Microspeed Cylinder

/single rod Double acting Action CY1B: 6 10, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to

Slide Tables MX Series

(5.1) 45 (5.1) 72 (8.1) Vertical Mounting (Tapped Holes) Axial Mounting (Tapped Holes) l 4.8 6 6 8 l 4.8 6 6 8 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7

Compact Cylinder

E Z L B + Stroke K A + Stroke M G J W 16 Minimum lead wire bending radius 10 Auto switch Q F 4 x N through H thread effective depth C 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 12 5 to 30 19.5 16 23 19.5 6 6 23 4 21.5 M3 x 0.5 26 1.5

MHZ2/MHZJ2

) Switch types D-Y5/6 and D-Y7 cannot be mounted when equipped with dust cover/MHZJ2.

Magnetically Coupled Rodless Cylinder

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

HRX-OM-Y098

6.

CLQ

Bore size (mm) T1 T2 M F E D B Part no.

HRX-OM-W060

6.

CP95

See page 6-13-12 for dimensions. See page 6-13-12 for dimensions.

CP95

See page 6-13-12 for dimensions. See page 6-13-12 for dimensions.

3 Port Solenoid Valve Series SYJ300/500/700

(Value in the initial state) Base mounted Solenoid Specifications JIS Symbol Internal pilot SYJ312 4 SYJ32 2 4 Grommet (G), (H), L plug connector (L), M plug connector (M), M8 connector (W) Electrical entry (A) 2 (A) 2 DC AC 50/60 Hz Coil rated voltage (V) 24, 12, 6, 5, 3 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation 1 (P) 3 (R) 1 (P) 3 (R) Standard With power saving

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

Electric Slide Table / High Precision Type 《 AC servo motor 》

(Equivalent lead (5)Storke [mm] (7)Cable type (6)Motor option Size Without cable Nil Nil Without option Standard cable 16 25 S R B With lock Robotic cable (Flexible cable) 50 100 150 (10)I/O cable length * (9)Driver type * [m] (8)Cable length * [m] Power supply Without cable Nil Nil Without cable Compatible driver voltage(V) Without cable (Connector only) H 2 2 Nil Without driver 1

3 Port Solenoid Valve Series VQ100 1

M plug connector, With lead wire With light/surge voltage suppressor M M plug connector, Without connector With light/surge voltage suppressor MO Grommet G L plug connector Note) Grommet: No latching type, AC and large flow M plug connector Grommet 4-12-6 7 3 Port Solenoid Valve Series VQ100 Standard Specifications Standard type (1 W) High pressure type (1.5W) Low wattage type (0.5 W) Type

Modular Type Filter Regulator Series AW

Float type auto drain AD37 AD37NNote 6) AD47 AD47NNote 6) AD47 AD47NNote 6) N.C. Note 1) Assembly includes a bracket and set nuts. Note 2) in part numbers for a round pressure gauge indicates a type of connection thread. No indication is necessary for R; however, indicate N for NPT.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

6 and !7 from the table above. o Head cover Anodized Aluminum alloy !0 Seal kits consist of items !5, !6 and !

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

ZQ

a M O DE SET1 SET2 Maximum suction flow AMJ 2 0 0 4 6 8 10 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) Misc.

Digital Flow Switch Series PFA For Air Series PFW For Water

19.4 Load Load UNIT RESET SET 12 to 24VDC + PFA30-(-M) 3 x 7.2 (= 21.6) Panel fitting dimensions 6.4 8-M3 36 +0.5 0 Sensor Blue Brown Black N.C. 1 2 3 4 1 2 3 4 36 +0.5 0 5 6 7 8 OUT1 OUT2 Load Load 12 to 24VDC + 5 6 7 8 PFA31-(-M) The applicable panel thickness is 1 to 3.2mm.

Series IDG

Specifications 0.01m (95% filtered particle diameter) Outlet air filtration degree Max. 0.1mg/m (ANR) (0.08ppm) Note 1) Outlet air oil mist concentration (prior to oil saturation 0.01mg/m (ANR) or less (0.008ppm or less) Note 1) With inlet air oil mist concentration of 30mg/m (ANR) (24ppm) Applicable models IDG3V to IDG50V (standard dew point 20C) (4F)) IDG3HV to IDG50HV (standard dew point