SYJ300-OMU0003

)3 Assy SYJ5000-13-3A 4 5 Assy CE -Q 6 SUS 3 SYJ500 SYJ5000 SYJ500 SYJ5000 SYJ5000 3 A B Assy CE M2.5 : 0.45N.m 19 No.SYJ300-OMU0003 Assy SYJ52(R)(-Q)) (SYJ54(R)(-Q)) SYJ500-10-3A(-Q) CE -Q M2.5-0.45N.m () 20 No.SYJ300-OMU0003 SYJ700 1 1 SYJ700-9-1(-Q) 1/8 7 2 SYJ700-9-2(-Q) 1/4 3 8 V111(T)4 Assy SYJ5000-13-3A 5 Assy 6 SUS CE -Q 3 SYJ700 SYJ7000 SYJ700 SYJ7000

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

Vacuum Equipment

Calculation 1. Average adsorption flow to achieve adsorption response time Calculation 1. Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.)

XM, XY

-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

Soft Start-up Valve

1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/4 128 59 53 74 53 Width across flats 36 52 AV5000-m06, 10-

CJ2

sides) 2 (Same side) 2 (Different sides) 1 Auto switch mounting style No. of auto switches mounted D-A7 D-A80 D-A73C D-A80C NCM 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 NCA D-A7H D-A80H Band mounting style (6, 10, 16) DD-H7 D-H7W D-H7BAL D-H7NF Rail mounting style (10, 16)

VK300

1/8 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF CE-compliant F With bracket (Not mounted) F N T 01 Rc 1 8 20 20 stations Q CE-compliant Nil A port: Rc 1/8 Note) Applicable only for DIN terminal type Type 42: Base mounted (A port side ported) Applicable solenoid valve VK334-(-Q) How to Order VV3K3 05 01 42 Applicable blanking plate assembly VK300-42-1A Thread type

Coolant Valve

Main port 1, 2 Pilot port 12(P1), 10(P2) A B K C D E F H J Note) Model 1 8 1 4 1 4 VNC5-32A VNC6-40A VNC7-50A 1 4 1 2 1 1 2 105 120 140 211.5 (213.5) 229 (231) 252 (254) 77 96 113 55 63 74 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 Note) ( ): CE-compliant product (-Q) 622 A Coolant Valve: Air Operated/External Pilot Solenoid VNC Series Flange Type/Port size: 32F, 40F, 50F Pg9

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

10 10 10(13) 12(14) 12(14) 35 40 40 50 58 58 8 10 10 14 18 18 1/8 1/8 1/8 1/8 1/4 1/4 11 11 11 12 13 13 M5 x 0.8 M6 x 0.75 M8 x 1.0 M10 x 1.25 M12 x 1.25 M14 x 1.5 106 111 113 130(139) 150(162) 150(162) 5 6 6 8 11 11 M4 x 0.7 depth 7 24 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 69 69 71 78(87) 90(102) 90(102) 11 11 10 10(12) 12(13) 12(13) 26 31 38 47 58 72 19.5 16.5 11

C76

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !

C76

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: KOZ (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: KZ (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)