Rotary Actuator/Vane Type

E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.

C76

Same side Different sides Different Same side sides 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 50 15 50 + 45(n 2) D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 45 (n = 2, 4...) ( n 2) 2 10 65 15 65 + 50(n 2) 15 + 45 (n = 2, 4...) ( n 2) 2 10 60 15 60 + 45(n 2) Construction C76RA B32 to 40 2B 2D !6 i y !4 u q r e !1 t !5 !3 !0 !2 o !

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(same side) 65 60 D-Y59/Y69/Y7P/Y7PV 1 or 2 pcs. (different sides) 20 20 2 pcs. (same side) 65 70 Solid state switch D-Y7W/Y7WV 20 25 1 or 2 pcs. (different sides) 75 70 2 pcs. (same side) D-Y7BAL 20 25 1 or 2 pcs.

CLS

125 65 125 76 140 83 155 88 160 106 195 Single knuckle joint and double knuckle joint should be used separately.

15

Motorless Motorless Model Partial stroke LEFl25 65 mm or less LEFl32 70 mm or less LEFl40 105 mm or less Unevenness of a workpiece or base mounted on the body of the product may cause play in the guide and an increase in the sliding resistance. LAT LZ 7. Do not hit the table with the workpiece in the positioning operation and positioning range. 4.

Electric Slide Table / High Precision Type 《 AC servo motor 》

C2 LECSC2T S2 LECSS2T N2 LECSN2T 92 LECSN2T-9 E2 LECSN2T-E P2 LECSN2T-P -4- 1.1.2 Specification LESYH*(D,R,L)*S2/S3 Motor type S2/S3 Model LESYH16*S2 LESYH25R/LS3 LESYH25DS3 Parallel In-line Stroke[mm] 50,100 50,100,150 50,100,150 Horizontal 8 12 12 Max. work load [kg] Vertical 6 12 10 20 10 20 Force [N] (Set value: 15 to 30%) *1 65 to 131 127 to 255 79 to 157 154 to 308 98 to 197 192 to

Low Maintenance Filter Series FN1

Description Material 1 5 SCS13 Cover O-ring 2 6 SCS13 Bowl Seal NBR 7 O-ring 65 x 250mm 3 SUS304 Element FPM 8 Scraper 65 x 500mm FN111 FN112 9 O-ring CDLQB63-30D-F Compact cylinder with lock 4 CDLQB63-50D-F Replacement parts: Seal kit Note Model Order no. Material FN11N NBR KT-FN11N Items 5 through 9 from the above chart.

MGP

mm) Model 250 10 20 300 25 30 350 40 50 400 75 100 125 150 175 200 11 24 19 17 14 13 26 22 19 17 15 13 12 MGPM F 8 37 27 22 35 30 23 18 15 12 11 10 MGPL 16 38 31 27 23 21 37 32 27 24 22 20 MGPM 16 12 54 40 32 54 47 35 28 23 20 17 15 MGPL CL 42 49 36 32 43 38 29 35 87 75 66 59 54 49 MGPM 20 35 58 30 26 48 101 23 90 70 58 62 54 48 43 MGPL MLGC 55 69 48 43 60 54 38 49 116 100 88 79 71 MGPM 65

IFW series flow switches detect and confirm liquid flow. They are applicable to general industrial machines and various other applications. The IFW series will detect the flow of water and other non-corrosive fluids. The detection range is from 1 to 50 liters per minute. The flow setting can be adjusted with a screwdriver from the outside of the unit without removing the cover.Detects and

XM, XY

XMA series with KF (NW) flange A (mm) Model Weight (kg) Conductance (L/s) B (mm) CYV XMA-16 40 103 0.33 5 XMA-25 XMA-40 XMA-50 50 113 0.61 14 B 65 158 1.40 45 70 170 2.00 80 A 160 XMA-63 XMA-80 88 196 3.60 90 235 6.20 200 A : Common to all series. 479 Series Variations Operating pressure Flange size Shaft seal system Models Valve type Angle type In-line type Options Application Switch Indicator

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

2-M5 x 0.8 (Plug: M-5P) 30 4-M6 x 1 4-M5 x 0.8, depth 7 Bottom hole diameter 5.1 W 32 0.05 D B 8 0.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting base side B D 16.5 14.5 Across AA MXP16-30B Without magnet and switch rail 2-M3 x 0.5, depth 3.5 For rail mounting 8 2-M2 x 0.4, depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8, depth 7 20 20 L (mm) Model M MA W H S Z J V K L MXP16-20B 40 30 65

JXCx-OMT0005CN

48 12.2 . 48 12.3 . 49 1 . 49 2 () . 49 3 . 49 12.4 . 50 12.5 . 50 13() . 51 13.1 . 51 13.2 . 52 14 . 53 14.1 . 53 14.2 No. . 53 [1] . 53 [2] . 54 [3] . 55 [4]HOLD. 55 [5] . 56 [6] . 56 (7) . 57 14.3 . 58 15 . 59 15.1 [5m ]. 59 2 - 15.2 [820m] . 59 15.3 [5m ] . 60 15.4 ()[820m] . 60 15.5 . 62 15.6 . 62 15.7 . 62 15.8 DeviceNet . 62 15.9 . 63 16 . 64 16.1 . 64 16.2 . 65

Clean Exhaust Filter

Max. flow capacity L/min (ANR) 3F 4 30 4G 6 65 5H 8 130 7J 10 200 Plug-in type Bracket SFE-BR 3 Symbol Applicable model 3 SFE3l 4 SFE4l 5 SFE5l 7 SFE7l One-touch fitting type Specifications Model SFE11 SFE3 SFE4 SFE5 SFE7 Fluid Note 1) Air Maximum flow capacity Note 2) Up to 3 L/min (ANR) Up to 30 L/min (ANR) Up to 65 L/min (ANR) Up to 130 L/min (ANR) Up to 200 L/min (ANR) Filtration rating

CXS

Made to Order Auto Switches Wrapping direction Expose approx. 2 threads Sealant tape 65 Series CXS Actuator Precautions 2 Be sure to read before handling. Mounting Air Supply Caution Caution 1. Install air filters. Install air filters immediately upstream of valves. The filtration degree should be 5m or finer. 2. Install an after-cooler, air dryer, or water separator (Drain Catch).

LJ1H

load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 64 65

MHF2

Double piston construction achieves compact design with strong holding force. q r Mounting is possible from 4 directions. e w Model Bore size Holding force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 Features 2 Series MHF2 Model Selection Model Selection Selection procedure Confirm gripping force Confirm

MHZ2/MHZJ2

Weight table Unit: g End boss type (symbol) Model W E K M MHZ2-10 64 65 66 65 MHZ2-16 147 148 148 147 MHZ2-20 277 277 277 277 MHZ2-25 495 495 496 494 10 With Dust Cover Series MHZJ2 Parallel Type Air Gripper How to Order MHZJ2 16 F9PV D Number of auto switches Number of fingers Nil S 2 pcs. 1 pc. 2 2 fingers Cylinder bore 10mm 16mm 20mm 25mm 10 16 20 25 Auto switch type Action Double acting

MRQ

/2 70.5 ( 40 stroke) /2 75.5 ( 50 stroke) /2 75.5 ( 65 stroke) /2 80.5 ( 75 stroke) /2 78 ( 90 stroke) /2 83 (100 stroke) /2 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 12.5 3 15 20 32 15 17.5 20 4 25 30 30 12.5 15 3 (mm) L Max

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

TH TY TX TV TW 2-TC ZZ + Stroke (mm) Bore size (mm) BB CD CX GB H NB R U Z ZZ S 6 12 3.3 3.3 17.5 27.5 22 8 106 117 70.5 5 10 12 3.3 3.3 19 28 24 8 101 112 65 5 16 18 5 6.6 24 30 30 10 114 128 74 8 T-bracket Related Dimensions Note) Applicable bore size (mm) Part no.

Sine Rodless Cylinder Series REBR Direct Mount Type

Switch rail accessory kits are mentioned on page 65 and can be ordered together with auto switches. (2) Refer to the separate disassembly instructions for switch magnet installation procedures. 67 Sine Rodless Cylinder Series REBH High Precision GuideType How to Order REB H 25 300 Z73 Sine rodless cylinder High precision guide type Number of auto switches 2 pcs. 1 pc. "n" pcs.