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Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

(Blanking plate) Rc G NPT NPTF Nil F N T Common exhaust Valve stations VV317-02-051-02 A port size (Base piping) 1/4 02 2 stations Symbol Passage Porting specifications A Side R P Common Common 3 Side Individual Common 20 20 stations Symbol Max. 20 stations 1 VV317-02-053-02 Individual exhaust Manifold Specifications Manifold type Max. number of stations Applicable solenoid valve B mount

Y DC: 0.45 W (With indicator light: 0.5 W) 24 VDC and 12 VDC are applicable to 0.45 W.

e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

NCmRO-OT NCI|RO-OS H3 ).250 | r-24 o.75 |.0010.621 r2s6;; 093t0.22 t0-32 uNFl0.8l L00 1 . 1 20.12 t10-32 UNF $-m 0.62 0.34 0.880.38 3.22 2.66 2.35 1.69 t.312tyt -24 003t025 O-32UNF .12 r25 1.47 0.2,1 llG32 UtlF 1A-20 0.s10.47 1.22 o.62 3.75 3.34 2-93 1.81 ).137 t%^-20 r.25 1.m).12510-38 | r. -20 UNC 't.75 1.93 0.25 t|l-20 LhrC x.-18 1 . 1 20.38 1.57 0.88 4 . 1 9 3.49 3,692.O0 slrc' Air Cvlinder

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

6 e (1 pc.) @4 10-11-10 10 Series MIW/MIS Escapements Construction: Single Finger Type (MIS) 8 12, 20 i e u q !3 y w o t RE A B !2 w r !0 !1 REC CX CY 25, 32 Option w @0 !1 !7 !8 !5 !9 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC !

6 e (1 pc.) @4 10-11-10 10 Series MIW/MIS Escapements Construction: Single Finger Type (MIS) 8 12, 20 i e u q !3 y w o t RE A B !2 w r !0 !1 REC CX CY 25, 32 Option w @0 !1 !7 !8 !5 !9 MQQ M RHC !6 MK(2) (32 only) RS Q G Scraper Stroke adjuster RS H A No. Description Material Note Component Parts RZQ No. Description Material Note Hard anodized Piston seal NBR Aluminium alloy Body !

Refer to "LECSB2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. 2700 for LEFB 15 - LECSC-T LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. No.

6 q e r t !5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.

CC Stopper lever can be rotated in 360(4 positions every 90) depending on desired stopping direction. (20 rotatable in 180, 2 positions only.) 90 Flange side Axial direction LOption POversized piston rod With cancel cap With lever detection switch With locking mechanism V m/min Bore size(mm) Rod dia(mm) 20 14 Work W Work W Work W Cancel cap ON OFF 32 20 Work W Work W 50 32 63 40 80 50 Lever

D-H7l D-H7C D-A44A D-H7lW D-H7BAL D-H7lF D-G5NTL 1.4-48 Series CDM2 Auto Switch Mounting Position and Mounting Height: Spring Extend (T) Auto Switch Position: Spring Extend (T) (mm) Mounting Height (mm) B dimensions Auto switch model Bore size (mm) Auto switch model Bore size (mm) 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 Hs A to 50 25 25 26 31 31

F5PW Indicator light / Operation D-A59W D-859W D-F5-W, DGs',W, D-J59W, D-Fs'F, D-.J59W, D-K59W. DJsBAL ON operarios f-l-l t u s e l t l l o r r Caution 6 When handling, please avoid dropping, cylinder nicks, and excessive shock.

Minimum number of T nuts required for each stroke Stroke (mm) 100400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 Number of T nuts (pcs.) 8 10 12 14 16 18 20 Model LJ1-T8 (Weight: 8.4g) M8 x 1.25 17.5 7.5 15 The end cover must be removed when a T nut is inserted into the T slot. 18 11.5 M6 x 20 4 positions 45 10 T slots for mounting 9.4 4.5 T-slot size End cover A A A A 110 The A dimension

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Double piston construction achieves compact design with strong gripping force. q r Mounting is possible from 4 directions. e w Model Bore size Gripping force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 12-3-3 4 Series MHF2 Model Selection Model Selection Selection Procedure Confirm gripping force Confirm

Double piston construction achieves compact design with strong gripping force. q r Mounting is possible from 4 directions. e w Model Bore size Gripping force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 12-3-3 4 Series MHF2 Model Selection Model Selection Selection Procedure Confirm gripping force Confirm