch Series (Separate Type)

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 to 1 MPa 0 to 101 kPa 100 to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 101 kPa 0 to 101 kPa 101 to 101 kPa 0 to 101 kPa 100 to 100 kPa Set pressure range 12 to 24 VDC (Ripple p-p 10% or less) Voltage 2% F.S. or less (0 to 50C: based on 25C) 3% F.S. or less

Ozone Resistant

300 500 700 1000 2000 2500 3000 4000 4000-06 5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060 6060 425 625 825 925 3000 210 1020 300 400 500 600 AWM Mist separator regulator VQZ AWD Micro mist separator regulator SQ AS Speed controller VQD SY Flow control valves SYJ SX 3-port solenoid valve (2) VQ VQ VQZ AS Speed controller SY

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Please contact P/A if necessary. Note 2) Refer to page 7 for further information of options.

EXxx-OMN0029CN

kbps 0 2 2 3 : : : : PGM 6 2 62 9 6 3 63 6 4 : : PGM 9 DeviceNetPGMHW/SW ON -21No.EX-OMN0029CN-D V_SEL SI () Settings1 SI 1 2 OFF OFF 32 4 byte() OFF ON 24 3 byte ON OFF 16 2 byte ON ON 8 1 byte Baud Rate EX600 Settings1 3 4 OFF OFF 1 Mbps() OFF ON 500 kbps ON OFF 250 kbps ON ON 125 kbps 1 Mbps() -22No.EX-OMN0029CN-D Settings2 1 2 OFF OFF 0 () 0 byte OFF ON 1 + 4 byte ON OFF

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

ZSE1/ISE1

NPN open collector 1 output w/analog output, 200 degrees adjustment 3 m 30 5 m 50 55 PNP open collector 1 output w/o analog output, 200 degrees adjustment 16-6-2 3 Compact Pressure Switch Series ZSE1/ISE1 Specifications ZSE1 For vacuum 0 to 101 kPa ISE1L For low pressure 0 to 100 kPa ISE1 For high pressure 0 to 1 MPa 1.5 MPa Air/Non-corrosive, non-flammable gas 12 to 24 VDC 10%, Ripple (P-P

ZSE2/ISE2

kPa Fluid Power supply voltage Current consumption Response time Repeatability Enclosure 12 to 24 VDC 10%, Ripple (P-P) 10% or less 17 mA or less at 24 VDC 5 ms or less 1% F.S. or less IP40 Operating: 0 to 60C, Stored: 10 to 60C (With no condensation, nor freezing) Operating/Stored: 35 to 85%RH (With no condensation) ZSE ISE PSE Operating temperature range Operating humidity range Z I SE3

ZSE30/ISE30

pressure range Regulating pressure range Proof pressure Min. regulating unit Fluid Power supply voltage Current consumption Switch output Air, Inert gas, Non-flammable gas 12 to 24 VDC, Ripple (p-p) 10% or less (With power supply polarity protection) 45 mA or less (at no load) NPN or PNP open collector output: 1 output 80 mA 30 V (With NPN output) 1 V or less (With load current of 80 mA)

HRX-OM-M090

Fig 9.4-4 Cooling capacity(HRS018--20) 9.4.5 HRS024--20-(BJMT) 3500 3500 Ambient Ambient 3000 3000 temperature temperature or or Cooling capacity[W] Cooling capacity[W] 2500 2500 facility water facility water temperature temperature 2000 2000 25 32 40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[]

PFxx-OMS0001CN

) PFMC7501 [P_1] OUT1 250 L/min [H_1] OUT1 25 L/min 250 L/min [P_2] OUT2 25 L/min [H_2] OUT2 PFMC7102 [P_1] OUT1 500 L/min [H_1] OUT1 50 L/min 500 L/min [P_2] OUT2 50 L/min [H_2] OUT2 PFMC7202 [P_1] OUT1 1000 L/min [H_1] OUT1 100 L/min 1000 L/min [P_2] OUT2 100 L/min [H_2] OUT2 OUT1OUT2 [F 1]OUT1(29)[F 2]OUT2(47) -23No.PF-OMS0001CN-A <> 1 [P_1][n_1] [] 500 L/min OUT1OUT2[P_2

PFxx-OMP0001CN

] [rEF] [Anr] 26 1 [ L] L/min [Uni] [oU1] OUT1 [HYS] [1ot] OUT1 [1_P] [ 250] 250 L/min(PFMB7501) [P_1] OUT1 [ 500] 500 L/min(PFMB7102) [F 1][oU1] [1000] 1000 L/min(PFMB7202) 28 [ 25] 25 L/min(PFMB7501) [H_1] OUT1 [ 50] 50 L/min(PFMB7102) [100] 100 L/min(PFMB7202) [CoL] OUT1 [SoG] ONOFF [oU2] OUT2 2 [HYS] [2ot] OUT2 2 [2_P] [ 250] 250 L/min(PFMB7501) 2 [P_2] OUT2 [ 500] 500 L/min(PFMB7102

HRX-OM-Q026

*1: To use the power of the device, the total load current must be 500 mA or less.

HRX-OM-W032

*1: To use the power of the device, the total load current must be 500 mA or less.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

AMF

AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 AMF150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

CQM

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2-RA Both ends tapped style (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at