Table of Contents

Metal bowl VY1 Optional specifications B B B B B N.C.: Gray N.O.: Black B G B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 PPA Bracket mounting size Accessory specifications (mm) AL Standard specifications With pressure gauge With auto-drain Port size Model B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104

Fieldbus system EtherCAT compatible SI Unit

6 m PCA-1558836: Cable with 7/8 inch connector, Socket, Right angle 2 m PCA-1558849: Cable with 7/8 inch connector, Socket, Right angle 6 m PCA-1564927: Cable with M12 connector, B code, Socket, Straight 2 m, SPEEDCON compatible PCA-1564930: Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDCON compatible PCA-1564943: Cable with M12 connector, B code, Socket, Right angle 2 m,

58

f C B h + l A K N N H F F ZZ + l + 2 x strokes S + Stroke H + Stroke ZZ + 2 x strokes V W Cushion valve Port 4 x J G G 2 x P (Rc, NPT, G) M Width across flats KA Width across flats KA MM MM With rod boot (Both sides) E E D D e e C B l + Stroke l AL AL C B f f A K N N A K h + l h + l + Stroke S + Stroke ZZ + 2 x l + 2 x strokes (mm) Bore size (mm) Stroke range (mm) P S N MM M K KA W V J G

Cylinder with Lock

15 A 33 B D-A3 D-G39/K39 D-A5/A6 D-A59W G1/2 (Applicable cable O.D. 6.8 to 9.6) Hs Auto switch Hs Ht Ht 49 56 34 S M C AUTO SWITCH S M C AUTO SWITCH A 33 B A 36 B D-A3C D-G39C/K39C Auto switch G1/2 (Applicable cable O.D. 6.8 to 9.6) Auto switch D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL Hw A 49 B Hs Hs Auto switch 36 24.5 56 SMC SMC D-F5/J5 D-F5NTL D-F5W/J59W D-F5BAL/F59F 14 A 33 B Hs

Free Mount Cylinder

Contact protection circuit None D-A93 2.4 V or less (to 20 mA)/3 V or less (to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Indicator light Red LED lights when ON Lead wires D-A90(V)/D-A93(V) Oilproof vinyl heavy-duty cord: 2.7, 0.18 mm2 x 2 cores (Brown, Blue), 0.5 m D-A96(V) Oilproof vinyl heavy-duty cord: 2.7, 0.15 mm2 x 3 cores (Brown, Black, Blue), 0.5 m Note

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

0.55

suppressor is used, there is some 100 V 200 V 110 V 220 V residual voltage to the protection element and rated voltage.

48

Weight [g] D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto Switch Internal Circuit Auto switch model 8 8 7 0.5 D-M9NW(V) 14 14 13 1 Lead wire length (m) DC (+) Brown 41 41 38 3 68 68 63 5 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black How to Order D-M9 N W V L DC () Blue Series Lead wire length D-M9PW(V) Nil M L Z 0.5 m 1 m 3 m 5 m Wiring/Output type DC (+) Brown Electrical

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

For open collector method, it is 2 m or less. 103 Series LECSA Series LECSB Options Motor cable, Lock cable, Encoder cable LE-CSM-: Motor cable LE CS M S 5 A (13.7) Direction of connector Motor type (30) L A B S Axis side AC servo motor Counter axis side LE-CSB-: Lock cable Cable length (L) [m] Cable contents 2 5 M B E 2 5 Motor cable (11.8) Lock cable A 10 Encoder cable L (29.6) Cable type

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M plug connector Electrical Entry DC/ 24 V, 6 V, 12 V 48 V, 100 V 110 V ( Option) Grommet (G) Grommet terminal (E) Conduit terminal (T) DIN terminal (D), (Y) L plug connector (L) M plug connector (M) Note) Note) Light Surge voltage suppressor Note) VF1000/VF3000 only.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Tie-rod mounting Band mounting 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9P V V V v v 2-wire 12 V M9B V V V v v Terminal conduit 3-wire (NPN) 5 V, 12 V G39 IC circuit 2-wire

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(Tighening torque of 0.3 to 0.4 Nm{3 to 4kgf/cm}) B 1.12-33 5 Port Solenoid Valve VQZ1000/2000/3000 Single Unit Base Mounted Plug Lead Unit How to Order Valve VQZ 1 1 5 5 M 01 1 Series VQZ1000 Body width 10mm VQZ2000 Body width 15mm VQZ3000 Body width 18mm 1 2 3 Port size [4(A), 2(B) port] Port size v v v v v VQZ1000 VQZ2000 VQZ3000 Symbol Without sub-plate Rc(PT)1/8 Rc(PT)1/4 Rc(PT)3/8

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

T79 Grommet 2-wire 12 V T79C Connector S79 3-wire (NPN) IC circuit Grommet 5 V, 12 V Relay, PLC Heavy-duty cord S7P 3-wire (PNP) For 20, 24 V 30 and 40 R73 100 V Grommet R73C Connector 2-wire R80 48 V, 100 V 100 V or less IC circuit Grommet R80C 24 V or less Connector Lead wire length symbols: 0.5 m Nil (Example) R73C 3 m L (Example) R73CL 5 m Z (Example) R73CZ None N (Example) R73CN

LEC-OM069xx

Positioning completed n.09 Speed feedforward 1 V/1000 min-1 n.0A Torque feedforward 1 V/100% rated torque n.0B Active gain *1 1st gain: 1 V 2nd gain: 2 V Gain type indicated by output voltage. n.0C Completion of position reference Completed: 5 V Not completed: 0 V Completion indicated by output voltage. n.0D External encoder speed 1 V/1000 min-1 Value at motor shaft *1.Refer to 5.8.1 Switching

Compressed Air Preparation Filter

Nil Rc V V V V V N*1 NPT V V V V V F*2 G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V 10 1 V V r Port size + a Mounting Nil Without mounting option V V V V V B*3 With bracket V V V V V + Option t Nil Without auto drain V V V V V b Float type auto drain C*4 N.C.

XL

Valve seal, S Valve seal Assemblies XL(A, C, H) [V]-16 XL(A, C, H) [V]-25 XLD [V]-25 XL(F, G) [V]-16 XL(F, G) [V]-25 XLD [V]-40 XL [V]-40 XLD [V]-50 XL [V]-50 XLD [V]-63 XL [V]-63 XLD [V]-80 XL [V]-80 Construction No.

Table of Contents

8 2.1 5.5 7.1 7.7 M-01H-4 M-01H-6 15-2-56 4 Miniature Fittings Series M Series M5 Barb Fitting for Nylon Tubing: M-5AN-4/-6 Effective area (mm2) Weight (g) Model A B C 12 14 5 8 1.8 2.5 2.1 4.0 1.6 1.7 M-5AN-4 M-5AN-6 M5 x 0.8 Width across flats 7 Barb Fitting for Soft Tubing: M-5AU-3/-4/-6 K Effective area (mm2) Weight (g) Model C B A M M-5AU-3 11.5 4.5 1.6 1.7 1.5 1.8 2.5 2.1 4.0 1.6 5

ZX

ZX1-DR1 How to Order Unit for Replacement Misc. (1) Valve unit (4) Vacuum switch unit Refer to page 13-2-44 for details. 15 C 0X ZSE2 D K1 B V ZX1 5 Z B D M L Piping specifications Vacuum pump for system Unit for replacement Nil L Grommet (0.6 m) Manifold All ports are equipped with plugs.

Tie-rod Type Hydraulic Cylinder

V Width across flats G Width across flats G MM MM R (max.) d W W D d E E D M MA a a M MA F NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) B C A a d E D F G GA J K M MA MM NA P R S T V W H ZZ 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 44 18 25 14 17.5 M8 x 1.25 18 13 20 M14

Electric Actuator

Weight [g] D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch model 8 8 7 0.5 LECS; 14 14 13 1 Lead wire length Auto Switch Internal Circuit (m) 41 41 38 3 D-M9NW/M9NWV 68 68 63 5 DC (+) Brown How to Order Main circuit OUT Black of switch D-M9 N W V L Specific Product Precautions Series Lead wire length DC () Blue Nil 0.5 m 1 m 3 m 5 m Wiring/Output type M D-M8PW/M9PWV Electrical entry N P B 3-wire