Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

x 0.8 M4 x 0.7 3 5.5 38 23 15.5 10.5 40 4.5 9.5 33h9 34 h9 17H9 5.3 2.5 4.2 10 4.2 7.5 4.5 2.5 6 4 M5 x 0.8 M5 x 0.8 7 5.5 45 30 18.4 12.2 50 5 7 39h9 40 h9 20H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 2.5 6 5 (mm) JJ M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3

CLK1

Pin Dd9 2-3 L 4 4 D L Part no.

Slider Type Ball Screw Drive/11-LEFS Series

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEF32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEF25 (L = 25 mm) 11LEFS 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

40 Pilot EXH 177.5 14 (3(R) port) 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 1 3 Manual override 23 9 19 3(R) port 1(P) port Conduit terminal VFN212N-lTll-02l-l-l Grommet VFN212N-lGll-02l-l-l Surge voltage suppressor (With "S") 137 41.7 300 19 23 Indicator light (With "Z") 74(Without "Z": 64) 64(Without "Z": 54) Grommet terminal VFN212N-lEll-02l-l-l Lead wire O.D. 3.5 at max.

ZSE2/ISE2

Lead wire: 0.6 m) C W/suction filter (Mounting on ZX unit) M5 x 0.8 0X Connector type (Lead wire: 3 m) CL W/suction filter (Mounting on ZX unit) M6 x 1 (Option) 0XY Without connector Base mounting (Mounting on ZR unit) 0R CN Note) Single mounting type: M5 x 0.8 (female) threaded.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

Soft Start-up Valve AV2000/3000/4000/5000 1

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

ML1C

OO PP QQ RR SS TT UU VV Model Applicable gasket ML1C25 ML1C32 ML1C40 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C11.2 17 23.5 12.5 10 53 40 34 26 C14 A B C D E F G H I J K L M N O P Q R S T U V W Y Z Model ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 M5 x 0.8 8.5 M6 x 1 9.5 11 M8 x 1.25 322 306 161 160 108 131 101 99.5 64 92 118

MHZ2/MHZJ2

Flat Finger Type [3] 4-MM thread depth L Attachment mounting thread K J A A D G B D B K J F C S W O Unit: mm Weight g F G Open Closed 2 2.5 3 4 J K MM L B C D Model A W 5.4 7.4 4.45 5.8 7.45 8.9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 55 115 235 420 5.2 8.3 10.5 13.1 10.9 14.1 17.9 21.8 2.45 3.05 3.95 4.9 6 8 10 12 5 8 10 12 +2.2 0 2H9 2.5H9 3H9 4H9 1.4 1.4 1.6 2 0 -0.2 0 -0.2 0 -

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

1

x 0.8 depth 7.5 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 M6 x 1 depth 7 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5 M8 x 1.25 [mm] [mm] Port Thread

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

6 M5 type U10/32 type M5 type U10/32 type e !0 i t NBR, Stainless steel !1 !6 w y Gasket M5 type only !7 r Note 1) M5 and U10/32 types are black zinc chromate plated. Note 2) AS231FM type is made of steel. Note 3) Meter-in type is black zinc chromate plated. Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM.

VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No. Aluminum die cast Body q Stainless steel Spool/Sleeve Metal seal w Aluminum/NBR Spool valve Rubber seal Resin Piston e Pilot valve r 2.10-7

Round Type Low Pressure Hydraulic Cylinder Series CH
M

L (Example) C73CL 5m . Z (Example) C73CZ None .

ZMA

Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-27 8 Series ZMA Dimensions 111 S: Vacuum pressure switch trimmer Pilot valve for vacuum pressure T: Release period adjustment trimmer Pilot valve for vacuum release M5 x 0.8 through (P, E port) Release flow adjustment screw 3-Rc 1/8 SUP.

100

[kPa] Max. suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Weight*6 [g] Page ZL1 84 100 57 180 p. 7 ZL3 93*4 300*5 135*4 390 p. 19 *4 ZL3H, ZL6H (Standard supply pressure: 0.5 MPa) *5 Branch + Port exhaust *6 Basic type ZL6 93*4 600*5 270*4 470 p. 19 ZL1/ZL3/ZL6 Series CAT.ES100-108B A Multistage Ejector ZL1/ZL3/ZL6 Series Energy saving Suction: 100 L Suction: 300 L Suction

MHF2

Max. tightening torque Nm Max. screw-in depth l mm Model Bolt used 1) Stroke end when fingers are open MHF2-8D M3 x 0.5 0.95 7 With clearance MHF2-12D M4 x 0.7 2.2 10 MHF2-16D M5 x 0.8 4.5 12 MHF2-20D M6 x 1 7.8 15 Vertical mounting (Body tapped) Holding point is adjusted. l Clearance Clearance Max. tightening torque Nm Max. screw-in depth l mm Model Bolt used Without clearance Impact load

Single Axis Electric Actuator Serriies LJ1S Slider Guide

W Axial Right F R L T B Cable length Left Top 2m 3m 4m 5m 2 3 4 5 Motor specification Standard motor Matsushita Electric Industrial Co., Ltd.