SMC Corporation of America
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SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

M DIN ) (Z) 22 3 0.4Nm (DZ) (1.652.5N m) () NL: () () (3 ) 1V (0.20.25Nm) DIN Y Y DIN DIN 8mm DIN D SY100-61-3-05 DDIN 9.4mm D DIN DC24V 24V SY100-61-3-05 N N DC12V 12V SY100-61-3-06 AC100V 100V SY100-61-2-01 D DIN Assy V115-D V115-Y AC200V 200V SY100-61-2-02 AC110V 110V SY100-61-2-03 V111(G,H,L,M,W)V115-Y(DIN) AC220V 220V SY100-61-2-04 Y DIN SY100-82-1 DC24V 24VN SY100

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

For vacuum/ compound pressure ZSE30A 01 N M ISA2 Option 3 Note) Calibration certificate Nil Y K T Note) Operation manual ISE35 Symbol Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa PSE Piping specifications IS 01 Note) All texts in both English and Japanese.

1 Filter Bowl assembly Lubricator AF11-2 AF11-3 AL12-2 AL12-3 14-3-11 2 Series AU Flow Characteristics Inlet pressure: 1.0 MPa Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Pressure Characteristics Inlet pressure: 0.7 MPa, Outlet pressure: 0.2 MPa, Flow rate: 20 l/min (ANR) Outlet pressure (MPa) Outlet

Thread Rc(PT) Table: Accessory/Option combinations Depends on model l Not available Available F G(PF) N NPT Accessories Options C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable models Port size Accessories Options AMH550 AMH650 AMH850 B 01 B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN/OUT reversal -T Element service indicator Accessories 02 03 1 4 3

1 Filter Bowl assembly Lubricator AF11-2 AF11-3 AL12-2 AL12-3 14-3-11 2 Series AU Flow Characteristics Inlet pressure: 1.0 MPa Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Pressure Characteristics Inlet pressure: 0.7 MPa, Outlet pressure: 0.2 MPa, Flow rate: 20 l/min (ANR) Courtesy of Steven Engineering

ZS-22-B Response frequency 200Hz 200Hz 200Hz 200Hz 200Hz 200Hz (5ms) (5ms) (5ms) (Sms) (Sms) (5ms) (With two M4 mounting thread) Noj. l) Hysteresis Adjustable AdjlJSlable A~uslable Adjustable A~US1ab' A~lJstabte mode m;1 Cf rm: (}i jl t(rml t~,~I~IIm] Cldj.t;,' II"mI l~j~Cf nn'e:, 1: &ij. orm::fe,1 Hysl21 esls Wmdow Fixed Fi xed Fixed Fixed Fixed Fixed co6:rearator m e (3digit) (3digit)

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Caution Be sure

G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs. G46-10-01 2 pcs.

L L L SOLV L L L L L L L L L L L L: Low fixed (0) Input status area Input status area specifications Item Status State 0 Normal SOLV State of power supply for solenoid valve 1 Abnormal (19 V or less) Output area mapping Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 -45No.EX-OMX1001 Dimensions -46No.EX-OMX1001

Note 4) When a regulator is not mounted on the manifold, use the following blank plate assembly (with mounting screws and O-ring) For ARM1000: Part no. 136114A For ARM2000: Part no. 136214A VBA VBAT AP100 ARM2000-4A2-01G Option / Pressure Gauge: G15-10-01 How to Order Symbol Individual IN Common IN G15 10 01 IN 1 Max. display pressure OUT IN 2 1 OUT 2 10 1.0 MPa Not able to set the pressure

2.56 {46) L (6s) 3.31 (84) 4_06 (103) 4.8 1122) 5.55 ( 1 4 1 ) 6.3 (160) 7.O4 079) 7.A 8.54 (198) (2r7) (2361 10.04 (25s) 10.79 1274't 11.54 12.28 (293) (312) 13.03 (331) 13.78 14.53 {3s0) L (369) 15.24 $mhs lllUlff 300 0l|||m$io Base Mounted (Side Ported) lType 42 Manifold NVV3KF3-42-Stations-01 T inch (mm) L: Dimensions Base Mounted (Side Ported) lType 542 Manifold NVV3KF3-S42-Stations

2.56 {46) L (6s) 3.31 (84) 4_06 (103) 4.8 1122) 5.55 ( 1 4 1 ) 6.3 (160) 7.O4 079) 7.A 8.54 (198) (2r7) (2361 10.04 (25s) 10.79 1274't 11.54 12.28 (293) (312) 13.03 (331) 13.78 14.53 {3s0) L (369) 15.24 $mhs lllUlff 300 0l|||m$io Base Mounted (Side Ported) lType 42 Manifold NVV3KF3-42-Stations-01 T inch (mm) L: Dimensions Base Mounted (Side Ported) lType 542 Manifold NVV3KF3-S42-Stations

( DXT170-123-ALmm 1) 300 (+-) 6 600 10 1000 15 1500 20 2000 2) 25 2500 (1mm) 30 3000 8 No.VEX-OMY0001 VEX3 VEX3 12,22,32,42 DIN ACZ DCZ 1) 2) 3) () 4) DC No.1 (+)No.2 (-) () (904 ) 3.57 JISC3306 0.5mm22 3 DIN L,M AC AC DC DC AC DC 3 DIN AC DXT170-176-1 NO.1 NO.2 AC100V 100V DXT170-176-2-01 DC AC200V 200V DXT170-176-2-02 NO.1 AC110V 110V DXT170-176-2-03 (+) NO.1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/low pressure Option 2 Piping specifications Nil None Bracket R 1/8 (With M5 female thread) 01 NPT 1/8 (With M5 female thread) A T1 Straight type 4 One-touch

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

1 08 D N Series P, R port inch bore size Symbol Series SQ1000 SQ2000 1 2 Options Symbol 02 to 24 B K Option specifications Specifies DIN rail length Back pressure check valve on all stations Special wiring specification (except double wiring) With name plate (valve with side port specification only) External pilot specification Built-in silencer Valve stations Symbol Stations 1 station 01

SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OMS0006CN-G