3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

HRX-OM-X071

Applicable model HRR050-A/W-40-T1 HRR050-A/W-40-T2 Rated flow50/60Hz common*1 L/min 16 24 Maximum pump head 50/60Hz common*2 m 50 Pump Output W 400 750 Circuit protector A 10 Recommended earth leakage breaker capacity A 10 Due to an increase in heat generation of the pump. The cooling reduces about 400W from the value in the catalog.

Free Mount Cylinder

Where the wiring length to load is greater than 5 m. Where the load voltage is 100 VAC. The contact life may be shortened. (Due to permanent energizing conditions.) L D-M9P (Example) Nil Lead wire length 0.5 m 3 m L 5 m Z Note 1) Applicable auto switch with 5 m lead wire Z Solid state switch: Manufactured upon receipt of order as standard.

CQS

CQSKB125D 10D 15D 20D 25D 30D M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M5 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l M5 X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M5 X 25 l X 30 l X 35 l X 40 l X 45

Environment

PB H thread depth C Vent hole Note 3) J PC EV Z T M U D K Note 2) L R 4 x O1 thread depth R W A + Stroke B + Stroke S EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Incremental encoder Absolute encoder B C D EH EV Without lock With lock Without lock With lock A W Z A W Z A W Z A W Z Size Stroke range [mm] 25 15 to 100 238

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

XM, XY

range D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) H0 5 to 60C 5 to 150C Nil M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch y Number of auto switches/Detecting position Detecting position Valve open/closed Valve open Valve closed Symbol Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

CLA

PSI Volume Energy Volume aim 14.7 psi mm' 6.10xl0-5 in3 inl 16387 mm' ff Ib 1.356 N'm in3 16.387 em3 (cc) ff 'Ib 1.356 J em3 (ee) 0.0610 in3 Energy fI" 0.0283 m' kWh 3.6 MJ m' 35.320 fI' N'm 0.7375 fI ' Ib fI' 28.329 L L 0.0353 ff' J 0.7375 fI 'Ib gal(U.S.) 3.785 L Power L 0.2642 gal (U.S.)

Slider Type/Ball Bushing Bearing

L Yaw moment M3 = W (L A) Roll moment M2 = W L CY3B CY3R (mm) Model CY1H10 CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 A 15 17.5 19.5 23.5 0 CY1S L L A L CY1L M2 M1 CY1H CY1H 0 M3 Since there are 2 guides, the guides central axis and the cylinders central axis are the same.

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B m (800) MY3M 50 L (600) 40 m L 30 MY1H40 (550) Mass m (kg) m MY1H32 20 L L MY1H25 10 Caution 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting it.

VQ4000

Electrical entry of manifold (except L and C kit) is individual wiring. For details, refer to internal wiring figure of each kit. Cable length is 0.6 m for L kit.

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

MQQ

2-M5 x 0.8 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA Y Q F I 4-N through M 0.2 D E K B + Stroke L M 0.2 A + Stroke E 25, 28 H thread effective depth C 2-Rc 1/8 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA Y Q F E J I 4-N through M 0.2 D W K B + Stroke L A + Stroke M 0.2 E Bore size (mm) Stroke range (mm) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40

MY2

X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket X417 1 1 1 1 2 1 1 Nil W Z L H LZ HZ Nil W L H L, H, LS, HS X416 on one side X416 on both sides (one on each side) X416 on one side, X417 on the other side X416 on L unit side X416 on H unit side X416 on L unit side, X417 on the other side X416 on H unit side, X417 on the other side X417 on one side

HRX-OM-X084

Applicable model HRR010-A/W-10/20-T1 Rated flow*1 (50/60Hz common) L/min 5 Maximum pump Pump head*2 m 35 (50/60Hz common) Output W 400 Circuit protector A 15 Recommended earth leakage breaker capacity A 15 Cooling capacity W Due to an increase in heat generation of the pump.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M7 10 C6 L M q w r t y u i e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min w Flow adjustment valve/Piping entry direction With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02, N1, N2, F1, F2 Straight Symbol Port size Rated flow

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Please order it separately if necessary. 1 1 30 JSX022 Cable length L [mm] 1 1000 2 2000 5 5000 Specification 1 For DC voltages 2 For AC voltages Specifications Part number JSX022-30-1-m JSX022-30-2-m Key type A-coded B-coded Rated current 4 A Rated voltage 250 V Rating/Performance Contact resistance 40 m or less Insulation resistance 1000 M or more Withstand voltage 1500 VAC Operating temperature

Series VQ Metal Seal/Rubber Seal Body Ported

Description Body Material Body Zinc die-cast Zinc die-cast q q Spool valve Spool/Sleeve Aluminum/NBR Stainless steel w w Piston Piston Resin Resin e e rPilot Valve Assembly rPilot Valve Assembly (1) (1) L M G L M G VQ111P (H) (Y) VQ111P (H) (Y) 2 2 Single Single Voltage 1 to 6 Voltage 1 to 6 L M L M VQ110L VQ110L 2 2 Double (latching) Double (latching) Voltage 1 to 6 Voltage 1 to 6 The

CL

x 1.5 l m t Applicable snap ring Part no.