S070

lead type VQZ VZ VS 0.1 W with power saving circuit 150 (Lead wire AWG#26) 3.5 27 6 VFN 26 23.5 20.5 3 9.5 28.5 3.5 4-11-5 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 mounting hole 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1

SMC

6.5 Operating port 2-Rc, G, NPT1/8 13 3 J 12 Maximum 14.5 (With stroke adjuster at retraction end) I 7.5 8 15 15 14 14 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 12 25 6.5 K NA-M6 x 1 thread depth 6.5 25 KA Stroke adjuster at extension end Stroke adjuster at retraction end 6 18 46.5 (With stroke adjuster at extension end) N-M5 x 0.8 thread depth 10 (Insert) 6-M5 x 0.8 thread depth 8 6

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM133-M5-35 (R, B, G, Y) A VM153-M5-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

MQQ

MQQTB 10, 16, 20 H effective thread depth C 2-M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB F Q Y I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm)

Check Valve Series AK

Effective area (mm2) Weight (g) A L M Model M5, UNF10-32> AKH04-M5 AKH04-01S AKH06-M5 AKH06-01S AKH06-02S AKH08-01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 4 2.8 12.7 Applicable tubing 2.8 6.5 6.5

Miniature Regulator Series ARJ210

Miniature Regulator Series ARJ210 Lightweight body made of aluminum (60 g) Standard Specifications ARJ210-M5 Model 1/8 (Male thread), M5 x 0.8 (Female thread) IN side Two styles of piping connections provided for the IN side: 1/8 (male thread) and M5 (female thread) Port size M5 x 0.8 (Female thread 2 pcs.)

Standard Combinations

Replacement Parts Description Material Y200P-060S Y300 Y300P-060S Y400 HNBR Y200 Seal Y400P-060S Spacer with Bracket (Z) G Center of F.R.L. body C E BB (Y200T only) 1 EE (Y100T, Y200T only) X-X RELEASE X B 2 E X G Seal Y200T Y400T F J A H K Spacer width D Model Y200T Y300T Y400T B 82 96 BB 67 C 29 41 48 D 53 68 81.5 E 24 35 40 EE 33 F 12 14 18 G 5.5 7 9 G 5.5 7 9 H 19 21 26 J 3.2 4 4

Electric Rotary Table

1 R 3 1 / 0 180 L 0 E T 2 R 3 3 / a 0 0 5 , bl 1) e e ot o N p er e g at n in ra g The figures show the origin position for each actuator.

Compact Cylinder

H J K L M N OA OB P1 P2 Q A 40 Note 1) 33 Note 1) 13 16 45 6.5 M8 x 1.25 22.5 14 7 34 5.4 5 to 100 M6 x 1 9 M5 x 0.8 M5 x 0.8 2.5 13 16 52 6.5 M8 x 1.25 26 14 7 40 5.4 46.5 39.5 5 to 100 M6 x 1 9 M5 x 0.8 M5 x 0.8 2.5 48.5 Note 2) 40.5 Note 2) 15 20 64 7.5 M10 x 1.5 32 17 8 50 6.6 10 to 100 M8 x 1.25 11 3.5 Rc, G, NPT1/8 Rc, G, NPT1/8 15 20 77 7.5 M10 x 1.5 38.5 17 8 60 9 10 to 100 54 46

Vacuum Pad

Buffer assembly part no. q ZPB2J10-B5 [Weight: 21.8 g] Buffer assembly part no. q ZPB2K10-B5 [Weight: 23.6 g] w ZPB2J20-B5 [Weight: 35.9 g] w ZPB2K20-B5 [Weight: 36.9 g] Width across flats 8 M5 x 0.8 Width across flats 8 M5 x 0.8 Width across flats 14 Width across flats 14 5 5 3 3 3 3 D A B 4 D A B M10 x 1 M10 x 1 Gasket (t = 0.5) Gasket (t = 0.5) 2 M5 x 0.8 2.5 M5 x 0.8 4 Dimensions Dimensions

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

machined on the flange for E.

PEEK

N.C. 3 2 1 9.5 7 The figures in brackets < > indicate the values for PFA plate material (wetted part material E, F, G).

RZQ

) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

AIR COMBINATION

N.C. type is recommended. 14 Option / Semi-standard : Select one each for a to g. Option / Semi-standard symbol : When more than one specification is required, indicate in alphanumeric order. Example AC10B-M5CG-T-12NR-A AC 10 B M5 1N A 1N 1 2 3 Symbol Description Nil Without auto drain a Float type auto drain N.C. (Normally closed) Drain port is closed when pressure is not applied.

VEX1

g Grommet h Grommet terminal i Conduit terminal j DIN connector a Model b d e f VEX5500 VEX5501 19 130 110 9 12 2.3 187 187.5 205.5 205 32 VEX5700 VEX5701 136 9 20 2.3 204 204.5 222.5 120 222 VEX VEX5900/5901 AN AMC 5.1-34 VEX5 Dimensions Select style VEX5510/E5511 VEX5710/E5711 Port size E F G H I J L M P A Model R T U B C K N O Q S D A,P port Rc(PT) , ,1 R port Rc(PT) VEX5510 VEX5511 1

CYP

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

ITV

thread 1.6 12 (99) (11) SMC PREGULATOR E ITV2090 Rc 1/4 VAC port OUT 2 G VAC (Vacuum pressure) ATM OUT (Set pressure) (Atmospheric pressure) 19 36 Flat bracket P3020114 (Option) 2-Rc 1/4 ATM port, OUT port 4-M5 x 0.8 thread depth 6 mm through Mounting hole OUT 2 G 15 19 R3.5 25 7 36 45 2.3 (10) 30 L-bracket INI-398-0-6 (Option) 2-Rc 1/4 ATM port, OUT port (7) 36 14-8-32 33 Accessory (Option

Compact Vacuum Ejector Series ZQ

SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.