Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

CATALOG

X B 5 _ C D N R O D T H R E A D R O D B O R E S I Z E S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 6 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/8 2 2-1/2 Inches Example: 04 = 4 Stroke E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Consult SMC Customer Service For

Made to Order

CM2-Z CM2K-Z CM2R-Z CBM2 CM2H-Z CM2HR-Z CG1-Z CG1K-Z CG1R-Z CG1KR-Z MB-Z MBK-Z MB1-Z MB1K-Z CA2-Z CA2K CBA2 CS1 CS1H CQS CQSK CQ2-Z CQ2K-Z CQ2H-Z MTS MGPM-Z MGPL-Z MGPA-Z MGG MGC CM2 w-1 From P. 172 Direct mount type, air-hydro type Air cylinder Non-rotating rod type Direct mount type CG1 w-1 From P. 292 Direct mount, Non-rotating rod type Air cylinder Non-rotating rod type Air cylinder Non-rotating

2

-A 1/4 R Left Note 1) Set pressure range of 6P (L, R, Z) is 0.2 to 0.6 MPa (30 to 90 psi).

Table of Contents

HYS Indicator light SE1(L)-18/-19 I Z Brown DC (+) Lead wire 0.2 to 0.33 mm2 Max. coating O.D. 1.7 mm Black OUT1 Socket LED Red Hook White OUT2 1 k Connector DC polarity indicator SE1(L)--16/-17 I Z Blue DC () With pressure setting trimmer 1 (SET 1), OUT 1 (Black lead wire, Red LED) can be set.

Table of Contents

5 5 6 7 8 TC 17 20 22.5 28 33 Z 94 107 117 130 148 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 W 25 40 40 50 60 X 18 22 28 35 40 N 6 7 6.5 8.5 11 WP 16 19 21.5 27 32 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 19 20.5 21.5 24 26 P (Piping port) Model TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40

A

X B 5 _ C D N R O D T H R E A D R O D B O R E S I Z E S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 6 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/8 2 2-1/2 Inches Example: 04 = 4 Stroke E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z S T R O K E Hundredths Of An Inch

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Rated voltage Z With light/surge voltage suppressor With light/surge voltage suppressor (Non-polar type) U 5 24 VDC 6 12 VDC Note) Z: Positive common specifications only. 5 01 SY 5 1 20 LO Z For DC: SJ CE-compliant 1 01 SY 5 1 20 LOZ For AC: Nil SY Q CE-compliant For DC only.

Table of Contents

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

Table of Contents

P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44

Aluminum High Vacuum Angle Valve

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

CV/MVGQ

suppressor Nil S With light/surge voltage suppressor (Except Type G) Z Without auto switch CVM5K L 32 100 J 1 1 M Z L 32 100 J 1 1 M Z H7BW CDVM5K With auto switch Built-in magnet Suffix for cylinder None Nylon tarpaulin Heat resistant tarpaulin Nil J K Screw-in type Built-in One-touch fitting Rod extended when energized Rod retracted when energized Piping Non-rotating rod type Nil F

CV/MVGQ

S RHC T MK(2) CVM3 L 32 100 T 1 L Z Without auto switch RS Q G L 32 100 T 1 L Z H7BW CDVM3 RS H A With auto switch RZQ Built-in magnet Number of auto switches Piping MI W S 2 pcs. 1 pc. n pcs.

5

Trunnion pivot bracket TX TZ TO TO Z + 1/2 Stroke TY B 4 x TT TD TS TH TF TC B 2 x TR TA TL TU TU (mm) Part no.

Air Slide Table

RoHS Air Slide Table 6, 8, 12, 16, 20, 25 Reduced in height 10% 1 reduction 27 mm 1 (Current model: 30 mm1) Product weight 22% 1 reduction 298 g 1 (Current model: 380 g1) Allowable kinetic energy Reduced in height and weight with thinner table 64% 1 improvement Thin table made of special stainless steel Durable material with the same strength as the current model 0.09 J 1 (Current model:

smcmaintenancepartslist

Contents Contents @1 @2 @3 @4 Piston seal MGP12-Z-PS MGP16-Z-PS MGP20-Z-PS MGP25-Z-PS MGP32-Z-PS MGP40-Z-PS MGP50-Z-PS MGP63-Z-PS MGP80-Z-PS MGP100-Z-PS 12 16 20 25 32 40 50 63 80 100 Rod seal Set of left nos. @1, @2, @3, @4 Set of left nos. @1, @2, @3, @4 NBR Gasket A Gasket B Seal kit includes @1 to @4. Order the seal kit, based on each bore size.

Electric Actuators

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Table of Contents

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.