energy saving effect

When deionized water is used, the electric conductivity should be 1 mS/cm or higher (Electric resistivity: 1 Mcm or lower). 30 min 20 min 14 min 10 min 6 min 4 min Facility Water Supply 2 min 1 min Warning Operating time 30 s 20 s Max. 1. The water-cooled refrigeration type thermo-chiller radiates heat to the facility water.

Air Fittings & Tubing

7 20 3.5 10 11 20 12 21 4.4 11 21 34 15 23 35 31 29 38 64 34 43 69 10-32UNF 12.7 13.7 15.4 9.3 15.6 2.5 1 16 23 22 11.11 5 32 16 10.4 10 18 3 1 8 1 4 1 8 1 4 26 25 14.29 11.11 24 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 3.5 11.4 10 16.5 3 16 19.5 26 14.29 10-32UNF 13.6 18.1 2.5 12 16.1 7 26 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1

MGP

40 stroke 20 30 100 P=0.5MPa P=0.5MPa 200 80 100 25 10 20 50 50 40 Load weight m (kg) 3 4 5 16 40 20 30 32 12 2 Load weight m (kg) 1 25 20 10 0.3 0.4 0.5 5 4 16 12 3 0.2 2 0.1 10 100 50 200 40 30 20 1 Eccentric distance l (mm) 0.5 0.3 0.4 40 to 124 stroke 0.2 30 20 0.1 P=0.5MPa 10 100 50 20 30 40 200 25 20 10 Eccentric distance l (mm) Load weight m (kg) 2 3 4 5 16 12 Over 75 stroke 1 100

Stopper Cylinder

2 20 20 10 10 10 5 4 3 4 5 3 4 5 3 2 2 2 1 1 1 1 5 10 20 10 5 1 20 30 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) Transfer speed (m/min) Lever-type weight of transferred object and transfer speed graphs (graphs (2) and (3)) show the values at room temperature (20 to 25C).

LJ1H

Motor Mounting 143 Deflection Data 145 Part Number Designations N 1 1 B G LJ1 H 10 100 F W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 None B contact specification 2 pcs.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

Modular F.R.L. Units

3.5 29 AC30A-B 1/4, 3/8 1/8 110.2 115.1 85.6 30 55.1 80 29.4 3.5 41 35 7 14 4 41 AC40A-B 1/4, 3/8, 1/2 1/8 145.2 147.1 91.7 38.4 72.6 110 33.8 1.5 50 40 9 18 5 48 AC40A-06-B 3/4 1/8 155.2 149.1 93.2 38.4 77.6 110 33.8 1.2 50 40 9 18 5 48 AC50A-B 3/4, 1 1/8 191.2 220.1 175.5 93.1 110 43.3 3.2 70 50 11 20 6 60 AC60A-B 1 1/8 196.2 234.1 175.5 98.1 110 43.3 3.2 70 50 11 20 6 60 Optional

Modular F.R.L. Unit

4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 How to Order How to Order AR 30 1N AR 30 BG F X430 03 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 20 25 30 40 50 60 Body size Body size X430 X440 Low temperature High temperature Thread type Thread type Nil Rc Nil Rc N NPT N NPT F G F

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

CNG

GR GQ H1 I 18 13 38 93 1/8 56.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 20 to 200 15.5 to 200 22 17 45 103 1/8 66 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 20 to 300 19.5 to 300 22 17 45 104 1/8 67.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 19.5 to 300 30 19 52 112 1/8 75 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 301 to 500 27 to 300 (mm) Bore size (mm) 20 25 32 40 P

HRX-OM-X084

) 20 *1 It is not possible to select only option D.

•

1", 85 MSXO.8 1 ' GN E leclcic NBIllf,1-"'6J B Bellows type M6 x l B6 16. 1 6 .. GS EIecbIC Silicon l'l.bba-(frl-l16) eo> "" 20-;'20 02-2 2~8 ";10 /16 /20 /32 .:,aiSO 04 4 B8 M8 X 1.25 '$'1'>32 ,,~ listO Pad Dia.

Modular Design with Uniform Body Style

Series AWmK Series p. 76 p. 76 p. 94 p. 94 Port size Port size Port size Port size 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 Size 20 V V V V V V V V Size 30 V V V V V V V V Size 40 V V V V V V V V V V V V Size 40-06 V V V V Size 50 V V V V Size 60 V V V V V V Lubricator New Spacer p. 48 AL Series p. 87 Port size 1/8 1/4 3/8 1/2 3/4 1 Size 20

VQZ1000/2000/3000

15 7.7 10 10 VQZ Rc 1/8 53 38 84.5 (Single) 109 (Double) 122 (3 position) 300 VQD (Lead wire length) Cover diameter 1.6 Cross section 0.34 mm2 65.5 36.5 31.2 17 X 62 5 1 P 3 R1 R2 R1 R2 5 1 P 3 26 (33) 15.2 13.8 8 PE port 4-Rc 1/4 3(R2), 5(R1) port 2-M5 x 0.8 External pilot port 37.4 66.5 11 20 16 20 2-Rc 1/4 1(P) port 20 20 The broken lines indicate the DIN rail mounting style [-D]. (38

Tie-rod Type Hydraulic Cylinder

73 225 60 28 99 251 112 11 1/4 stroke 63 12 10 3/8 47 37 10 80 243 65 30 106 269 116 11 80 16 13 1/2 57 40 13 90 270 80 32 116 296 127 11 100 20 16 1/2 66 47 13 100 297 100 35 123 322 137 12 1/5 stroke 125 20 16 1/2 77 55 15 100 307 100 35 123 328 137 12 160 24 20 3/4 94 60 20 108 343 120 38 131 366 155 12 401 CHA Series Dimensions Rod flange type: CHAF 2 x Rc P V T Cushion adjustment screw

MLGP

Holding the Unlocked Condition (20 through 32) Caution 1.

MLGP

Holding the Unlocked Condition (20 through 32) Caution 1.

CQS

10 10 5 2 10 15 25 20 5 5 1 Consult SMC for shorter stroke length than indicated in the table.

MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

MXS Series Air Slide Table

With end lock (20) MXS20R With buffer (20) MXS20F 2-M6 X 1 thread 13 deep Operating port 2-Rc(PT)1/8 J 15.5 15 20 58 25 44.5 30.5 0.5 45.5 Dimensions not indicated are the same as basic type.