Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VZS VFS VS4 VQ7 EVS Large capacity EVS7-6 (Size 1) 1200 l/min (ANR) EVS7-8 (Size 2) 3000 l/min (ANR) EVS7-10 (Size 3) 5500 l/min (ANR) VFN Cylinder driving size Flow rate 100 160 200 Rubber seal, single type Lightweight Size 1 (3 position): 0.55 kg Size

ZP3

Type/ZP3-Y ZP3-Y(J/K)-B ZP3-YJP-B ZP3-YK(15/20)-B ZP3-Y-(02/04/06) ZP3-Y-(U2/U4/U6) Vacuum inlet o o y y t t Vacuum inlet u u i y t Component Parts u No.

CE2

For placing workpieces in boxes By adopting an X-Y table configuration, the cylinder can position workpieces in boxes. Point A DBrake point (Axis of rotation) First operation (Prediction control) -X Positioning error 20Predicts overrun distance based on cylinder size, cylinder speed and load rate.

Modular Type Lubricator Series AL

Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.

VM

Push Button (Mushroom)/VM120-01-30R, B, G, Y/VM130-01-30R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 21N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T. Push Button (Extended)/VM120-01-32R, B, G, Y/VM130-01-32R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 21N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T.

RSH

0 u #0 $2 #6 t #8 q y $0 $1 20 r !1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !

MGC

Compact front plate and guide body Made to Order Refer to p.5.4-1 for Made to Order specifications of series MGC. 3.20-1 Compact Guide Cylinder Series MGC 20, 25, 32, 40, 50 How to Order MGC B S C73 32 100 L R Guide cylinder (Compact style) Number of auto switches Bearing M L Slide bearing Ball bushing bearing Auto switch 2 1 n S n Without auto switch (Built-in magnet) *Refer to following

VT317

When an electric current is applied to the molded coil r, the armature t is attracted to the core y, and through the push rod u, it pushes down the spool valve w. Then, port P and port A are connected. At this time, there will be gaps between the armature t and the core y, but the armature will be magnetically attracted to the core y.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

CYRZ-V CYRZ-W CYRZ-X CYRZ-Y 12REA Warning 1. Do not disassemble the product because it may damage the air cushion mechanism.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

Foot/(L) Cushion valve Port LY 4-LD LH LT X Y X Y LX LS + Stroke LZ ZZ + Stroke (mm) Foot Stroke range Bore size (mm) LX LT LS LH LD Y ZZ X LZ LY 32 40 50 63 80 100 53 59 72.5 82.5 32 38 46 56 72 89 3.2 3.2 3.2 3.6 4.5 4.5 128 132 148 148 174 178 30 33 40 45 55 65 7 9 9 12 12 14 9 11 11 14 14 16 162 170 190 193 230 234 22 24 27 27 30 32 50 55 70 80 100 120 up to 700 up to 800 up to 1000 up

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

ZPT/ZPX

Vacuum Entry with Buffer Construction Series ZPT Series ZPX y o t y o ZX Component Parts r e i No.

HIGH VOLTAGE POWER SUPPLY MODULE, BAR IONIZER SEPARATE CONTROLLER, O36, 680 lb

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

(or 3 kPa) Repeatability Note 2) 0.4 MPa setting (Ex.)10-ARP30-02BG 1 L/min [ANR] or less (at P2 = 0.4 MPa) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.6 L/min [ANR] or less (at P2 = 0.2 MPa) Air consumption 0.6 MPa setting (Ex.)10-ARP30-02BG-3 1.4 L/min [ANR] or less (at P2 = 0.6 MPa) 1/8 1/4 1/8 Pressure gauge port size 5 to 60C (No freezing) Ambient and fluid temperature With a digital pressure

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

(or 3 kPa) Repeatability Note 2) 0.4 MPa setting (Ex.)10-ARP30-02BG 1 L/min [ANR] or less (at P2 = 0.4 MPa) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.6 L/min [ANR] or less (at P2 = 0.2 MPa) Air consumption 0.6 MPa setting (Ex.)10-ARP30-02BG-3 1.4 L/min [ANR] or less (at P2 = 0.6 MPa) 1/8 1/4 1/8 Pressure gauge port size 5 to 60C (No freezing) Ambient and fluid temperature With a digital pressure

Vacuum Filter AFJ Series

4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY on ti rp so on ad a ZQ sl or an l f ea te d ZF id wo pe rk ZP ty su nt ZCU oi rf ac l j AMJ al e s B Misc.

Booster Relay Series IL100

Construction IN w o e y EXH EXH t q r OUT SUP u i Component Parts Replacement Parts No. Description Material Note 1 Valve Aluminum alloy Silver baking finish Model Order no.

VT307

At this time, there will be gaps between the armature t and the core y, but the armature will be magnetically attracted to the core y. Air flow direction: Port P Port A , Port R Block Component Parts Operation principle Spool valve w is pushed upward by the return spring e, port P is closed, and then port A and port R are opened.

High Power Cylinder Series RHC

M14 x 1.5 201.5 6.8 to 11.3 3/8 40 50 to 100 EA H EA FA GA A NE Rc P Rc P GA M Effective thread K WH ND H1 MM I C B D E LY 4-LD LH0.2 LT JC Y X JC Y X S + Stroke NF LX LZ LS + Stroke ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) 50 H1 I 11 JC 58 K 75 LD 7 H 11 GA 80 FA 16 EA 23 D 62 C 20 B 53 A 70 E 0 Effective thread length 32 250 to 1000 35 50 0.042 0 250 to 1000 11 72 75 7 11 80 16