39 NN S 50 63 12 55 13 36.5 9.5 M8 x 1.25 11 8 30 32 63.5 15 55 13 36.5 15 M8 x 1.25 13 8 30 32 63.5 Metal cover type Leave sufficient space to open and close the metal cover when operating the manual release.
Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95
flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.
CV MVGQ CC RB J D-X 20Data 10-2-55 55 Series REAH Construction: 10, 15 Single axis type: REAH y !4 !8 i !2 @1 !3 q @0 !7 !9 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com #2 !1 w r t u @8 o #4 e !6 !5 #0 @9 #1 #3 !0 @3 @5 @6 N@4 REAH10 @7 @2 Component Parts No.
data. 148 3 Standard Motor/Horizontal Mount Specification Series LG1H20 Dimensions/LG1H202PA 110 4-M6 x 1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20 8H10 depth 10 LJ1 LG1 LC1 LX LC6D/LC6C Switches Encoder signal line Bending radius 80 Motor power line Bending radius 80 35 8H10 depth 8 85 130 Stroke + 145.7 (table movement range) 77.3 77 107 10 95 Work piece mounting reference plane 55
M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13
Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68
CV MVGQ CC RB J D-X 20Data 10-2-55 55 Series REAH Construction: 10, 15 Single axis type: REAH y !4 !8 !2 @1 i !3 q @0 !7 !9 #2 !1 w r t u @8 o #4 e !5 !6 #3 !0 #0 @9 #1 @3 @5 @6 N@4 REAH10 @7 @2 Component Parts No. Description Body No. Description Note Hard anodized Material Aluminum alloy Material Note Aluminum alloy Plate B q !
Bore size [mm] Stroke C D Mounting bolt part no. 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L Material: Chromium molybdenum steel Surface treatment: Zinc chromated 12 5.6 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L 16 4.6 5 40 CQ-M3 x 40 L 10 45 CQ-M3 x
Applicable Series 001 002 No.1 Solenoid No.2 Solenoid XSA1 XSA2 003 No.3 Solenoid XSA3 53 48VDC 100VDC 55 Note 1) If the leading "0" is removed from voltage symbols 05, 06, these are the same as the solenoid valve symbols.
65 50 63 80 100 70.5 82.5 101 121 5 5 6 6 55 (67) 55 (67) 60 (74) 60 (74) 75.5 75.5 95 95 157.5 (169.5) 157.5 (169.5) 188.5 (202.5) 192 (206) 4.5 4.5 4.5 6 66 82 100 120 5 5 5 7 17.5 17.5 20 20 22 22 28.5 30 11 13 14 16 86 106 125 150 Other dimensions are the same as basic type.
Since there are other applicable auto switches than listed, refer to page 8-19-55 for details.
High-performance filtration P.47 P.55 P.55 P.56 (For coarse filtration) (For coarse filtration) (For coarse filtration) (For precision filtration) Made-to-Order elements X142 X72 X292 X82 Long service life element Branch type element PP (Polypropylene) bag element Filter paper element More compact vessel is possible. (Longevity for L440 is same as L770.)
M24 x 3 effective thread depth 33 143 + 2 (strokes) Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 237 + 2 (strokes) 8 Compact Cylinder Series CQ2 Reed Switches/Direct Mounting Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.
Note) Accumulated flow rate is reset when the power supply turns OFF. 46 Series PF2D How to Order 4-channel Flow Monitor Remote Type Display Unit PF2D20 M Output specification Option 2 (Refer to page 55.) 0 1 NPN4 outputs PNP4 outputs Accessory / Power supply output cable (2 m) Nil 4C None Sensor connector (4 pc.) Unit specification Option 1 (Refer to page 55.)
M24 x 3 effective thread depth 33 143 + 2 (strokes) Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 237 + 2 (strokes) 8 Compact Cylinder Series CQ2 Reed Switches/Direct Mounting Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.
Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.
Blue DC() SE1-55 I Z Brown DC(+) Press-bonding area Core wire Press-bonding area Black OUT Load Main circuit + Pressure setting trimmer 2 Socket Core wire 12 to 24V DC 80mA Lead wire Pressure setting trimmer 1 Blue DC() Coating Hook SET2 eAssembly of socket to connector.
(mm) GC F D BB A 10 16 15 15 15 18.3 12 18.3 14 20 4 5 8 8 5 5 11 11 CA GA BA CB GB 5 5 NN Z 82 83 54 55 M4 x 0.7 M5 x 0.8 S NB NDh8 20.5 20.5 9.5 9.5 10-0.022 0 MM Bore size H 28 28 17 20 NA M10 x 1.0 12-0.027 0 M12 x 1.0 With air cushion With air cushion type is not available for 21-/22-CJ2.
MM Bore size (mm) NB NDh8 24.5 20.5 20.5 GC F D BB A 6 10 16 NN Z 85.5 82 83 T 3 CA GA BA CB GB 5 5 S NA H 28 28 28 M3 x 0.5 M8 x 1.0 15 15 15 7 9.5 9.5 10-0.022 0 8-0.022 0 57.5 54 55 15 15 18.3 12 18.3 14 20 3 4 5 17 17 20 8 8 8 12 5 5 11 11 11 M10 x 1.0 M4 x 0.7 12-0.027 0 M12 x 1.0 M5 x 0.8 With air cushion Air cushion type is not available for 21-/22-CJ2.