SMC Corporation of America
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The lead of the ionizer driving power supply (DC1) and the lead of the power supply for I/O signals (DC2) can be connected with a common power supply.

D M E Z L B + Stroke K A + Stroke M G J W 16 Minimum lead wire bending radius 10 Auto switch Q F 4 x N through H thread effective depth C 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 12 5 to 30 19.5 16 23 19.5 6 6 23 4 21.5 M3 x 0.5

Set beforehand if there is a risk of freezing. i [ ] lamp Equipped with a timer for start and stop.

Description q DI filter vessel (resin) w DI sensor assembly w i e DI control piping assembly r DI filter outlet tube t DI filter inlet tube q!0 y Nipple (2 pcs.) u Mounting bracket i Mounting screw (4 pcs.) o Tapping screw (4 pcs.) !

Part name Qty (1) Electric Actuator / LEF Series 1 (2) Driver / LECS Series 1 (in case with driver) (3) Motor cable 1 (in case with cable) (4) Encoder cable (5) Lock cable (6) I/O Connector 1 (in case with I/O connector) (2) Driver *2 1 (3) Motor cable (4) Encoder cable (5) Lock cable 24VDC Host controller, (1) Electric Actuator etc (6) I/O connector 2 *1 This picture is LECSA *2 The shape

2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Component Parts Note Note No. q Description Material No. Description Material Bushing B !0 o Body Hard anodized Aluminum alloy Sintered alloy steel End plate Stainless steel 10: Stainless steel 16 to 25: Aluminum alloy w Piston 16 to 25: Chromated Bumper !

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Note Note No. q Description Material No. Description Material Bushing B !

2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No. Body Bushing B Hard anodized Sintered alloy steel o !0 !1 !2 !3 !4 !5 !

U D U D Note) Indicate on a manifold specification h i f i d i 10 Base Mounted Type Series VQ5000 Electrical wiring specifications Standard wiring D sub connector assembly (AXT100-DS25) wire colors 015 030 050 D sub connector Terminal No. Polarity Lead wire color Dot marking 1 2 3 .

Refer to LECYU Operation Manual,section 3.3.1. and 3.3.2. 11 - 2.3.1 I/O Signal (CN1) Names and Functions The following table shows the names and functions of I/O signals (CN1). (1) Input Signals Signal Pin No.

Place the I/O signals and functions using Accessories Tool bar. 2. Assign parameters to functions. 3. Wire the various program components together (with the help of Wiring Analyser). 4. Load the Program logic and I/O devices information to the PneuAlpha Controller. 5. Invoke Auto FBD Wizard to begin to program with directions. 6.

Material Description Description q w e r t y u i o !0 !

1 LCD Readout Digital Pressure Switch Series ZSE3/ISE3 (For Vacuum) (For Positive Pressure) ZSE ISE PSE For General Pneumatics Z I SE3 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF For details about certified products conforming

H ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 14.2 14.2 S type: White color L type: Black color 14.2 Applicable tubing diameter N 14.2 Applicable tubing diameter E 17.2 17.2 20 20 ZX 93.3 47 29.5 10 15.3 4.2 15.8 ZH15DS-10-12-12 22.45 93.3 47 29.5 10 15.3 4.2 15.8 ZH15DL-10-12-12 22.45 ZR (Mounting hole) I

Series NCDJP Const ruct ian i Parts List Basic Type Nq,PB6 Nq,PBIO t{cjPBtS Seals List Paris List CJPlO-PS Note: Rod jam nuts must be ordered separately. Series NCDJP Auto Stuitch Mounting Posrtion . : 1_E i l i 1 D.gOA Auto swilches should be mounted as shown in the Figure below. D-97.D-93A (|& @D D-93A il !

8 i Component Parts Component Parts Description Material Note No. Description Material Note No.