SMC Pneumatic Clean Series

to 25 6 to 25 10/16 15/32 Bore size 610 6 D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

CYP

, Y69B D-Y7PV Main switch circuit Main switch circuit Mounting screw M2.5 x 4 l Slotted set screw 2.5 OUT Black [White] Indicator light (500) (3000) (5000) 6.2 DC () Blue [Black] 27.3 D-Y59B, Y69B 3.4 OUT (+) Brown [Red] 8.5 5 12.5 Most sensitive positon OUT () Blue [Black] 9 2 Color Indication Solid State Switches Direct Mount Type D-Y7NW (V)/Y7PW (V)/D-Y7BW (V) Auto Switch Specifications

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

0.35 (With light: 0.4 (DIN terminal with light: 0.45)) 1 (P) 3 (R) 1 (P) 3 (R) Power consumption (W) DC 0.1 (With light only) External pilot 1.4 (With light: 1.5) 100 V 110 V [115 V] 200 V SYJ51 R 2 4 SYJ52 R 2 4 1.6 (With light: 1.7) [1.7 (With light: 1.8)] (A) 2 (A) 2 Apparent power (VA) AC X X 2.3 (With light: 2.4) 2.5 (With light: 2.6) [2.7 (With light: 2.8)] 220 V [230 V] 1 (P) 3 (R

Prevents Micro-Bubbles

Symbol LVC Symbol Nil 2 3 4 6 5 Application Ports A & B same size N PPS PTFE PFA Ammonium hydroxide compatible Metric sizes Pilot port thread type LVA 04 06 08 10 12 19 25 4 6 8 10 12 19 25 Refer to the applicable tubing table to the left. Different diameter tubings can be selected within the same body class.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

(PNP) 5 V, 12 V IC Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Grommet 12 V 5 V, 12 V Relay, PLC Diagnostic indication (2-color) 24 V IC 12 V 2-wire Water resistant (2-color) Grommet IC 5 V, 12 V With diagnostic output (2-color) 4-wire (NPN) Latch with diagnostic output (2-color) F7LF 2-wire P5DW Magnetic field resistant (2

1

Example: Analog output = 1 to 5 [V] F.S. = 5 [V] 1 [V] = 4 [V] 3 [% F.S.] = 4 x 0.03 = 0.12 [V] The output error induced by the temperature change can be as much as 0.12 [V].

Magnetically Coupled Rodless Cylinder

Guide rod Guide rod Applicable bore size (mm) 15, 20 25, 32, 40 No. CYRZ-V CYRZ-W Center of axis 3. Use caution when taking off the external slider, as the piston slider will be directly attracted to it.

1

XSA1 4.5 6 XSA2 7 8 XSA3 10.5 11.5 Reverse pressure potential 0.5 MPa(G)*1 Weight New New 18% *1 XSA1-12 (Refer to the Specifications on page 3.) 0.5 kg 0.41 kg lighter *1 Rated voltage *1 XSA2-2 32 AC 100 V, 200 V, 110 V, 220 V, 240 V, 48 V, 24 V, 230 V DC 24 V, 12 V Applications Photovoltaic cell manufacturing Semiconductor manufacturing LCD manufacturing New New Female thread type (Rc,

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

Fluid Name and Option Option symbol and body material Fluid (Application) Brass B Stainless steel J J H H Q P M H M M P Ethyl alcohol Caustic soda (25% ) Gas oil Silicon oil Steam system (Steam) (Max. 183C) Steam system (Condensation) (Max. 99C) Medium vacuum (up to 0.1 Pa.abs) Parachloroethylene Helium Non-leak (10 6Pam 3/s) Heated water (Max. 99C) A A S E V A V V E Note 1) The leakage

SMC

25, 40 Magnetically Coupled Rodless Cylinder (Direct Mount Type) P.162 Low Speed Cylinder P.170 Sine Rodless Cylinder P.166 Model Size 12-CY1R 12-CY3R Model Size CQSX 101112, 16, 20, 25 Model Size 12-REA 25, 32, 40, 50, 63 6, 10, 50, 63 15, 20, 25, 32, 40 Low Speed Cylinder P.172 Low Speed Cylinder P.174 Model Size CQ2X 101132, 40, 50, 63 Model Size CM2X 101120, 25, 32, 40 Front matter 2

LEKF-OMZ0035

-V 200 to 230 Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 -10- 2.3 Construction LEKFS Motor : In-line (AC servo motor) Component Parts No.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

M5 x 0.8 Piping port 2-M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA Mounting base side B D +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2-M2 x 0.4 depth 3 8 5.7 3.5 L 6-M4 x 0.7 depth 4.5 20 20 2-M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-15 30 60 98 40 42 49 60 23 25 89 75 106

Guide Table Series MGF ø40, ø63, ø100 1

Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire 3-wire (NPN) 3-wire (PNP) Relay, PLC IC circuit 24 V Grommet 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Water resistant (2-color indication) Y7BA Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Solid state switches marked with are produced upon

Rotary Table

and D-A93(V): Oil proof vinyl cabtire cord 2.7 0.18mm22-core (brown, blue) 0.5m D-A96(V): Oil proof vinyl cabtire cord 2.7 0.15mm23-core (brown, black, blue) 0.5m Isolation resistance 50M or more at DC500VM (between lead wire and case) Withstand voltage AC1500V for 1 minute (between lead wire and case) Operating time 1.2ms Ambient temperature -10 to 60C Shock resistance 300m/s2

HRX-OM-X071

1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

VM

1 Mechanical Valves Series VM Mechanical Valves Series VM Mechanical Valves SA VA Model VM1000 VM100 VM200 VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM Courtesy of Steven Engineering

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

control equipment Air preparation equipment Relay, PLC A93 100 V Grommet Reed auto switch Yes 12 V 24 V 2-wire Note 1) Lead wire length symbols: 0.5 m Nil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ Note 2) Auto switches marked with are produced upon receipt of order.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Applicable load Lead wire length (m) Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Grommet Reed auto switch Yes 12 V 24 V 2-wire Note 1) Lead wire length symbols: 0.5 m Nil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ