1

9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 1/4 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5

100

p. 11 Constructionp. 12 How to Order Replacement Partsp. 13 Dimensionsp. 15 Multistage Ejector ZL3/ZL6 Series How to Orderp. 19 Ejector Specificationsp. 20 Supply Valve/Release Valve Specifications p. 20 Pressure Gauge Specificationsp. 20 Vacuum Pressure Switch Specificationsp. 21 Weightp. 21 Internal Circuits and Wiring Examplesp. 22 Exhaust Characteristics/Flow Rate Characteristicsp. 23

Vacuum Pad: Ball Joint Type

Mounting female thread Vacuum entry port 6 tube 4 tube 8 tube Mounting Connection 10 to 16 One-touch fitting M5 x 0.8 19 18 Female thread 4 tube M5 x 0.8 22 23 20 to 32 M5 x 0.8 10 to 16 6 tube M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 40, 50 Pad dia.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CDVRA1L50 108 4.5 62 9 44 41 CDVRA1L63 127 5 76 11 55 48 CDVRA1L80 154 6 92 13 67 58 CDVRA1L100 189.5 6 112 13 87 73.5 11-7-23 24 Rotary Actuator: Angle Adjustable Type Rack & Pinion Style Series CRA1U Size: 50, 63, 80, 100 Angle adjusting mechanism is provided as standard.

CRQ2

The figure shows the view from the long shaft end. 11-8-23 24 Series CRQ2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -XC22: Without Inner Rubber Bumper, -XC30: Fluoro Grease -X6: Shaft, Parallel Key Made of Stainless Steel Spec.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 A port B port MSQ MRQ D20Rotary actuator A port B port Angle adjuster Cap (mm) Keyway dimensions b (h9) h (h9) l Model CRB2BWU4020 4 0 0.030 4 0 0.030 11-2-23 23 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster and auto switch

CE2

64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25 to 750 25 to 600 80 40 19 25 14 76 52 31 41 25 92 30 15 21 11 37 131.5 116 56.5 35.5 36 198 16 M12 x 1.75 16.5 Without rod boot With rod boot W S P NN MM N Bore size (mm) h f e ZZ H ZZ 40 50 63 80 100 59 11.2 43 280.5

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Scraper Can be mounted on standard products MK(2) Theoretical Output RS Q G Unit: N Operating pressure MPa Rod size (mm) Bore size (mm) Operating direction Piston area (mm2) RS H A 0.3 0.2 0.4 0.5 0.6 0.7 15 10 OUT 36 31 26 20 50 8 4 RZQ 11 7 IN 26 23

RSQ

However, these dimensions change within the ranges shown below as the adjusting bolt is raised (energy absorption is reduced). 24 16, 13.5 11.5, 14 16 A 47 58 B 35 40.5 Bore size (mm) 40 50 10-8-22 23 23 Stopper Cylinder: Adjustable Mounting Height Series RSG Rod End Configuration: Lever Type with Shock Absorber Variable energy absorbing type/Flange mounting style These 2 figures show

CJP

40.5 45.5 7 9 14 14 3 8 6.5 6 6 17 6 8 M3 x 0.5 M12 x 1.0 8 30.5 35.5 40.5 45.5 10 12 15 17 5 8 6.5 6 7 20 7 8 M4 x 0.7 55.5 CS1 M14 x 1.0 10 30.5 35.5 40.5 12 14 20 19 6 10 8.5 6 7 24 9 8 M5 x 0.8 45.5 55.5 C76 Symbol Z C With auto switch Bore size (mm) W 5 st 10 st 15 st 20 st 30 st E P C85 6 10 15 16.5 10.5 20 62.5 57.5 3 52.5 47.5 20 13 21 75.5 65.5 60.5 3 55.5 50.5 C95 24.5 15.5 23

MGC

142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1 32 46 95 70 52 30 M5 x 0.8 25 161 82 37 28.5 50 53 112 16 38 12 21 M6 x 1 32 50 105 80 60 35 Rc1/8 20 188 92 44 33 60 63 132 20

MGQ

OUT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 OUT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 IN 151 30 45 60 76 91 106 121 136 151 -XA Change of rod end shape OUT 314 63 94 126 157 188 220 251 283 314 Heat resistant cylinder (150C) -XB6 20 10 Low speed cylinder (10 to 50 mm/s) -XB9 IN 236 47 71 94 118 142 165 189 212 236 Intermediate stroke

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Symbol Position detector arms Switch bracket Positioning angle For the applicable auto switch model, refer to the table below. a b c d 10 11 12 13 14 15 20 23 25 180 X X X X X Data X X X X X X X 90 b d X Table position detector arm X X X X X X X a X Switch mounting bracket X X Cylinder Unit/Applicable Auto Switch Load voltage Lead wire length (m) Auto switch model Electrical entry Wiring

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

For more information, please refer to page 8-14-23.

Compact

Description Material Note 19 Motor cover for lock Aluminum alloy Anodized Only with lock LC3F2 2 Belt 3 L-type bracket Aluminum alloy Anodized 20 Grommet CR Chloroprene rubber Only with lock 4 Belt stopper Aluminum alloy 21 Guide unit body Aluminum alloy Anodized 5 End block Aluminum alloy Anodized 6 Pulley holder Aluminum alloy 22 Slide table Aluminum alloy Anodized 23 End plate Aluminum

Compact Guide Cylinder

23 16 44 28 89 70 98 12.7 33 M6 x 1 9 6 40 (32 x 2) 6.7 11 6 Rc1/8 NPT1/8 G1/8 13 16.5 26 27.5 20 43 33 97 71 107 15.3 29 M8 x 1.25 10 7.1 7 Compact Guide Cylinder JMGP Series Bore Size 50 (40 x 2), 63 (45 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view 2 x P (Plug) WA + Stroke/2 Z 4 x MM depth ML L 4 x OA through 4 x OB counterbore depth OL (OL) 4 x NN through 2 x P

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread UNF NPT M Min. port size Weight (g) A D1 D2 L2 L1 Model Nylon Urethane KSL03-34S KSL03-32 9 14 17 23 23 29 56 64 8 10-32 UNF 20.5 22 16 2.5 5 32 3.5 10.4 3.5 12 21 1 8 12.7 23.5 21.1 KSL07-34S 14.29 17 1 8 1 4 25.5 22.1 4 8.6 13.2 8.6 1 4 23.5 14 KSL07-35S KSL09-34S KSL09-35S KSL11-35S KSL11-36S 26.5 30 31 37 38 25.5 1 8 25.6 29 18.5 6 15.2 21.6 14.9

Thermo-con/Rack Mount Type

Use the handles on the front side of the product when installing/removing the product to/from the rack. 23 HECR Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

Thermo-chiller

kW load 17 0 10 20 30 40 When a load is stable 0.5C 27 CH2 For HRLE090-A-20 26 Outdoor air temperature: 32C Circulating fluid set temperature: 20C/25C (CH1/CH2) Heat load in the customer equipment: 9.5 kW (CH1, 2 total) Power supply: 200 V 60 Hz Circulating fluid flow rate: 35 LPM/2 LPM (CH1/CH2) 60 Hz External piping: Bypass piping + Heat load 25 Conditions 24 Heat load fluctuation 23