3 Port Air Operated Valve Series SYJA300

4-4-61 for dimensions with connector cable.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

R Port Rc (PT)1/8 40/41 Type How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714-l SYJ714M-l SYJ724-l SYJ724M-l R Port Rc (PT)1/8 R Port Rc (PT)1/4 Valve model P Port Rc (PT)1/8 01 Rc (PT)1/8 A port side P Port Rc (PT)1/4 Stations 40 Type 40 Applicable blank plate ass'y SYJ700-10-2A 2 stations 02 41 Type 41 .. ..

HEC-OM-S008

) . 4-1 4.2 Reading setting temperature . 4-1 4.3 Reading internal sensor . 4-2 4.4 Reading external sensor . 4-3 4.5 Reading alarm status . 4-3 4.6 Offset setting (without writing FRAM) . 4-5 4.7 Reading offset . 4-5 4.8 Temperature setting (with writing FRAM) . 4-6 4.9 Offset setting (with writing FRAM) . 4-7 4.10 Communication Format and Examples of Answers from Thermo-con . 4-8 5 MODBUS

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AK ASS ASR Flow Rate and Effective Area ASF Model AS121FM AS131FM AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 3.2, 4, 6 6, 8 3.2, 4 8, 10 4 6 Metric size Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size Air flow (l/min(ANR)) 7 12 38 Controlled flow JIS Symbol 0.1 Effective area (mm2) 0.2 0.6 Flow rate (l/min(ANR)) 230 180 460 260 390

5 Port Solenoid Valve SY Series

5 G H 02 03 SY9 20Grommet (G), (H): SY9 20C8, N9 C10, N11 C12 G H 3 4 5 G: Approx. 300 H: Approx. 600 (Lead wire length) 73.9 [76.1] [4(A), 2(B) port) 3/8, 1/4 164.3 [168.7] 51.7 68.2 6.5 Manual override 4A 2B 18.4 (For manifold mounting) 33.2 Applicable tubing O.D. : 8, 5/16" : 10, 3/8" : 12 One-touch fitting [4 (A), 2 (B) port] 33.6 61 (5.5) 64.2 33.6 40.9 [47.9] + 36.6 25.5 10 (For mounting

VFA3000

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

4/5 Port Air Operated Valve Series SYJA3000

40 2 Base mounted VHS Port size Thread type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 1/4 With sub-plate 02 3 position exhaust center 2 position single 2 position double 5 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1

VZ100/300/500

DXT170-34-1B Note With screw (For VZ32) Refer to pages 4-6-18 to 4-6-28 for manifold use.

,

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

,

(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

[Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

SZ3000

A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

IR1000/2000/3000

4 !

Process Pump

4 x 9 PB PAF PAF Reset button Air operated reset port Rc, NPT, G 1/8" 10 PA PB (270) 249 AIR SUP Rc, NPT, G 1/4" FLUID OUT Rc, NPT, G 3/4" 195 166 157 82 110 51 18 FLUID IN Rc, NPT, G 3/4" AIR EXH Rc, NPT, G 1/4" Silencer: AN20-02 (Option) Tube extension: PAF5410P19 P19N P19F 204 10 255 120 4 x 9 (270) 249 43 AIR SUP Rc, NPT, G 1/4" 10 Reset button Air operated reset port Rc, NPT, G 1/8"

A

ACCESSORIES SWITCH BANDS FOR SWITCHES D-C75, D-C8, D-H7 BM1-01 3/4 BM1-02 1 BM1-32 1 1/4 BM1-04 1 1/2 BM1-05 2 BM1-06 2 1/2 BA-01 3/4 BA-02 1 BA-32 1 1/4 BA-04 1 1/2 BA-05 2 BA-06 2 1/2 BMA1-020 3/4 BMA2-025 1 BMA2-032 1 1/4 BMA2-040 1 1/2 BMA2-050 2 BMA2-063 2 1/2 R E P A I R K I T S TA N D A R D S E R I E S NCG T E C H N I C A L SPECIFICATIONS S TA N D A R D S E R I E S NCG Bore Size Bumper

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ300 Body width 18 mm One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc 1/4 C4 C6 C8 C10 M5 02 Type of actuation 1 2 3 4 N.C., Metal seal N.O., Metal seal N.C., Rubber seal N.O., Rubber seal Note) For the inch-size One-touch fittings, refer to page 4-14-18.

VQ4000

3/8, C8, C10, C12 4(A), 2(B) port 4 A 2 B 8 Rc 1/4: Rc 1/4 thread 4 A 2 B A A B A B A B A B A B A Rc 3/8: Rc 3/8 thread SMC SMC SMC SMC SMC SMC SMC 7 B B B A A A A A A A C8: One-touch fitting for 8 4 A 2 B C10: One-touch fitting for 10 6 C12: One-touch fitting for 12 4 A 2 B 5 L1 L2 4 A 2 B 4 B B 4 A 2 B 3 4 A 2 B 2 P = 25 P = 25 4 A 2 B 1 44 50.5 X Stations 12 38 26.5 Cable length (600

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 10 4.5 17 16 5 57 30 61.5 40 15.5 1/8 AS2000E-02 12 4.5 23 20 5 59 30 63.5 40 17 1/4 AS3000E-02, 03 5.5 25 26 5.25 69 45.5 76 56 20.6 13.25 1/4, 3/8 Note 1) Reference dimensions AS4000E 2 x 1/4 to 1/2 72 (Max. 80) (1) Effective thread depth 6 2 x M4 x 0.7 664