ZP

50 40 60 60 50 50 0 to 120 30 to 200 0 to 60 0 to 250 0 to 100 10 to 200 NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR Conductive silicon rubber X X X X X X X X X X X X X X X X X X X X X X X The above table covers only general characteristics of subject rubber materials.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W Lo 20Guide First tentative bore size determination First tentative bore size determination First tentative bore size determination F1 D 1.6 x P F2 D 1.6 x P F3 D 1.6 x P Data WB Inclined operation Allowable Driving Force (Fn) (n = 1, 2, 3) W + WB WV P PV W + WB > WV P > PV Determination of allowable loadweight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (cos

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.1 i'--... 01 5 O~ o 0.2 0.3 0.4 0.5 0.6 0.7 08 0.9 1 00 1000 2000 Flow ra te / mi n IANR) Inlet pressure MPa AR3001-03 AR3001-03 0.6 ~ 0.5 ---'" " Jp J 0.25 '" I r~r " ::;; l' 0.2 ~ --P l' a. r< & "" & l' ::> 0.4 ~ ~ ~ 0.3 ~ -... a. ID '$'2 1-?/"(9 . "OS .

VCL

216.5 255 293.5 332 370.5 409 101 L1 124.5 166 207.5 249 290.5 332 373.5 415 83 VV2CL4 L2 136.5 178 219.5 261 302.5 344 385.5 427 95 L3 148.5 190 231.5 273 314.5 356 397.5 439 107 Manifold composition 2 stns. x 1 3 stns. x 1 2 stns. x 2 2 stns. + 3 stns. 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction

•

When usmg other brand fittmgs apply the helium teak test at the wetded section Carbon diOXide v Ammonia '~) ArgOf'l ~ Nitrogen gas -" Chlorine gas x Parts List No. Descriolion--: Material Voltage Resistance Voltage resistance between metal fitting and lead wire 01 the swilch is 2S0V. Do nol apply voltage potential In excess of 250V.

OML0002-C

How to Order IZN10 01 P 06 Z B1 IZN10 High frequency AC nozzle type Series name Nozzle shape NIL 01 02 11 Piping female Note 1) Rc1/8 Type Energy saving charge elimination nozzle Large flow nozzle Output specification NIL NPN P PNP Piping diameter 06 f6: metric 07 f6.351/4"): inch 16 f6: metric (elbow) 17 f6.351/4"): inch (elbow) Power supply cable NIL 3m Z 10m N Not provided Bracket NIL

100

Button P port V port Color Type Color Type ZL112A Light gray Oval Light gray Round ZL112AN Orange Round Orange Round ZL112A(N)-B With adapter assembly for bottom mounting P V 140 20 55 20 35 28 Circuit diagram 4 x M4 x 0.7 Thread depth 8 (Mounting hole) (Recommended tightening torque: 0.60 to 0.76 Nm) 85 59 * Tighten to the recommended torque to mount the body.

Large Size Vacuum Module: Series ZR

SOL.A SOL.B X X PD PV ZU ZL Release valve Vacuum switch valve V ZY ZF Individual spacer ZR1-R1-2 ZP PV V X X SP PD X X ZCUK Individual spacer AMJ ZR1-R1-1 X AMV PV V + + + + + + Vacuum (V) port Rc 1/8 PD X X X AEP X X HEP Related EXH PS PD PV 70.5 Equipment 16.5 12 V V V 35.5 Pitch P = 33 Pitch P = 33 35.5 PV : Vacuum pressure supply port PS : Common pilot pressure supply port PD : Common

Modular Style Regulator with Built-in Pressure Gauge Series ARG

MPa MPa MPa P P P P K K K K C C C C U U U U O O O O S S S S H H H H L L L L to to to to Mounting angles other than 45, 135, 225 and 315 are available through the Made to Order (page 29).

Plug-in/Plug Lead: Single Unit

00-B-1 P ARBQ5000-00-P-1 ARBQ5000-00-P (P B) A ARBQ5000-00-A-5 0.7 0.6 VQ55 (Plug lead type) B ARBQ5000-00-B-5 Outlet pressure (MPa) 0.5 P ARBQ5000-00-P-5 0.4 0.3 Dimensions 0.2 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) SMC Pressure Characteristics 64 181 Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 20 l/min(ANR) 2 B SMC 68.5 D P 1 X 12 5 R1 3

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

determination F3 D 1.6 x P WB Inclined operation W + WB WV P PV W + WB WV P PV Allowable driving force table (Fn) (n=1,2,3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (COS + SIN) Inclined (Refer to page 5 for vertical operation.)

VQ5000

entry R1 R2 P 18.4 PE X 27.5 27.5 Rc 1/8 PE port Rc 1/8 External pilot port R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 7 Base Mounted Series VQ5000 Plug-in/Plug Lead: Single Unit Plug Lead Type Grommet 2 position

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

36 ZPT16F-B5 ZPT20F-B01 16 18 2 Rc(PT)1/8 6.2 14 12.5 15.5 ZPT25F-B5 32 M5 x 0.8 5 9 ZPT 40/50 F-B 8/01 (Without Buffer/Female Thread) ZPT25F-B8 25 28 M8 x 1.25 8 12 36 ZPT25F-B01 Rc(PT)1/8 6.2 14 ZPT32F-B5 32.5 M5 x 0.8 5 9 ZPT32F-B8 32 35 M8 x 1.25 8 12 13 16 36.5 ZPT32F-B01 Rc(PT)1/8 6.2 14 Width across flats P N NL F D C Y 2.5 A B Dimensions A (mm) B C D F N NL P Y Model ZPT40F-B8 M8

High Power Cylinder Series RHC

S WH ZZ MM K JD JC Bore size (mm) 252 1/4 192 15.0 13 M22 x 1.5 30 26 M8 x 1.25 33.5 22 5 30.5 43 20 5.8 to 8.8 257 1/4 193 19.6 17 M24 x 1.5 36.9 32 M10 x 1.25 37 27 5.5 25.5 39 25 265 3/8 195 19.6 17 M30 x 1.5 43.9 38 M10 x 1.25 43.5 27 5.5 28.5 36 32 6.8 to 11.3 277 3/8 201.5 25.4 22 M33 x 2.0 47.3 41 M14 x 1.5 52.5 30 7.5 23 32 40 50 to 100 Rc P EA Rc P EA GA NE 8-J GA WH ND H1 MM I D

Ozone Resistant

-00 80-VM230-02-00 80-VM430-01-00 80-VZM450-01-00 80-VZM550-01-00 80-VFM350-02-00 80-VHS400 80-VHS500 80-VHS2500 80-VHS3500 80-VHS4500 80-VHS2000 80-VHS3000 80-VHS4000 80-VEX12080-VEX13080-VEX15080-VEX170VEX1A33B VEX1B33B 80-VEX123380-VEX153380-VEX173380-VEX350 80-AR435 to 935 4, 5-port solenoid valve 3-port solenoid valve Directional control valves Mechanical valve 3-port residual pressure

Compact Manifold Regulator

L2 L2-10.5 L1=(28 x n)+56 18 20 28 52.5 81 28 5.3 5.5 SMC SMC SMC SMC 28 56 SMC SMC K K P P C C U U O O S S L L H H 8 3 5 11.5 L2 dimension DIN rail part no.

Fieldbus system (PROFIBUS DP compliant)

Freeze_Mode 1 when Freeze command is received Byte2: Station Status 3 Bit 7 0 0 X X X X X X X Reserved Diag. Ext_Overflow 1 when the enhancing diagnosis data causes overflow Byte3: Diag.Master_Add Indicates the master address.

Guide Cylinder Series MGG

M 4 x O T Q 2 x P (Rc, NPT, G) AH AG S W K B U L I AL 4 x AK hole AP A R AA J V AI X AB Y + Stroke AJ Z + Stroke AG For 4 x AO MGJ AN MGP AI Cutout window AM MGQ 100 piston rod end connection MGG Mounting dimensions MGC MGF MGZ (mm) MGT Bore size (mm) 63 80 100 Stroke range (mm) A AA AB AG AH AI AJ AK AL AM AN AO AP B I J K L M N O P 75, 100 125, 150 200, 250 300 200 25 25 228 250 158 180

MGG

depth 14.5 M16 x 2 depth 28 27 30 55 200 13.5 115 76 170 214 30 160 M12 x 1.75 depth 24 262 138 70 75 230 234 17.5 23 depth 17 M18 x 2.5 depth 32 30 32 70 245 15 125 80 210 245 35 190 304 153 M14 x 2 depth 28 80 85 280 274 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V U T S R Q P Y R O 63 80 100 63

PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch