3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

X 5 1 P 3 R1 R2 R1 R2 5 1 P 3 (33) 26 13.8 15.2 8 VQ PE port 4-Rc(PT)1/4 R1, R2(EXH) port 2-Rc(PT)1/4 P(SUP) port 2-M5 X 0.8 External pilot port 20 20 37.4 66.5 20 16 20 (38) VQ4 The broken line indicate DIN rail mounted style [-D].

HRS100/150

Cable size Crimped terminal on the rated current thermo-chiller side HRS100-Al-20-l HRS100-Wl-20-l 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 4 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 30 A M5 HRS150-Al-20-l HRS150-Wl-20-l 40 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable R8-5) R8-5 A HRS100-Al-40-l HRS100-Wl-40-l 3-phase 380 to

Auto Switch Guide

If using other screws, switch may be damaged. (3) Load current range and Maximum load current 5 to 20 mA 5 to 40 mA 20 mA Contact protection circuit None D-A93 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Auto Switch Internal Circuit Colors of lead wire inside ( ) are the ones before conformed to IEC standard.

Microspeed Cylinder

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber

5 Port Solenoid Valve, Series VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

ZS-33-D ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

LEH_C

1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN LECPA ( AP AN LECPA NPN NPN A A 32 22 32 22 AP PNP PNP B B (m) 40 30 40 30 C C 8 8 8 8 A A 1.5 1 1.5 1 10 10 B B 3 3 3 3 15 15 ( C C 5 5 5 20 20 F F 5 () () R R S S A B C / P.42 7.3 (NPNPNP) 12 - 2.1.3 3 10 2 5 1 4 7 6

ARM10/11

8 Option Option Nil X17 Nil X17 None None Oil-free Oil-free Straight type Elbow type Straight type Elbow type 6.5 X X 12.5 X X Y Y X 3 3 7 X 11.5 11.5 11.5 Y 19 19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 14-4-37 20 Series ARM11A/B End Block Pressure Gauge ARM11E

ARM10/11

8 Option Option Nil X17 Nil X17 None None Oil-free Oil-free Straight type Elbow type Straight type Elbow type 6.5 X X 12.5 X X Y Y X 3 3 7 X 11.5 11.5 11.5 Y 19 19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 14-4-37 20 Series ARM11A/B End Block Pressure Gauge ARM11E

Rubber seal 5 Port Solenoid Valve Series SYJ5000

O.D.: 4, 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 2-2.6 (For mounting) 11 3 28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) 21 L plug connector (L): SYJ5 20-L-M5 3 4 5 M plug connector (M): SYJ5 20-M-M5 3 4 5 DIN terminal (D): SYJ5 20-D-M5 3 4 5 M8 connector (W0): SYJ5 20-W0-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to

MLGP

D-X 20(d = Thread O.D.) 2d or more Data For 20 through 32 only (1) 1) Confirm that there is no air pressure inside the cylinder, and remove the dust cover (1). 2) Supply air pressure of 0.2 MPa or more to unlocking port (2) shown in the drawing on the left. 3) Remove the unlocking bolt (3) with a hexagon wrench (width across flats 2.5). (3) D Bypass port dia.

MLGP

D-X 20(d = Thread O.D.) 2d or more Data For 20 through 32 only (1) 1) Confirm that there is no air pressure inside the cylinder, and remove the dust cover (1). 2) Supply air pressure of 0.2 MPa or more to unlocking port (2) shown in the drawing on the left. 3) Remove the unlocking bolt (3) with a hexagon wrench (width across flats 2.5). (3) D Bypass port dia.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

M14 x 1.5 30 22 1/4 37 15 106 50 9 25 73 53 14 23 19 20 50 28 17 17 13 M10 x 1.5 20 35 22 M16 x 1.5 30 26 3/8 43 18 112 63 8 28 80 60 16 27 21 22.4 55 30 17 17 13 M10 x 1.5 22 40 25 M18 x 1.5 30 26 3/8 47 20 116 80 8 32 100 75 18 31 26 28 65 32 22 20 15 M12 x 1.75 26 45 29 M22 x 1.5 35 30 1/2 57 22 127 100 6.5 38 118 90 20 35 34 35.5 80 35 27 19 16 M12 x 1.75 27 50 34 M27 x 2 35 32 1/2 66

CJ5-S

1.5 44 Rc 1/8 93 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 Rc 1/4 109 63 J Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 Rc 1/4 109 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 Rc 3/8 130 100 DUp to 1500 40 37

CJ5-S

1.5 44 Rc 1/8 93 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 Rc 1/4 109 63 J Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 Rc 1/4 109 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 Rc 3/8 130 100 DUp to 1500 40 37

CE

Description Material Note Aluminum alloy 18 Wear ring 1 40 to 63 Resin Cylinder body Brass 12, 20 12, 20 Steel 19 Rod end nut 2 Rod cover Aluminum alloy 32 to 63 32 to 63 Rolled steel 20 Sensor setting plate Aluminum alloy Cold rolled special steel strip 3 Head cover 12 21 C type snap ring Magnetic material Carbon steel Piston 4 20 to 63 (built-in magnet) 22 Plastic magnet Aluminum alloy

Floating Joint

JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 3 4.5 5 6 8.5 10 16 21 17 20 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 6 6 7 8 11 14 19 24 30 36 5 5 7 8 11 13.5 16 20 22 24 10 10 13 17 22 27 32 41 46 55 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 0.5

Auto Switch Guide

If using other screws, switch may be damaged. (3) Load current range and Maximum load current 5 to 20 mA 5 to 40 mA 20 mA Contact protection circuit None D-A93 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Auto Switch Internal Circuit Colors of lead wire inside ( ) are the ones before conformed to IEC standard.

CG5-S

40 44 to 800 M14 x 1.5 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 50 55 to 1200 M18 x 1.5 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 63 69 to 1200 M18 x 1.5 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 80 80 to 1400 M22 x 1.5 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth

5 Port Solenoid Valve SY Series

61 (5.5) 64.2 33.6 40.9 [47.9] + 36.6 25.5 10 (For mounting) 24.4 24.9 (Light/surge voltage suppressor) [1(P), 5(EA), 3(EB) port] 1/4 23 0.5 0.5 36.6 51.5 5EA 1P 3EB 49.8 M8 connector (W0): 3 4 5 L plug connector (L): M plug connector (M): 3 4 5 SY9 20-DC8, N9 C10, N11 C12 DIN plug connector (D): 3 4 5 SY9 20-W0C8, N9 C10, N11 C12 3 4 5 SY9 20-MC8, N9 C10, N11 C12 C8, N9 C10, N11 C12 SY9