A

Y P E B R A C K E T Spacer with L-type bracket A B C D E F G R L Y10L 20 12 4.5 3 25 5 8 2.25 27 Y20L 24 15 5.5 3 30 5 10 2.75 33 Y30L 35 16 7 4 41 7 11 3.5 45 Y40L 40 22 9 4 50 7 14 4.5 50 Y50L 40 22 9 4 50 7 14 4.5 50 Y60L 50 24 12 4 70 10 15 6 62.5 T TYPE BRACKET H O W T O O R D E R T T Y P E B R A C K E T Spacer with Bracket Bracket Only 1000 S E R I E S Y10T .B110T 2000 S E R I E S Y20T

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-A9, A9V D-F9BAL Bore size (mm) A 27 27 25 A 24 24 22 B 7 7 8 B 6 6 7 B 3 3 4 0 to 1 A B 20 25 32 D-Z7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL A 23 23 32 37 Bore size (mm) B 0 0 0 4 40 50 63 80 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Minimum Stroke for

2–4

B W D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32, 40, 50 (mm) D-A9 D-M9 D-F9 W Auto switch model D-F9BAL Mounting height Hs exists only for the D-F9BAL type.

SMC

Z ZZ (NN1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA

air-filter-e

Order Example Element number for FGGSB-20-B002NA A Check the product number of the industrial filter.

Air Preparation Equipment

Order Example Element number for FGGSB-20-B002NA A Check the product number of the industrial filter.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG CX MY1MW25/32

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

WW C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) Bore size S 102.5 101.5 45 45 20 20 NB FB 17.5 19 NN Z 16 10 15 15 18.3 15 20 17 8 8 5 5 6.5 6.5 11 11 M5 x 0.8 M4 x 0.7 D GC B F H MM GB GA C A 28 28 NA WW WA WB FC 5.5 5.5 FT 2.3 2.3 FX 33 33 FY 20 20 FZ 42 42 74.5 73.5 M10 x 1.0 22.9 22.9 13.4 13.4 29.5 29.5 4 5 M12 x 1.0 6 B Air Cylinder CJ2 10-/1121-/22Head Side Flange Style (G) / CJ2G, CJ2G

MHZ2/MHZJ2

Auto switch mounting groove (both sides) 20 to 60 20 to 60 20 to 60 20 to 60 Operating temperature C E A Polyurethane Polyurethane Nylon 12 Nylon 12 Material (10 only) Refer to SMC's catalog CAT. 501-B "Air Fittings and Tubing" regarding One-touch fittings and tubing.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

4 x M2.5 x 0.45 thread depth 2.5 12.5 K Bottom view of MXQ6-30 13223 6.5 20 16 13 3.5 0.3 19.2 20 Z ZZ G (NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

the CXSW15-10 and the CXSW15-20 have a groove cut out for installing auto switches.

VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

Rotary Actuator

Magnet B Piston B A port B port Auto switch B Auto switch A [Pressure is applied from the A port.] When the pressure is applied from the A port, the piston A moves to the right side and the shaft rotates clockwise. The auto switch B turns OFF and the auto switch A is turned ON by the magnet A at the rotation end.

Compressed Air Preparation Filter

AD27-2-A AD37m-2-A AD47m-2-A With level gauge AD37m-8-A AD47m-8-A Normally open (N.O.) AD38m-2-A AD48m-2-A With level gauge AD38m-8-A AD48m-8-A Automatic (Auto drain) The bowl assembly for sizes 20 to 40 comes with a bowl seal. The bowl assembly for sizes 50 and 60 comes with a flange and a bowl seal.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

VQ7-6/7-8

position single : VQ7-8-FG-D-SC single (Reverse pressure): VQ7-8-YZ-D-SC 3 position closed center : VQ7-8-FHG-D-SC exhaust center : VQ7-8-FJG-D-SC pressure center: VQ7-8-FIG-D-SC 175.5 180.5 175.5 82.5 93 98 93 82.5 56(71) 56(71) 56(71) 56(71) 16(20)(B port) 16(20)(A port) 16(20)(B port) 16(20)(A port) Manual override Manual override A B PB A B PB 62(72) 75(86) 62(72) 75(86) 38 50 B A 38

MVGQ

Replacement Parts -X Description 12 No. 16 20 25 32 40 50 63 80 100 MGQ100-PS Seal kit MGQ12-PS MGQ16-PS MGQ20-PS MGQ25-PS MGQ32-PS MGQ40-PS MGQ50-PS MGQ63-PS MGQ80-PS !9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

x 0.8 MM D D FY FB H + Stroke Z + 2 x Stroke S + Stroke NA F NA FT F A H FZ FX A 2 x FC Mounting hole C B 0 0.3 B 0 0.3 Drawing of view E (mm) Bore size 16 10 15 15 B GA FX FT F A 18.3 15 C 20 17 5 4 8 8 5.5 5.5 2.3 2.3 33 33 20 20 5 5 FB FY D FC FZ 12-0.027 10-0.022 H NA NDh8 Z S NN 11 11 17.5 19 66 65 M12 x 1.0 M10 x 1.0 MM 42 42 GC 0 M4 x 0.7 28 28 122 121 20.5 20.5 0 M5 x 0.8 Specific