Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note) Indicate on a manifold specification sheet in case of mixed sizes. 12 12 stations 18 Base Mounted Type Series VQ5000 U side D side Stations . 3 2 1 How to Order Manifold Assemblies (Example) How to Order Valves Enter part numbers for valves and options to be mounted below the manifold base part number.

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.

HRX-OM-O021

PV SV HRS Series 5.19 Communication function 5-57 HRX-OM-O021 Chapter 5 Display and setting of various functions 18. Select BCC (simple communication protocol) from the table below with [] key or [] key, and confirm by pressing SEL.

HRX-OM-R005

PV SV HRS Series 5.19 Communication function 5-57 HRX-OM-R005 Chapter 5 Display and setting of various functions 18. Select BCC (simple communication protocol) from the table below with [] key or [] key, and confirm by pressing SEL.

MHF2

M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port DE-E Open: 321 2058 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread depth 4 Attachment mounting thread Mounting thread 20 43 Auto Switch Mounting Groove Dimensions 2-3H9 +0.025 0 depth 3 2.2 18 5.5 18 5.5 4 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 74 12-3-19 20 Series MHF2 Dimensions MHF2-16D2 4H9

MHF2

M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port DE-E Open: 321 2058 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread depth 4 Attachment mounting thread Mounting thread 20 43 Auto Switch Mounting Groove Dimensions 2-3H9 +0.025 0 depth 3 2.2 18 5.5 18 5.5 4 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 74 12-3-19 20 Series MHF2 Dimensions MHF2-16D2 4H9

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

54.5 5 74 65 6 84.5 75.5 7 95 86 8 105.5 96.5 9 116 107 10 126.5 117.5 11 137 128 12 147.5 138.5 13 158 149 14 168.5 159.5 15 179 170 16 189.5 180.5 17 200 191 18 210.5 201.5 19 221 212 18 Series SYJ3000 C4 N3 Type 41 Manifold: Side Ported/SS5YJ3-41Stations -M5, [ ]: AC (Lead wire length) 91.7 [96.1] Approx. 300 C4 N3 For (Built-in one-touch fitting) Grommet (G) For M5 (Pitch) P = 10.5

OMU0023

INP = 1 indicates that the target location has been reached. 18 Repeat steps 17-18 After settling time, the operation of step data No.20 is 19 completed. 66 - Caution If the direct operation parameters such as target position (Step Data No. 20) for D9103 to D9115 are changed using the "Direct Operation Step Data setting" function during direct operation, the changed parameters will not be

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

double 10 Max. operating frequency (Hz) 3 3 position Body ported Manual override (Manual operation) Pilot exhaust method Non-locking push type, push-turn locking slotted type, push-turn locking lever type Individual exhaust for the pilot valve, common exhaust for the pilot and main valve Lubrication Mounting orientation Not required Unrestricted Note 2) Shock/Vibration resistance (m/s2) 150

,,: ,.

to .220 3y8 1t8 5/8-18 5/8 1.23 .220 3i8 1t4 5/8-18 c/o .242 3tg ate 5/8-18 16 .282 3t8 1t2 5,/818 7/8 1.67 .242 7t16 1t4 Consult lactory tor inlolmalion 1t2 1t4 sl4-'16 g4 1.60 .408 1/2 3i8 314-16 gt4 1 .60 .408 112 314-16 7la t.79 .

HRX-OM-W032

Table 5.21-18 Setting of time delay for contact input signal delay timer for reading Set value Explanation Default Setting/checking is possible only when the contact input signal 1 is set to external switch signal input (N.O. type or N.C. type).

Hydraulic Cylinders

Auto switch symbol (mm) (mm) S Bore size (mm) B Bore size (mm) h C A g N S 26.5 30 38 45 55 66 86 104 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 61 63 71 75 81 90 105 132 43 45 51 55 60 67 78 96 18 18 20 20 21 23 27 36 33 36 45 50 56 68 87 111 76 81 96 105 116 135 165 207 6 6 7 7 7 7 7 7 N g C B + Stroke h + Stroke A + Stroke Note) For all dimensions other than the above, please refer

0.01

200 150 100 0 50 Supply pressure (kPa) Supply pressure (kPa) 870 Air Catch Sensor Series ISA2 Response Time (Typical example) Response time changes with detection distance and piping length.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

XL-OMY0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

150 With auto switch CA1 Number of auto switches S n Bore size 20mm 25mm 32mm 40mm CS1 Air cylinder with auto switch 20 25 32 40 2 1 n Without auto switch (Built-in magnet) Auto switch * Refer to the left table for selecting applicable auto switches.

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4

5 Port Solenoid Valve Series SQ1000/2000

seals Type of actuation A, B port size 2 position 3 position 4 position One-touch fitting Effective area mm (Cv factor) Single/Double Double (Latching/ Double solenoid) Pressure center Exhaust center Series Closed center C3 C4 C8 C6 Dual 3 port valve (3.2) (4) (8) (6) Single SQ130 Metal seal SQ131 Rubber seal SQ230 Metal seal SQ231 Rubber seal 3.2 (0.18) 4.5 (0.25) 11.7 (0.65) 14.8 (0.82) 18