Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -+ -+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

MXS Series Air Slide Table

Buffer Specifications Model MXS6 MXS8 MXS12 MXS16 MXS20 MXS25 6 8 12 16 20 25 Bore size (mm) Horizontal mounting 2-20 in/s (50~500 mm/s) 2-12 in/s (50~300 mm/s) Piston speed Buffer stroke (mm) 5 10 At 0mm stroke At max. stroke 0.67 1.12 2.25 2.92 3.82 4.72 Buffer stroke load (lbf) 1.35 1.80 2.92 3.82 5.62 6.52 Note) Refer to P. 14 for cautions on buffer.

Magnetically Coupled Rodless Cylinder

Switches P: Operating pressure (MPa) V: Speed (mm/s) Stroke (mm) Mode of operation (horizontal, inclined, vertical) Mode of operation Note 1) Vertical operation Inclined operation Horizontal operation Review of load weight and operating pressure W Lo Guide First tentative bore size determination F1 D 1.6 x P First tentative bore size determination F2 D 1.6 x P First tentative bore size

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

Compact manifold regulator ARM5 Series

X 5.5 L3=50+R+V L4=50+T+X 50 SMC H H L L S S O O U U C C P P K K R 8 S U 57 (at knob locked) DIN rail part no.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

2-P Port size A B Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M M 2-J, thread depth K 2-J, thread depth K DIN terminal: D Conduit terminal: T D S F Q Cable 6 to 12 Q 2 F 34 G1/2 D 25 T C C R R Width across flats H Width across flats H E E S 2 2-P Port

1.63

speed of 200 mm/s.

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

CS1

Bore size (mm) 125 140 160 180 200 250 300 Refer to p.1.10-7 for How to Order Auto Switches Style.

MLGC

B76 B73 I.C. 5V P P P P P P P P P P P P P P P P P 3 wire (Equiv.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

width across flats 12 M8 x 1.25 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5

MLGP

P-80 (JT)

MLGP

P-80 (JT)

Series IDG

17 IDG3, 5 IDG3H, 5H With fitting for purge air discharge (Option: P) 73 40 Dew point indicator (Option: S) (98) 38 30 Purge air 12 2.3 6 17 22 IN OUT 11 Bracket (Accessory: B) Purge air for dehumidification 140 118 Port size: 1/8, 1/4 (F) (64) Purge air discharge tubing port for dehumidification Applicable tube O.D.: 8 5/16 inch (Maintenance space 100mm or more) IDG10, 20 IDG10H, 20H With

ISO Standard Hydraulic Cylinder

S NB TY TY ZZ + Stroke S + Stroke TX M H TZ Stroke range Bore size (mm) V SS BB J K C P F NB A G M MM NA PJ B D E GA GB H MA TD TX TZ S Y Z ZZ 32 54 25 to 800 44 45 33.2 35 12 M6 x 1 7.5 M14 x 1.5 56 45 68 103 5.5 128 153.5 7 1/4 12 23 18 14 46 18 30 43 15 16 60 -0.016 -0.043 40 57 25 to 800 61 63 41.7 37 18 M8 x 1 10 M16 x 1.5 73 63 95 128 6.5 153 185 9 3/8 12 32 22 19 51 22 34 47 19 20

C95

: V [m m/ s] Maximum speed: V [m m/ Graph 7 Graph 4 0.5MPaP 0.5MPaP 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m [kg] 32 Load weight: m [kg] 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ 1.11-31 Series C95 Refer to P.5.3-17, 27, 37

CY1F

/s Piston speed mm/s Piston speed mm/s 4 Series CY1F Vertical Actuation qVertical operation In vertical operation, observe the maximum load mass and the maximum operating pressure shown in the table below to prevent a drop due to slipping off of magnet couplings.