High Vacuum Angle Valve, XL Series Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.
End plate assembly (D side, front port) e r t e r t O-ring (for VCA40) O-ring (for VCA30) HNBR HNBR (2) (2) Manifold valve Manifold valve Steel Steel Tie-rod Tie-rod End plate assembly (U side, side port) End plate assembly (U side, side port) Aluminum Aluminum y y End plate assembly (U side, front port) End plate assembly (U side, front port) Note 2) O-ring e is included with manifold valve
R O T A T I O N O F A U T O S W I T C H H O W T O O R D E R NCRB1BW R O TA R Y A C T U AT O R NCDRB1BW S A U T O S W I T C H L E N G T H O F L E A D W I R E D ...W/ Auto Switch Magnet ...Without Magnet Grommet 0.5m Lead W L Grommet 5m Lead W C Connector 0.5m Lead W CL Connector 3m Lead W CN Connector No Lead Wire M O U N T I N G B ...Basic F ...Flange T Y P E O F A U T O S W I T C H B O R
Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.
6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?1) 3.2 {&.s) 3.65 (92) 4.U {102.5) 4.45 (fi3) 4.86 (123.s) 5.2A (134) 5.69 (144.5) 6.'to (155) (166.5) 6.93 (176)7.34 t186.5) 7.76 097) 8.17 \207.5, (218) 9.OO {228.5) (D y r c l | Symbol $*Or> 4 Port (Mahitold only 5 Port dI/Nlh J!'
6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?1) 3.2 {&.s) 3.65 (92) 4.U {102.5) 4.45 (fi3) 4.86 (123.s) 5.2A (134) 5.69 (144.5) 6.'to (155) (166.5) 6.93 (176)7.34 t186.5) 7.76 097) 8.17 \207.5, (218) 9.OO {228.5) (D y r c l | Symbol $*Or> 4 Port (Mahitold only 5 Port dI/Nlh J!'
8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !
AXT802-1A-l VG Cable Length Model VVQ100-12A-1 VVQ100-12A-2 VVQ100-12A-3 L dimensions 1.5m 3m 5m VP Mounting direction D U D side mounting U side mounting VQ Note) The number of manifold stations cannot be changed.
For R and U, DC voltage is only available. Power saving circuit is only available in the "Z" type.
u t o s w i t c h A u t o s w i t c h s p e c i f i c a t i o n A u t o s w i t c h i n s t a l l a t i o n A u t o s w i t c h s e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i
2 r AS t q w AS-FE r y KE t u AS-FG i i o AS-FP !0 u AS-FM y !3 w !1 AS-D Meter-in type Meter-out type e Meter-in type Meter-out type AS-T ASP ASN Component Parts Component Parts AQ No.
End Plate Assembly > q U end plate assembly no.
D-A9 (Reed switch) D-F9 D-F9W D-M9 (Solid state switch) D-F9V, D-F9V D-A9V (Reed switch) D-F9V D-F9V (Solid state switch) C3 CXSJ15 to 32 (mm) Bore size C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9, D-F9W, D-M9 D-A9V, D-F9V D-A9 (Reed switch) D-F9 D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9V (Solid
D-A9 (Reed switch) D-F9 D-F9W D-M9 (Solid state switch) D-F9V, D-F9V D-A9V (Reed switch) D-F9V D-F9V (Solid state switch) C3 CXSJ15 to 32 (mm) Bore size C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9, D-F9W, D-M9 D-A9V, D-F9V D-A9 (Reed switch) D-F9 D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9V (Solid
Insert D at the end of the manifold part number.
MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1
Note 4) D-Z7 and D-Y types cannot be mounted. 25 to 63 (mm) Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA A B C D D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-A9 D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 Bore size (mm) 25 32 40 50 63 19 23 18 98 94 99 42 38 43 75 79 74 22.5 26.5
Auto switch internal circuit Weight Unit: (g) D-F8N D-F8N D-F8P D-F8B Auto switch part No.
LAT LEJS40 LEJS63 Applicable auto switches D-M9N(V)-900, D-M9P(V)-900, D-M9B(V)-900 D-M9NW(V)-900, D-M9PW(V)-900, D-M9BW(V)-900 LZ *4 Please consult with SMC for non-standard strokes as they are produced as special orders. LC3F2 * Specifications and dimensions for the 25A-series are the same as standard products.