Series AP3100

It is illustrated with an arrow pointing away from the valve body or a "filled" triangle on the schematic. f INLET E OUTLET Mounting hole Outlet (Downstream) Bottom port (Upstream) Inlet (Upstream) Porting Symbols Top view (Mounting hole on bottom) 2PW 2PWA 2PWB 2PWC q q q w 2 Ports 3 Ports 4 Ports q w w w 3PWD 3PWE 3PWG 3PWH 3PWF 3PWJ q q q q q q e e e e e e w w w w w w 4PWK 4PWL 4PWM 4PWN

o

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

o

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

2 !4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

+0.030 0 depth 2.5 2.5 6 E 5 2 x M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts No. No. Qty Description Material Remarks Description Material Remarks Qty 1 1 Brass Electroless nickel plated Aluminum alloy White anodized Rod cover Cushion spear A q o 1 1 Brass Electroless nickel plated Aluminum alloy White anodized Head cover Cushion spear B w !

Slider Type/Ball Bushing Bearing

Refer to the Specific Product Precautions for the replacement period. 1517 A CY1L Series Construction Slider type/Ball bushing bearing CY1L6 $0 #9 #3 @2 t #4 !9 #8!0!2!6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !

VCS

Valve model Port size VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A Note 1) 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket

Speed Controller with

L8 x n pcs.+ L17 x 2 L8 x n pcs.+ L25 x 2 L8 Refer to page 6 for L8.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

2 !0 r e t Piston seal NBR !3 Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents MXPJ6-PS 6 2 pieces of no. !2 and !3 8-8-12 12 Precision Air Slide Table Series MXP MXP10/12/16 q i o w e !1 !9 u !0 !4 !3 !

Compact Cylinder Series NCQ8

, 106 (1-1/16"), 150 (1-1/2"), 200 (2"), 250 (2-1/2") N-through hole H-thread C-depth 4 places Z Q Q P-port 2 places J E M2 bolt circle W M1 D-rod dia.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

(In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.) Note 6) The display unit conforms to the CE mark.

rep-modular-e

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Process Valve

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

Check Valve Series AK 1

Construction Straight type: AKH 4, 6 5/32, 1/4 8, 10, 12 5/16, 3/8, 1/2 Description Material Note Component Parts No. t y e w r q t y e w r q PBT Body q NBR, Aluminum alloy Valve w Stainless steel Spring e Brass Electroless nickel plated Spacer r Cassette t NBR Seal y Male connector type: AKH Bushing type: AKB R 1/4, 3/8, 1/2 NPT 1/4, 3/8, 1/2 R 1/8 NPT 1/8 M5 type U10/32 4, 6 8 x R 1/8