Prevents Micro-Bubbles

T) W Model LVC20 LVC30 LVC40 LVC50 LVC60 (mm) Dimensions 64 S T Model LVC3 LVC4 LVC5 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Single type) Suck back (Unit type) 50 3.5 4.5 37 30 44 37 30 44 4-3.5 20 (Max. 11.5) 51 51 (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 17-5-12 10 Series LVC Manifolds Manifold Specifications LLC5A

High Purity Chemical Valve

T) (mm) W Model LVC20 LVC30 LVC40 LVC50 LVC60 Dimensions 64 (mm) S T Model LVC3m LVC4m LVC5m 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Unit type) Suck back (Single type) 50 3.5 4.5 37 30 44 37 30 44 4 x 3.5 20 (Max. 11.5) (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 51 51 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 466 Series LVC Manifolds Manifold Specifications

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Reference dimensions of 10-32 UNF and NPT threads after installation. 15-9-79 6 Dimensions Universal type L6 D4 Applicable tubing O.D. d H D1 (Hexagon width across flats) M1 L3 A L4 L5 D3 L1 D2 T L2 Metric Size Inch Size A Model A D1 d T H D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 Model M1 AS131F-M5-23D AS131F-U10/32-01D 1/8" 8.4 3.2 8.4 19.8 19.8 12.7 17.5 28.7

240

1 t !

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10.5 M3 x 0.5 10 M5 x 0.8 11.5 M4 x 0.7 16 M6 x 1.0 13.5 M5 x 0.8 20 M8 x 1.25 16.5 M6 x 1.0 25 M10 x 1.25 22.5 M8 x 1.25 28 M14 x 1.5 Clevis pin part numbers d m m l Dd9 t L t Applicable bore size (mm) Applicable snap ring Part no.

Modular F.R.L. Units

1 q r e w t i u y o !0 !

125

03 04 VEX34202 03 04 Bracket (With bolt and washer) B VEX1-18-1A Foot bracket (With bolt and washer) F VEX1-18-2A VEX3-32-2A Pilot exhaust (PE) silencer Note) N AN120-M5 Note) Only with solenoid 1727 VEX3 Series Construction VEX3120 (Air operated) VEX3220 (Air operated) w Port 12(P1) (Pilot air port) q r y u y r t Port 23(P2) (Pilot air port) Port 12(P1) (Pilot air port) e t w t Port 3

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

8 7 12.7 9.6 12.3 28.6 25.8 25 22.2 AS121F-M5-23 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 17.3 17.3 3.2 22.1 8.4 22.1 9.3 AS121F-U10/32-23 AS121F-U10/32-03 10-32UNF 5/32" 10-32UNF 12.7 12.3 AS121F-M5-04 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 28.6 25.8 25 22.2 21.3 26.1 4 7 9.6 7 16.5 8 11.4 9.3 22.1 17.3 AS121F-U10/32-04 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 25 22.2 9.6 AS121F-M5

AS-FG/ASD-FG

Reference dimensions for 10-32UNF and NPT threads after installation. 5 Series AS-FG Dimensions/Universal Type For M5 type For U10/32 type Inch size Metric size Model d T Weight g H D1 D2 L1 L2 L3 L5 A Model d T weight g H D1 D2 L1 L2 L3 L5 A D3 L4 Max. Min. Max. Min. M1 D3 L4 Max. Min. Max. Min.

CNG

t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

CNG

t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

Modular Type Filter Regulator Series AW

t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

KB

Elbow Socket Module: KBV H (width across flats) T Connection thread M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 A Weight (g) VMG L3 L2 L4 D1 D2 D3 L1 Model KBV1-M5 KBV1-M6 KBV2-M5 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 19.5 12.4 11.6 14.8 14.0 15.3 22.0 27.0 40.6 44.7 10.4 16.8 25.0 33.0 12 13.6 13.0 12.8 26.0 21.0 17.6 10.1 22.5 36.0 15.5 29.5 30.5 32.0 36.5 43.0 1 8 Rc 15.2 14 20.5 19.5 11.4

LEC-OM02704CN

E ()L d W D T Max.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

A B A B ~rr-T'11\ llrT-T-tllFm ~ A II U III ~ EAPEB ' EA P EB Pressure center A B ~T\lIlll~ Plug-in 'tYpe EA PEB (Additional function achieved by USing external pilot option).

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

X 0.8, Rc (PT) 1/8, C4 (4 One-touch fitting) C6 (6 One-touch fitting) M5 X 0.8 Rc (PT)1/8 Port size M5 X 0.8 A port VZ M5 X 0.8 X port (1) M5 X 0.8 M5 X 0.8 VT Body ported style SYJ5l2/SYJ5l2R 3.4 (0.19) Valve effective area (mm2)(Cv) (2) VT M5: 3.3 (0.18) 1/8: 4.8 (0.27) C4, C6: 3.8 (0.21) Base mounted style SYJ5l4/SYJ5l4R M5: 3.8 (0.21) 1/8: 4.7 (0.26) VP Note 1) Only for external pilot

ZP

1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows Thin flat/Thin flat with ribs Flat 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, Pad dia.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Type 40 Applicable solenoid valve SYJ514-SYJ514M-SYJ524-SYJ524M-How to Order SS3YJ5--40-05 -M5 R port 1/8 P port 1/8 P, R port thread type Stations A port size 02 : 20 2 stations : 20 stations Applicable blanking plate assembly SYJ500-10-3A Nil A A Rc G NPT NPTF M5 01 M5 x 0.8 1/8 F N T A port M5 x 0.8, 1/8 Note) For more than 9 stations, supply air to both sides of P port and exhaust air

Rotary Gripper Series MRHQ

x 0.8 Port A M5 x 0.8 Port B 4-M6 x 1 Depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 SMC R R 16 8 E O P T P A I R R Y G A R I 36 Side A Side B Scale: 40% 11 Series MRHQ Rotary Gripper 1in = 25.4mm Dimensions (mm) Scale: 50% MRHQ25 A B 58 70 93 4-M5 x 0.8 Depth 8.5 47 66h9 0 0.074 33.3 opened +2.5 0.2 10 0 0.1 12 0 0.06 M5 x 0.8 Finger closing port 19.3 closed 0 0.8 4-M5 x 0.8 (mounting