5 Port Air Operated Valve

) 40.5 2 45.5 2 x 2 (Breathing hole) 17.8 (Breathing hole) 7.5 1 P P 1 7.5 7.5 M5 x 0.8, 1/8 [1(P) port] M5 x 0.8, 1/8 [1 (P) port] 12.9 10 2 x M4 x 0.7 thread depth 5 (For mounting) 10 12.5 12.5 2 x M4 x 0.7 thread depth5 (For mounting bracket) VFA1120-01(-F)(-P) VFA1220-01(-F)(-P) (16.6) (16.6) (Distance between ports) (Distance between ports) 38 1/8 [4 (A), 2 (B) port] 12 11.5 1/8 [4 (

F

M5 x 0.8 Metric 01 1/8 02 1/4 03 3/8 04 1/2 06 6mm Diffent Dia Reducer 08 8mm Diffent Dia Reducer 10 10mm Diffent Dia.

3 Port Solenoid Valve

x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 0 to 0.7 0 to 0.7 0 to 0.7 0 to 0.7 10-V114 10-V114A 10-V124 Note 1) N.C.

Electric Actuator/Slider Type

Tap (4 locations) Body xed/Top mounting Model Bolt Length: L (mm) LEYG25M L M5 x 0.8 2.2 [3.0] 40.5 LEYG32M L M5 x 0.8 2.2 [3.0] 50.5 Max. tightening torque lbfft(Nm) L Body xed/Bottom mounting Model Bolt Max. screw-in depth (mm) LEYG25M L M6 x 1.0 3.8 [5.2] 12 LEYG32M L M6 x 1.0 3.8 [5.2] 12 Max. tightening torque lbfft(Nm) Workpiece xed/Rod end female thread Model Bolt Max.

Speed Controller: Standard Type Series AS In-line Type

L1 L2 A(2) L3 H(1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS1200-M5 M5 x 0.8 M5 x 0.8 25.5 8 10 28.3 10.3 9 9 25 22.2 AS1200-U10/32 10-32 UNF 10-32 UNF AS220-01 27.4 32.4 14.6 14.3 14.1 31.4 36.4 18 12 (12.7) 1/8 1/8 AS220-02 29.8 34.8 19.5 18 18 35.8 40.8 27.2 17 (17.5) 1/4 1/4 AS320-03 35.6 40.6 24.3 22.5 20.8 41.9 46.9 30 19 3/8 3/8 AS420-04 42.4

MGP

M5 X 0.8 4.3 5.6 5.6 M5 X 0.8 Rc1/8 Rc1/8 40 16 18 26 8 10 12 64 83 93 8 9.5 9.5 10 8 10 10 M4 M5 M5 4.5 5.5 5.5 19 5 6 6 15 18 21 30 36 42 15 18 21 22 24 30 16 20 25 78 62 10.5 M5 X 0.8 M5 X 0.8 37.5 10.5 25 25, 50, 75, 100, 125, 150, 175, 200 78.5 62.5 11.5 M6 X 1.0 M6 X 1.0 37.5 13.5 28.5 WA WB Bore (mm) Standard stroke (mm) R S T U VA VB X XA XB YY YL Z 100 to 175st 100 to 175st 75st

Speed Controller with Indicator

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 15 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.

30

-04S 13.5 12.3 16.3 14.1 12.2 16.2 16.1 15 16.1 17.9 21.4 17.6 18.6 22.4 23.2 17.9 22.2 25.8 19.6 22.3 28.5 23.1 16.5 15.4 21 17.1 15.3 20.9 19.1 18.1 20.8 23 24.5 22.3 23.7 25.5 27.9 23 28.6 30.5 24.7 28.7 33.6 29.5 3 3.4 6 17.8 5.3 5.6 17.2 8 7.3 15.2 28.8 M5 x 0.8 1/8 1/4 3.2 12 8 3.4 M A L H 4 M5 x 0.8 1/8 1/4 10 Connection thread 4 12.6 8.7 5.6 4 14 M5 x 0.8 1/8 1/4 3/8 1/8 1/4 3/8 1

SMC Pneumatic Clean Series

x 1.5 M10 x 1.25 M8 x 1.25 26-0.033 0 16 13 13 1/4 1/8 1/8 26-0.033 0 M10 x 1.25 32-0.039 0 8 10 M32 x 2 M14 x 1.5 10112122Axial foot style (L) / CBM2L, CBM2L H Relief port M5 x 0.8 24 2-P (Rc, NPT, G) A K F AL H2 F DL 2-NN Width across flats NA Standard port H1 Width across flats B1 HC LH D I B B 4-LD 2-LC MM Width across flats B2 G Relief port G Relief port M5 x 0.8 LT 20, 25 (This drawing

Rotary Table/Vane Style Series MSU

MSUB7 (Single vane/Double vane) MSUB7-S/D Top ported: MSUB7-SE A port B port 4 x M4 x 0.7 depth 7 2 x M5 x 0.8 2 x 5.5 through Single vane 2 x M5 x 0.8 depth 10 Long groove depth 5 (Positioning pin hole) 2 x 5.5 through 3 x 4H9 depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2 x 5.5 through A port B port 2 x M5 x 0.8 2 x M5 x 0.8 depth 10 Chamfer Chamfer (Single vane

LJ1H

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

4/5 Port Air Operated Valve Series SYJA3000 1

M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 28 2-4.3 2-M5 x 0.8 2-M5 x 0.8 37.5 23 (Pilot port) (For mounting) (Pilot port) A B 11 20 23 5 3

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 3) M5 fittings for M5 thread are attached without being incorporated.

Valve Single Unit

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

SQ1000/2000

Exhaust outlet 96 Series SQ1000/2000 Optional Manifold Parts for SQ1000 External pilot specification [-R] External pilot port (M5 x 0.8) This can be used when the air pressure is 0.1 to 0.2 MPa lower than the minimum operating pressure of the solenoid valves or used for vacuum specifications.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

thread) 76 73 120 80 120 A 54 Finger opening port M5 x 0.8 14 Finger closing port M5 x 0.8 M5 x 0.8 M5 x 0.8 25 25 Finger closing port Finger opening port 4 x M5 x 0.8 thread depth 10 M5 x 0.8 thread depth 5 Vacuum suction port (A, B common view) +0.02 0 2 x 5 depth 10 52 Auto switch mounting groove 16h9-0.043 0 (A, B common view) 22 35.8 2 70 (76) 10 2-3 3.8 4.7 47 25.5 11.5 2 x 4.2 2 4

KG

(mm) <M5> Note) Weight (g) D1 D2 L1 L2 A M L3 KGV04-M5 KGV04-01 KGV06-M5 KGV06-01 KGV06-02 KGV08-01 KGV08-02 KGV08-03 KGV10-02 KGV10-03 KGV12-03 KGV12-04 M5 x 0.8 2.9 6 14 26.5 18.5 3.8 3.8 14.5 22.5 9.8 20.5 11 15 4 8 10.4 13.4 22 16 2.9 1 8 M5 x 0.8 7 15 26 24 30 47 40 49 63 80 Reference dimensions after R thread installation.

Electric Grippers

Bolt LEHZ(J)10(L) LEHZ(J)16(L) LEHZ(J)20(L) LEHZ(J)25(L) LEHZ32 LEHZ40 LEHF10 LEHF20 LEHF32 LEHF40 M3 x 0.5 M4 x 0.7 0.9 1.4 M3 x 0.5 M5 x 0.8 0.9 3.0 M4 x 0.7 M6 x 1 1.4 5.0 M5 x 0.8 M6 x 1 3.0 5.0 M5 x 0.8 3.0 M6 x 1 5.0 When using the thread on the back of the body When using the thread on the back of the body Max. screw-in depth L [mm] Max. tightening torque [Nm] 10 Max. tightening torque

3 Port Solenoid Valve Metal Seal Series VZ200 1

: Common Exhaust Common exhaust: VV3Z4-50 (G) (L) (M) (D) With light/surge voltage suppressor Max.10 93 87.5 With light/surge voltage suppressor 300 (Lead wire length) 79.9 300 (Lead wire length) 300 (Lead wire length) 2-M5 x 0.8 (Pilot EXH) 2-M5 x 0.8 (Pilot EXH) P = 20 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5 x 0.8 Manual override (Non-locking) 11.5 11.5 With light/surge voltage suppressor