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Particle concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering

VFS

VVFS3000-5-1A VVFS3000-5-2 VVFS3000-7-1 VVFS3000-8 19.8 x 16.6 x 1.6 (End plate) 20 x 16 x 2 (Manifold block) 6.2 x 3 x 1.6 VVFS3000-6A VVFS3000-4AAZ738-22AAXT336-9 No. q w e r t y u i Material Steel plate Steel plate NBR NBR NBR NBR NBR For increasing the manifold bases, please order the manifold block assembly number of the principal part assembly !0.

Hydraulic

16 M12 x 1.75 27 13 80 231 14 90 139 14 34 M27 x 2 35 32 125 6.5 34 80 38 140 140 112 35.5 35 27 19 16 M14 x 2 27 15 100 247 16 112 170 16 34 M27 x 2 35 32 160 9 43 100 42 174 174 140 45 38 36 22 18 M16 x 2 28 17 110 275 18 140 197 18 38 M33 x 2 40 36 (mm) Without rod boot With rod boot Bore size (mm) P l R S T V W X Y H ZZ e f h ZZ 40 1/4 37 106 11 7.5 8 27 8 66 207 55 25 92 233 50 3/8

CY1

Lo Guide First tentative bore size determination F1 D 1.6 x P First tentative bore size determination F2 D 1.6 x P First tentative bore size determination F3 D 1.6 x P WB Inclined operation W + WB WV P PV W + WB > WV P > PV Allowable driving force table (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (cos

SY

P to A/B 3.6 (0.2) A/B to EA/EB 4.14 (0.23) P to A/B 9.18 (0.51) A/B to EA/EB 9.9 (0.55) P to A/B 15.84 (0.88) A/B to EA/EB 14.94 (0.83) Valve effective area Note 2) mm (Cv factor) C6: C8: C10: Manifold base weight W (g) n: Number of stations W = 13n + 35 W = 36n + 64 W = 43n + 64 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides

ZP3

Form w 1 Material 3 N S U F GN GS 015 1.5 2 0.8 0.3 A ZP3 U 02 2 2.5 B 035 3.5 4 Construction p. 160 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber Mounting Bracket Assembly From p. 162 With adapter 1.5 to 3.5 w q ZP3 015 U T N A3 M3 x 0.5 e Connection thread (Male thread) 2.5 A3 M3 x 0.5 8 Model Width across flats 5 Vacuum inlet

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P. 14-2-24 Piping adapter M5 x 0.8 1/8, 1/4, 3/8, 1/2 P. 14-2-24 T-interface Redirects the air flow. Pressure switch with piping adapter Compact switch and piping adapter integrated into one piece. P. 14-2-25 1/8, 1/4, 3/8, 1/2, 3/4 Check valve P. 14-2-26 1/8, 1/4, 3/8 Prevents back flow from lubricator.

REA/REB

D 2.8 x P First tentative bore size determination 0.3 x Wcos + Wsin D 5.0 x P 0.3 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure (Refer to page 25 for vertical operation.)

Fluoropolymer Piping Equipment

Symbol Symbol Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" P Panel Mount Union U Union Size Size No. 1 1 2 2 3 3 3 4 4 5 5 6 6 1 2 2 2 3

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W Lo 20Guide First tentative bore size determination First tentative bore size determination First tentative bore size determination F1 D 1.6 x P F2 D 1.6 x P F3 D 1.6 x P Data WB Inclined operation Allowable Driving Force (Fn) (n = 1, 2, 3) W + WB WV P PV W + WB > WV P > PV Determination of allowable loadweight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (cos

SYJ3000/5000/7000

SYJ7000: 8 mm JIS Symbol 2 position double 2 position single 3 position closed center 3 position exhaust center 3 position pressure center Body ported (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (B) 2 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1-5-72 73 Series SYJ5000/7000 Made to Order Specifications: DIN Terminal

VFR

External pilot port Rc 1/8 6.8 to 10 G 1/2 4-Rc 1/8 (PE port) 4-Rc 1/8 (PE port) 208.5 196.5 External pilot port PE X PE PE PE Rc 1/8 X EB EA P EB EA P 81 67 50 31 81 67 50 31 6-Rc 3/4 (P , EA, EB port) 37 37 43 72 61 37 37 6-Rc 3/4 (P , EA, EB port) 72 61 43 Formula for manifold weight M = 0.811n + 1.231 (kg) n: Stations n: Station Stations Formula L1 = 51 x n + 92 L2 = 51 x n + 110 2 194

REA/REB

F2 D 1.6 x ---P F3 D 1.6 x ---P F1 D 1.6 x ---P WB Inclined operation W + WB WV P PV W + WB > WV P > PV Allowable Driving Force (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (cos + sin) Inclined (For vertical operation, refer to page 10-2-18.)

REA/REB

D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation W WV P PV (For vertical operation, refer to page 10-2-79.)

5

Foot: CS2YL H K A AL F S + Stroke With rod boot Width across flats KA Port V W G G 2 x P (Rc, NPT, G) 4 x J Cushion valve MM D B E e LH LY 4 x LD f l LX Y N X LS + Stroke N X Y LT B C ZZ1 + l + Stroke h + l ZZ + Stroke (mm) Bore size (mm) A AL lB B lC D E F G J V W K KA LD LH LS 125 50 47 143 143 115 32 71 43 15 M14 x 1.5 15 17 15 27 19 85 188 140 50 47 157 157 128 32 71 43 15 M14 x 1.5 15

CRB2/CRBU2/CRB1

Q2 (mm) L2 (3 x P) Size 10 Q1 X L1 max.

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(Example) For M3: L1 = 6 mm Applicable shaft type: W Applicable shaft type: W L1 +( 3 x P) Q1 = M (mm) L1 = Q2 Y Size (mm) Y = 15 Q1 X M3 1.5 to 9 Size 15 20 M3 4 to 18 M3, M4 1.5 to 10 L2 + (3 x P) 20 30 M3, M4 4.5 to 20 M3, M4, M5 2 to 13 X = L2 = 30 40 M3, M4, M5 5 to 22 M3, M4, M5 4.5 to 15 Q2 = M Symbol: A3 Symbol: A4 The short shaft can be further shortened by machining male threads

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L1 = 6 mm Applicable shaft type: W Applicable shaft type: W L1 +( 3 x P) Q1 = M (mm) L1 = Q2 Y Size (mm) Y = 15 Q1 X M3 1.5 to 9 Size 15 20 M3 4 to 18 M3, M4 1.5 to 10 L2 + (3 x P) 20 30 M3, M4 4.5 to 20 M3, M4, M5 2 to 13 X = L2 = 30 40 M3, M4, M5 5 to 22 M3, M4, M5 4.5 to 15 Q2 = M Symbol: A3 Symbol: A4 The short shaft can be further shortened by machining male threads