Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

u s d Particulate generation has been reduced at the stroke ends by reducing impact using a sine cushion and by stopping the stroke using an internal stopper. i e Reduction of outgassing due to surface treatment n Impact acceleration [m/s2] o u d t R g g e a c 1 s u s d 5 i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated

LX Series Compact Electric Actuators

I direction \ j '--r:_ _ _ System diagram Supply by Lrser comFcrnecFic rouilo|'s $.0nie$ ll( Proilrd tooumr 30 :t0.03. 08; 2mm lead o5 stepping a a a a 80 08; 5mm lead 100 08; 6mm lead t0.05 200 @8; 12mm lead :a]8:?lrrin:Faq l: ':l ' :S? sleptrr.lS 19!1{11n]!

LEJ-OM004xx

Without driver Nil Standard cable S LECSA1S A1 100 to 120 Robotic (Flexible cable) R A2 LECSA2S 200 to 230 *4 Whe n [With d river] is sele cted, cable is include d.

Multistage Ejector Series ZL112/212 1

Display LCD LED LCD with backlight 101 to 0 kPa 101 to 10 kPa Pressure setting range 200 kPa Maximum operating pressure Operation indicator light (Lights up when ON) OUT1: Green OUT2: Red Green Response frequency 200 Hz (5 ms) Hysteresis mode Variable (3 digits or more) Variable (can be set from 0) Hysteresis Fixed (3 digits) Window comparator mode Fluid Air, Non-corrosive gas Temperature

Vacuum Unit

Power consumption cost per year Annual air consumption Exhaust time Air consumption ZK2/With energy saving function 957 JPY/year 638 m3/year 0.6 s 58 L/min (ANR) Existing product 14,025 JPY/year 9,350 m3/year 6 s 85 L/min (ANR) Air unit 1.5 JPY/m3 (ANR), Annual operating cycles: 110 (Operating hours: 10 hours/day, Operating days: 250 days/year, 450 cycles/h, when 1 unit is used) Cost conditions

180

6 50 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 MHY MHY 40 4 30 MHW MHW 3 20 -X 2 10 1 MRHQ 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 MA Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D D20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

10

Mounting side Closed C B A A Open D Open E F F Mounting side MHL2-25DZ-X86/X86A MHL2-25D Z-X86/X86A 1 2 200 200 160 160 Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 120 120 0.5 MPa 0.4 MPa 0.4 MPa 80 80 0.3 MPa 0.3 MPa Closed F (Fingers closed) 40 40 0 0 40 80 120 160 200 0 0 40 80 120 160 200 [mm] Model A B C D E F Weight [g] MHL2-25DZ-X86(A) 9 106 128

Fluoropolymer Piping Equipment

B C E E H L1 L1 L2 L2 M Min. port size LQ3E2A-S 1/4" 4 6 17 16 16 34.5 33.5 39.5 38.5 20 3.9 LQ3E3A-S 3/8" 5 9 22.5 19.5 21 47.5 44.5 49.5 46.5 25 6.3 LQ3E4A-S 1/2" 6 10 24.5 22.5 24 52.5 50.5 54.5 52.5 29 9.5 LQ3E5A-S 3/4" 7 14 26.5 24 32 64 61.5 66 63.5 37 15.8 LQ3E6A-S 1" 8 18 30 26 41 78 74 80 76 49 22 LQ3E7A-S 1 1/4" 9 22 35 35 50 92.5 92.5 97.5 97.5 64 28 M H Class 7 929 A LQ3 Series

XM, XY

Note 1) 14 45 80 160 200 5 1.3 x 10-10 {1 x 10-10} at ambient temperature, excluding gas permeation (Standard material: FKM) Internal Leakage (Pam 3/s) 1.3 x 10-11 {1 x 10-11} at ambient temperature, excluding gas permeation (Standard material: FKM) External Operating time (s) 0.1 0.21 0.24 0.26 0.28 0.05 KF (NW), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange

Compact Type

5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= = up to 800 mm/s Graph up to 30 mm stroke 6 Graph up to 10 mm stroke 5 0.2 0.2 0.1 0.1 Weight m (kg) Weight m (kg) 0.05 0.05 0.04 0.04 0.03 0.03 0.02 0.02 CXSJM6 CXSJL6 CXSJM6 CXSJL6 20 40 0.01 20 40 0.01 60 0

HRX-OM-R005

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R005 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

VXD21/22/23

3 8 1 2 3 4 S L, Z S L, Z S Note ) Thread PB 1 32A 40A 50A AC Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.

Compact Type Dual-Rod Cylinder Series CXSJ

5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= = up to 800 mm/s Graph up to 30 mm stroke 6 Graph up to 10 mm stroke 5 0.2 0.2 0.1 0.1 Weight m (kg) Weight m (kg) 0.05 0.05 0.04 0.04 0.03 0.03 0.02 0.02 CXSJM6 CXSJL6 CXSJM6 CXSJL6 20 40 0.01 20 40 0.01 60

CG5-S

Stainless Steel Cylinder Se ries CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order X165US TN CG5 L N 25 S R 100 Without Auto Switch X165US TN CDG5 L N 25 S 100 G5BAL R With Auto Switch Inch rod thread (Only available with "TN" port option. Currently only available on the 20 to 63mm bore sizes.)

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

Auto Switch Guide

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Series CE1

, 250, 300 100, 125, 150, 175, 200, 250, 300, 400, 500 32 131 90 27 16 45 49.5 64 M14 X 1.5 14 4.5 14 40 177 136 27 16 52 57 71.5 M14 X 1.5 24 5 14 50 63 200, 300, 500 193 144 32 20 64 71 85.5 M18 X 1.5 22.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 X 1.5 21 7 18 P T* X M N O Q Z L Bore size (mm) 32 40 50 63 Rc(PT) 1/8 57.5 41 34 5.5 M6 X 1 56 30 14 Rc(PT) 1/8 64.5 41 40 5.5 M6 X 1

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

16 16 16 L = 120mm L = 120mm L = 120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table displacement mm Table displacement mm Table displacement mm 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load N 150 100 50 200 250 Load N 150 100 100 400 500 Load N 300 200 3 Precision Air Slide Table