CYV

Note 3) This data is considered typical but not guaranteed. 10Leakage test result 100 5 10 Time [min] e e a a l l k k w w 2 a a 1 O-ring seals separate vacuum and atmosphere. Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. o o g g L L e e Static O-ring seals are used for all the seals between vacuum and atmosphere.

Prevents Micro-Bubbles

S) PB W PA A B SMC A B (mm) Dimensions (Max.

Compact Guide Cylinder

D-M9WV D-M9AV D-A9 D-A9V A B C W A B C W 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more Bore size 12 7.5 7.5 10 19.5 22 4.5 2 3.5 3.5 6 23.5 26 1 16 9 7.5 10.5 19.5 22.5 4.5

Ejector Valve Unit Series ZYY/ZYX 1

Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa

•

(mm ) . 100 125 150 I 50 75 100 125 150 75 ~ 50 I 75 50 100 125 150 107 40 70 B3 83 97 11 5 128 128 194 52 62 204 212 225 225 1 83 107 50 70 83 ! 97 115 128 I 128 52 62 204 19' 212 2.?

Single Axis Electric Actuator Series LJ1H

A B C D 43 Non-standard Motor Series LJ1H10 High Rigidity Direct Acting Guide Motor Output Ground Ball Screw 50W 12mm/12mm lead Horizontal Mount How to Order Stroke 1 LJ1H10 F W X10 PB 1 G Cable entry direction Top entry Left entry Cable entry direction Switch Motor specification Power supply voltage F R L T B Nil W Axial Right Left Top Bottom 100/115VAC (50/60Hz) None Matsushita Electric

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

39

W Fulcrum L Front matter 5 Series CKZ3 Model Selection Model Selection CKZ3N North American Type Made to Order European Type CKZ3T 3 Clamp arm 50 63 300 150 280 140 Distance from pivot point L(mm) Distance from pivot point L(mm) 260 130 240 120 220 110 200 100 180 90 160 80 140 70 120 60 100 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5 8.0 50 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5

1

SOL. 2 2 Light w Without electrical option With light/surge voltage suppressor Seal Wiring conduit (Bore size G1/2 Tightening torque 0.5 to 0.6 Nm) Rated voltage Lead wire color q w DC Black Red 100 VAC Blue Blue 200 VAC Red Red Other AC Gray Gray * There is no polarity. Description Part no.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

4 @1 w !8 w !8 w !6 !5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

3 Position Cylinder Series RZQ

x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

ZP

Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component

Brake mechanism added

75 100 80 100 90 100 2 D-A3C D-G39C D-K39C 20 + 35 (n 2) (n = 2, 3, 4, ) 75 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Different surfaces) 2 n 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Same surface) 1 10 75 80 90 (Different surfaces) (Same surface) 20 55 75 80 90 75 + 35

HRX-OM-X071

HRR050-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow

CC-Link-E

The pressure i s set by b15, b1, b0 dat a. ( b11 b0 cover 100% F. S. ) The l i m i t i s 1198h, dat a of 110% , but t he guarant eed accuracy i s up t o 100% F. S. I nput dat a occupi es 4 w ords, but uses onl y t he 1st w ord. The pressure i s m oni t ored by b15, b1, b0 dat a. ( b11 b0 cover 100% F.

ITV-E

Brow n Pow er suppl y N ot e) The w i re col or i s f or w hen opt i onal cabl e i s used.

O

Brow n Pow er suppl y N ot e) The w i re col or i s f or w hen opt i onal cabl e i s used.

O

Brow n Pow er suppl y N ot e) The w i re col or i s f or w hen opt i onal cabl e i s used.

AC Servo Motor Driver (Pulse input type/Positioning type)

PA05 100 100 Electronic gear numerator *3. PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.