MK

70 100 250 280 500 595 87 123 290 320 525 640 1100 1520 1350 1805 Availability of Body Options Additional Weight 12 Unit: g 16 20 25 32 40 50 63 Bore size (mm) Bore size 12, 16 20 to 63 M F N MF FN Both ends tapped 6 7 7 6 7 17 Rod end width across flats 10 10 21 21 46 46 Rear boss mounting 2 3 5 7 13 25 With arm 13 32 100 100 200 200 350 350 Rear flange 133 153 166 198 345

PA3000/5000/PAX1000

pulsation attenuator Automatically operated type T, F, N are order made specifications.

ZSE30A(F)/ISE30A

For vacuum/ compound pressure ZSE30A 01 N M ISA2 Option 3 Note) Calibration certificate Nil Y K T Note) Operation manual ISE35 Symbol Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa PSE Piping specifications IS 01 Note) All texts in both English and Japanese.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

sealing method Options Flat gasket (D.O.E) 1 N/A Bracket Quick plug Nil B P Note) Specity seal material in place of "" (N for NBR or V for FPM). 4.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Table Displacement (Reference Value) 0.05 W L LEKFS32 (L = 30 mm) 0.04 Displacement [mm] LEKFS40 (L = 37 mm) 0.03 LEKFS25 (L = 25 mm) 0.02 0.01 0.00 0 50 100 150 200 250 300 350 400 450 500 Load W [N] * This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. 9 10 Battery-less Absolute (Step Motor 24 VDC) Battery-less Absolute Encoder: Electric Actuator

7

CKGA80, 100/CKPA80, 100/With Magnetic Field Resistant Auto Switch (Rod Mounting Type) 1 P3DWASC CK G A 80 Y Built-in standard magnet type with magnetic field resistant auto switch 100 Built-in strong magnet type with magnetic field resistant auto switch 100 P79WSE CK P A 80 Y Built-in standard magnet Number of auto switches Nil S 2 pcs. 1 pc.

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LECSB1: Single phase 100 to 120 VAC, 50/60 Hz Connection terminal: L1,L2 LECSB2: Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2,L3 Do not connect. L1 L2 L2 Main circuit power supply L3 L3 Regenerative converter N P1 P2 N DC reactor Connect between P1 and P2. (Connected at time of shipping.)

MXH Series Compact Slide

Vertical Horizontal l: Load eccentricity m Mounting position m L L to 100 to 300 Maximum speed mm/s to 500 to 100 to 300 to 500 Load eccentricity lmm 100 50 200 100 50 200 100 50 200 1 2 3 4 5 6 7 8 9 10 11 12 Selection graph L: Overhang (the distance from the cylinder shaft center to the load center of gravity) The direction of L can also be a diagonal direction .

Compact Type

V = over 400 mm/s; up to 100 mm stroke 14 15 CXSJM CXSJL Graph V = over 400 mm/s; up to 75 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 10 15 15 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 6 Series CXSJ Construction: Standard Piping CXSJM (Slide bearing) CXSJL (Ball bushing bearing) CXSJM6 CXSJL6 !

CS1

12.5-1.5 N-12.5-1.5 N-12.5-1.5 N-12.5-1.5 N-12.5-1.5 N-12.5-1.5 N-12.5-1.5 Non-lube style Seals except @5 and @6 are the same as for the lube-style.

A

5.a AIR PREPARATION PRODUCTS AIR PREPARATION PRODUCTS SERIES PAGE NUMBER (N)AC1000-6000 5.1 FRL COMBINATION UNITS MODULAR TYPE (N)AC1010-4010 5.2 FRL COMBINATION UNITS MODULAR TYPE (N)AF 5.3 AIR FILTER (N)AR 5.4 AIR REGULATOR (N)AL 5.6 AIR LUBRICATOR (N)AW 5.7 AIR FILTER-REGULATOR COMBINATION UNIT MODULAR TYPE (N)AFM 5.9 MIST SEPARATOR (N)AFD 5.10 MICRO-MIST SEPARATOR (N)AV2000/3000/4000

ZP

N Dimensions Per Vacuum Inlet Model E2 Width across flats L N P Q Fitting part min. hole size Vacuum inlet direction q Pad dia.

CE

S 3pcs. 3 "n" pcs.

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

attenuator Automatically operated type T, F, N are order made specifications.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

pulsation attenuator Automatically operated type T, F, N are order made specifications.

3 Port Solenoid Valve Series SYJ300/500/700

1) (Station n) 48.5 [55.5] + + + + + 48.5 [55.5] 33.1 + + + + + 20 A A 33.1 20 5.1 (Pitch) P=10.5 18.5 One-touch fitting (A port) Applicable tubing O.D.: 4, 5/32" A A 5.1 (Pitch) P=10.5 18.5 M5 x 0.8 (A port) Station n L1 L2 3 58 50 Station 20 236.5 228.5 6 89.5 81.5 8 110.5 102.5 10 131.5 123.5 Station 2 47.5 39.5 4 68.5 60.5 5 79 71 7 100 92 9 121 113 11 142 134 12 152.5 144.5 13 163 155

Support Guide/11-LEFG Series

x 3.5 Vacuum port M5 x 0.8 x 5 34 B D x 100 (= E) 100 F Dimensions [mm] Model L A B n D E F 11-LEFG16-S-50 144 57 130 4 15 11-LEFG16-S-100 194 107 180 11-LEFG16-S-150 244 157 230 11-LEFG16-S-200 294 207 280 6 2 200 11-LEFG16-S-250 344 257 330 11-LEFG16-S-300 394 307 380 8 3 300 11-LEFG16-S-350 444 357 430 11-LEFG16-S-400 494 407 480 10 4 400 11-LEFG16-S-450 544 457 530 11-LEFG16-S-500 594

Refrigerated Air Dryer

(Thread symbol N: 3/8 inch) (820) [200 VAC specification] Terminal block K L H M N J 4-13 P [200 VAC specification] Power cord outlet (17) [100 VAC specification] Power cord (mm) A B C D E F G H J K L M N P Q Port size Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E 69 101 270 32 21 330 413 38 150 3/8 226 410 240 15 51 232 138 24 327 125 67 304 33 73 31 36 154 21 330 473 1/2 13 453 283