HRX-OM-R005

0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet

KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Example) For 10-CQSXB25-47D, a 3mm spacer is installed inside a standard stroke 10-CQSXB25-50D cylinder.

S Couplers Series KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

Brake mechanism added

0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

to left Option Body size Port size Symbol Nil Description Applicable model 40 50 60 80 90 2 1 02 03 04 06 10 12 14 20 4 1 4 3 B 8 3 With bracket ALF400 to 600 1 1 2 2 1 Metal case with a level gauge X208 ALF400 to 900 2 1 4 3 1 1 1 2 4 1 Line pressure (MPa) 2 1 Note 1) Tank pressure is removed when line pressure is stopped.

Manifold Regulator Modular Type ARM2500/3000 Series

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

(Values at the initial period) VQZ VZ VS VFN Base mounted Flow Characteristics/Weight Weight (kg) Flow characteristics P A Port size Rc C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv A E AC 0.34 0.34 0.40 0.40 0.32 Body type Valve model DC 0.46 0.46 0.52 0.52 0.44 VS3115-01 VS3115-02 VS3110-02 VS3110-03 VS3114-00 1 8 1 4 1 4 3 8 2.5 3.6 3.2 3.6 0.39 0.34 0.31 0.18 0.86 0.86 0.93 0.94 0.66 0.88

CC

E101. 10-17-16

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

VXP21/22/23

Model/Valve Specifications Av x 10-6m2 Cv converted C [dm 3/(sbar)] b Cv Water, Oil, Steam Air Flow characteristics Maximum operating pressure differential (MPa) Min. operating pressure differential (MPa) 10 10 15 10 15 20 Connection Orifice Max. system pressure (MPa) Weight (g) Model Water AC DC AC DC AC DC AC Air Oil Steam size (mm) Thread VXP2130-02 0.7 0.7 1.0 0.7 1.0 1.0 1 4 740 500

AR20-B to AR60-B

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

Lubrication Equipment

M5 1/8 3/8 1/2 3/4 1 10 20 30 40 50 60 B With bracket Thread Port size Rc(PT) NPT G(PF) N F 8 M5 X 0.8 1/8 1/4 3/8 1/2 3/4 1 M5 01 02 03 04 06 10 C R With bowl guard (Only AL2000) Flow direction: Right to left With drain cock and barb fitting (6, 4 for nylon) (AL3000 to AL6000) 3W AL3000 When specifying more than one option, please list alphabetically.

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Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

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P-EX01-2A Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1