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/Without Motor Brake Series LXS Dimensions/LXSH2BC Scale: 25% F G x I 5H9 +0.030 0 depth 5 5H9+0.030 0 depth 5 D-5.1 through 10 7.5 Refer to Cross section C-C, bottom view.

Air Slide Table

10 20 30 40 50 60 0 0 0 10 20 30 40 50 60 70 80 90 L3: Overhang Allowable range: 60 mm L3: Overhang Allowable range: 90 mm Allowable overhang L [mm] Allowable overhang L [mm] MXQ20(A)-75Z MXQ20(A)-100, 125, 150Z 7 7 V = mm/s V = mm/s V = 100 V = 100 6 6 Load mass m [kg] Load mass m [kg] 5 5 4 4 3 3 V = 200 V = 200 2 2 V = 300 1 1 V = 300 0 0 20 40 60 80 100 120 0 0 50 100 150 200 250 300

15

0 0 0 5 10 20 15 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] Vertical 1500 1500 1500 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] Z L8 500 500 500 Mep m 0 0 0 0 4 6 2 8 10 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 Work load [kg] Calculation of Guide Load Factor Mounting Orientation 1.

LEC-OM07605CN

PA23 ]0 0 0 0() 8 66 8. (2) [Pr. PA23 ]0 0 0 0()2.1 2.2[Pr.

Shock Absorbers and Rate Controls

*s*rfu'*rs Non-Adjustable Hydraulic Series @$rc^ PM Series Sizing Gurves lmperial ro gf; N : " , d \ E o 9 N Fl E i ' o < n ToTAL ENEFGY (inbs) r 2 0 PA a t o g . o N 7 t O S o o t { q E ! o o o . I 3 o = t o Io | o 5 o o r t 9 = i * o g ! . 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!

EXxx-OMY0006CN

Passivation/xxx)Byte 0Zone1-3Zone M Bit 0 IO (Zone M) 0: OFF, 1: ON 1 1 (Zone 1) 0: OFF, 1: ON 2 2 (Zone 2) 0: OFF, 1: ON 3 3 (Zone 3) 0: OFF, 1: ON 47 0 Table 10-8 Safety Mode (Module Passivation/xxx)Byte1 Zone M Output feedback parameter Bit 2 Bit 1 Bit 0 OFF 0 0 0 0 0 1 0 1 0 0 1 1 5 sec 1 0 0 1 sec 1 0 1 500 msec 1 1 0 200 msec 1 1 1 100 msec Bit 5 Bit 4 Bit 3 ON 0 0 0 0 0

Hydraulic

-0.3 C Z + Stroke RR B ZZ + Stroke With rod boot e 10 f l h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) A a B C CDH9 CX D d E F G GA GB J K L MA MM NA NB P R RR S +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052 0 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 10 23 60 44 12 21 17 18 45

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

Slider Type Ball Screw Drive/11-LEFS Series

0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load

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0 Misc.

MHZ

0 0.4 0 0.4 0 0.4 0 0.4 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 5 5 8 8 10 10 12 12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7

MHZ

0 0.4 0 0.4 0 0.4 0 0.4 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 5 5 8 8 10 10 12 12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7

LEC-OM02904

PD10 0h PD11 0004h PD12 0h PD13 0h PD14 *DOP3 D-3 0h ALM 0 0 0 WNGALM (WNG)(ALM) () 0 1 WNG 0 1 0 ALM 0 1 WNG 0 1 1 ALM . 0OFF 1ON PD15 *IDCS 0h TM C1MR Configurator2 0 0 0(/) 1() 0/ 1 0/ 1 0(/) 1() master-slave 0 0001 0010 5 30 5 No.

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TI/ TIL 5 PA PAX Material Model PB %# & 1 & VXA212 0 2 2 0 2 . 2 0 2 . 2 . 0 2 . 0 2 . 0 2 . 0 2 ) .!* VXA213 0 2 VXA223 VXA224 VXA225 0 2 .!* / 0 0 2 0 2 2( VXA226 0 2 17-3-93 2 The VX series will be revised shortly. Series VXA21/22 Normally Closed (N.C.), Normally Open (N.O.) Fluid JIS Symbol N.C.

LX

0.01 0.02 0.03 0.04 0 0.01 0.02 0.03 0 0.01 0.02 0.03 Time (s) Time (s) Time (s) LXFH5BD LXPB2BD/LXSH2BD LXPB5BD/LXSH5BD 80 80 80 Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load Transfer load 10kg 10kg Transfer load 50 50 50 3kg 6kg 6kg 2kg 3kg 3kg 1kg 0kg 0kg 0kg 0.01 0.02 0.03 0.04 0.01 0.02 0.03 0 0 0.01 0.02 0.03 0 Time (s) Time (s) Time (s) Acceleration Time Guide/Ball Screw

Made to Order

(mm) Series CQ2 CQS Bore size (mm) G G Th9 Th9 0 0.043 0 0.043 12 1.5 1.5 15 15 0 0.052 0 0.052 16 1.5 1.5 20 20 MGC Series MGG Series (mm) (mm) 0 0.043 0 0.043 20 2 2 13 13 0 0.043 0 0.052 0 0.052 0 0.062 0 0.062 0 0.062 0 0.074 0 0.043 25 2 2 15 15 Bore size (mm) Bore size (mm) Throttle dia. () Throttle dia. () 32 2 21 20 5 20 3 40 2 28 25 5 25 3.5 50 2 35 32 6 32 6 63 2 35 -X -

V

0 0 0 / 2 0 0 0 / 3 0 0 0 P O R T P L U G S E R I E S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 E X H P O R T S I L E N C E R PORT PLUG VVQZ100-CP (FOR VQZ1000/VQZ2000) VVQZ2000-CP (FOR VQZ3000) SILENCER IS INSTALLED IN THE EXH PORT USED TO BLOCK AN UNUSED CYLINDER PORT WHEN USING A 4 WAY VALVE AS A 3 WAY VALVE SILENCER P/N TYPE AN110-01 VQZ1000 AN200-02 VQZ2000 AN200-02 VQZ3000 O T H E R M A N

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0 !

Tie-rod Type Hydraulic Cylinder

0.3 C Z + Stroke RR B ZZ + Stroke With rod boot e 10 f l h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) a CX B C d D CDH9 E F GB GA G J MA L K NB P NA RR S R MM A +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052 0 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 12 10 21 18 25 14 9.5 M8 x 1.25 M14