VEX1

i Conduit terminal j DIN connector a Model b d e f VEX5500 VEX5501 19 130 110 9 12 2.3 187 187.5 205.5 205 32 VEX5700 VEX5701 136 9 20 2.3 204 204.5 222.5 120 222 VEX VEX5900/5901 AN AMC 5.1-34 VEX5 Dimensions Select style VEX5510/E5511 VEX5710/E5711 Port size E F G H I J L M P A Model R T U B C K N O Q S D A,P port Rc(PT) , ,1 R port Rc(PT) VEX5510 VEX5511 1 2 3 4 , ,1 1 2 3 4 50 25 10 7

VM

5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

type: Stainless steel 598 Series AS20-D Speed Controller Adjustable by Flat Head Screwdriver: Standard Type, Elbow Type (Metal Body) Dimensions L4 D3 AS TMH ASD AS AS-FE KE H AS-FG (Hexagon width across flats) AS-FP T2 AS-FM AS-D AS-T AS-D AS-T ASP A L2 ASN D1 AQ L3 ASV AK VCHC ASS D2 T1 L1 ASR ASQ Dimensions A Weight (g) AS120-U10/32-D 10-32 UNF 10-32 UNF AS120-M5-D M5 x 0.8 8 9 M5 x 0.8

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

T) LVQ LQ (mm) Dimensions PB LVN T U Model LVD2-S LVD3-S LVD4-S LVD5-S PA 28 9.6 TI/ TIL 34 17.5 A B 35 20 U PA 57 25 PAX With flow rate adjustment & by-pass PB (Max. S) (Max.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Spool/Sleeve Body O-ring Return spring Platinum silver S070 w e t y Polyacetal Piston Seal u NBR O-ring i NBR O-ring o NBR Mini Y seal !0 Carbon steel Round head combination screw !1 Carbon steel Round head combination screw !2 Pilot valve assembly SCZ2-NBR VQ VKF VQZ VZ VS VFN 4-15-3 4 Series VZ200 Construction (Sub-plate mounted) N.C. (VZ215) N.O.

Possible to transfer a workpiece at low-speed.

2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

energy saving effect

Applicable model Minimum operating flow rate [L/min] To circulating fluid outlet r t HRSH100-20 w HRSH150-HRSH200-HRSH250-W25 r q HRS-BP005 y HRSH250-AHRSH300-A40 To circulating fluid return port r t u r e Parts List No.

Table of Contents

D-sub Connector. Series SV D-sub Connector. How to Order . Manifold Electrical Wiring. Dimensions . Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV3000 for D-sub Connector. Series SV4000 for D-sub Connector. Flat Ribbon Cable Connector . Series SV Flat Ribbon Cable Connector.

Cylinder with Lock

Auto Switch Mounting Height [mm] Auto switch model D-F5m D-J59 D-F59F D-F5mW D-J59W D-F5BA D-F5NT D-Y59m D-Y7P D-Y7mW D-Y7BA D-Z7m D-Z80 D-M9m D-M9mW D-M9mA D-A9m D-A9mV D-M9mV D-M9mWV D-M9mAV D-A5m D-A6m D-A59W D-Y69m D-Y7PV D-Y7mWV D-P3DWA D-P4DW D-G39 D-K39 D-A3m D-A44 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23 30.5 23 32.5 25 35 24.5 67 27.5 77

Series AS-FM/AS-M/ASD-FM

Weight g Model d T D1 H D2 D3 L1 L4 L2 L3 Min. Max.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

Cylinder with Lock

Auto Switch Mounting Height [mm] Auto switch model D-F5m D-J59 D-F59F D-F5mW D-J59W D-F5BA D-F5NT D-Y59m D-Y7P D-Y7mW D-Y7BA D-Z7m D-Z80 D-M9m D-M9mW D-M9mA D-A9m D-A9mV D-M9mV D-M9mWV D-M9mAV D-A5m D-A6m D-A59W D-Y69m D-Y7PV D-Y7mWV D-P3DWA D-P4DW D-G39 D-K39 D-A3m D-A44 Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23 30.5 23 32.5 25 35 24.5

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Auto Switch Mounting Height (mm) Auto switch model Band mounting D-C7m/C80 D-H7m/H7mW D-H7NF D-H7BA D-M9mV D-M9mWV D-M9mAV D-A9mV D-M9m D-M9mW D-M9mA D-A9m D-C73C D-C80C D-H7C D-A7m D-A80 Hs Hs Hs Hs Hs Hs Bore size 10 17 18 17 19.5 20 16.5 16 20.5 21 20.5 23 23.5 19.5 (mm) Auto switch model Rail mounting D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-A7mH/A80H D-F7m/J79 D-F7mW

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Cylinder with Lock Series CLS

Hs 33 Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht Hs A 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5

Floating Joint/Stainless Steel Type Series JS

Example: Nut for JS40 2 Series JS Dimensions JS10, 16 M M U D J U F B G H C E P A Use a 4mm precision watch wrench to attach the JS10 male threads.

CXT

d NN RW RW PW QW PB GP lE W Y Z 2-M5X0.8 2-RB G G HT U (NA) (Option) A L HN(MAX.)

MK

Note D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F7BAVL D-F79F D-F7NTL Switch mounting screw RS H A 20, 25 BQ-1 (M3 x 0.5 x 8l) Square nut D-A7/A8 D-A73C/A80C D-A7H/A80H D-A79W RZQ Switch mounting screw 32, 40 50, 63 Magnetic body (Steel plate, etc.)

MK

Applicable Auto Switch Style Auto Switch Model Page Electrical entry (Function) Bore size D-A7, A8 D-A7lH, A80H D-A73C, A80C D-A79W D-A9l D-A9lV D-F7l, J79 D-F7lV D-J79C D-F7lW, J79W D-F7lWV D-F7BAL D-F7lF D-F7NTL D-F9l D-F9lV D-F9lW D-F9lWV D-F9BAL D-F5DWL 5.3-14 Grommet (Perpendicular) 5.3-15 Grommet (In-line) 20 to 63 Reed switch Solid state switch 5.3-16 Connector Grommet (2 color indication