Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
To use the system in a magnetic field that exceeds this value, use a magnetic material to shield the sensor unit. 63 50 50 40 40 YES 100 200 300 400 500 100 200 300 400 500 NO Does the mounted load exceed the load given in the diagram? Piston speed (mm/s) Horizontal mounting Piston speed (mm/s) Vertical mounting Selection O.K.
S S S S [Measurement mode] Measurement mode is the condition where the flow is detected and displayed, and the switch function is operating. This is the basic mode; other modes should be selected for set-point changes and other function settings. F0 function setting F1 function setting F99 function setting Do not use the product for flammable fluid. Fire or explosion can result.
Setting range: 0.1/0.2/0.5/1/2/5/10/30/60 s (Initial value 1 s) : The analogue input update time can also be set for every Wireless Remote unit. Refer to "Remote setting" (page 38). DA refresh time -26No.EX-OMV0017-C (4) Remote registration Registration for wireless communication between the Wireless Base unit and the Wireless Remote unit.
Setting range: 0.1/0.2/0.5/1/2/5/10/30/60 s (Initial value 1 s) The analogue input update time is set for every wireless slave unit. Analogue input update time Define the address assignment direction of the EX600 I/O units connected to the wireless master unit. The address assignment direction is changed by mode 1/mode 2. Be careful about the I/O map.
Setting range: 0.1/0.2/0.5/1/2/5/10/30/60 s (Initial value 1 s) The analogue input update time is set for every wireless slave unit. Analogue input update time Define the address assignment direction of the EX600 I/O units connected to the wireless master unit. The address assignment direction is changed by mode 1/mode 2. Be careful about the I/O map.
0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector
Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Code Bonnet Standard Panel Installation 3) Code
Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only.
Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only.
Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only.
Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only.
Tap Water (as a Circulating Fluid) Quality Standards The Japan Refrigeration and Air Conditioning Industry Association JRA GL-02-1994 Cooling water system Circulating type Make-up water Influence Item Unit Standard value Corrosion Scale generation pH (at 25C) 6.0 to 8.0 p p Electric conductivity (25C) [S/cm] 100*1 to 300*1 p p Chloride ion (Cl) [mg/L] 50 or less p Sulfuric acid ion (SO42
Mounting tap: M10 x 1.5 Pin diameter: 10H7 Nil S No shim With 2 mm shims C Port b side a side ( side) b side ( side) a side Port : Mounting tap : Pin diameter : Mounting tap : Pin diameter D Clamp arm b side S 66 b side Mounting tap E The positions of the mounting taps and pin holes are different depending on the body shape. Refer to Body shapes and positions of mounting sides.
U P S E T MODE DOWN Use to change the mode or to increase the set value. UP button ( button) Use to select the function. SET button ( button) DOWN button ( button) Use to change the mode or decrease the set value.
size (S) PB Port size G1/2 Compatible heavy-duty cord Cable O.D. 6 to 12 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B Model A C D E F K L M Grommet: G Conduit: C DIN terminal: D Conduit terminal: T S 68 71 74 74 U 81 91.5 101 103.5 S 51 54 57 57 Q 98 101 104 104 R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5
Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only.
Setting range: 0.1/0.2/0.5/1/2/5/10/30/60 s (Initial value 1 s) The analogue input update time is set for every wireless slave unit. Analogue input update time Define the address assignment direction of the EX600 I/O units connected to the wireless master unit. The address assignment direction is changed by mode 1/mode 2. Be careful about the I/O map.
R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.
VXS VXS VXB VXE (3) Formula for flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + T When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + T Conversion with sonic conductance C: VXP VXR VXH VXF VX3 VXA S = 5.0 x C(5) Q : Air flow rate[L/min(ANR)] S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream