Table of Contents

+ PA &) Connection # % 7 7 # 7 7 # 7 7 # & 0 0 PAX PB (VXFC10) Operation sequence diagram & & % 7 17-3-79 10 The VX series will be revised shortly. Series VXF Precautions Be sure to read before handling.

Vacuum Pad

: Pad Unit ZP3-10UM;[Weight: 0.6 g] ZP3-13UM;[Weight: 0.7 g] ZP3-16UM;[Weight: 0.8 g] Flat with groove Pad Unit 9 6 4 9 6 4 4 6 9 1.2 2 2 2 2 1 2 2 1.2 7 7 7 Vertical 2 2 2 14 13 11 10 17 16 With Adapter: Vacuum Inlet Vertical With Buffer: Vacuum Inlet ZP3-04B;[Weight: 0.3 g] ZP3-06B;[Weight: 0.3 g] ZP3-08B;[Weight: 0.4 g] Bellows 7 5 3 7 5 3 7 5 Lateral 3 With Adapter: Vacuum Inlet 1.5 2

Table of Contents

32 40 50 ZP50U 53 7 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no.

NCQ8

8 2 2-1/8 2-1/4 2-3/8 2-5/8 2-7/8 3-1/8 3-3/8 3-7/8 4-3/8 4-7/8 5-3/8 #10-24UNC1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-5/8 2-7/8 3-1/8 3-3/8 3-7/8 4-3/8 4-7/8 5-3/8 1/4-20UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #4-40UNC1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 2-3/8 2-5/8 2-7/8 3-1/8 3-5/8 4-1/8 4-5/8 5-1/8 #6-32UNC1-3/8 1-1/2 1-5/8 1-3/4 1-7/8

SY

Description Part no. 3 5 7 SX 000-16-1A (with mounting screws) 3 5 7 Brackets are not available for SY9000.

NCA1

1 3/4-16 1 1/8 4.7 1/2 4 1/2 2 1/4 1 1/4 1 1 2.34 2.72 1/2 3 3.32 4 1/4 3/8-24 4 0 1/2 1/2 5/8 1.57 1.18 3/4 1 15/64 1/2 1/2 1/2 7/8 3/8 Bore size (in) SA XA ZA 150 (1.5") 6 5 5/8 6 1/16 200 (2") 6 5 5/8 6 3/16 250 (2.5") 6 1/8 5 3/4 6 5/16 325 (3.25") 7 3/8 6 7/8 7 5/8 400 (4") 7 3/8 6 7/8 7 5/8 6-15-8 8 Series NCA1 NFPA Interchangeable Air Cylinder Medium Duty Series Rod Side Flange Style

LEC-OM02704CN

6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (8) (2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 6 6 6 (6) (6) (6) 1.

NCA1

") 6 5 5/8 6 1/16 200 (2") 6 5 5/8 6 3/16 250 (2.5") 6 1/8 5 3/4 6 5/16 325 (3.25") 7 3/8 6 7/8 7 5/8 400 (4") 7 3/8 6 7/8 7 5/8 6-15-8 8 Series NCA1 NFPA Interchangeable Air Cylinder Medium Duty Series Rod Side Flange Style: NCA1F (MF1 mounting style) Y P + Stroke AA D across flats 2-EE (NPTF) C 4-FB (Hole) KK EA MM BA CJ1 B R E CJP CJ2 F W J G TF CM2 WF LF + Stroke UF A ZB + Stroke CG1

Auto Switch Guide

9-17 Grommet Rail 7-9-18 Connector 7-9-19 Grommet Tie-rod Terminal conduit 7-9-20 7-9-23 7-9-21 7-9-22 7-9-24 Grommet Direct Connector This auto switch can be mounted by tie-rod with using mounting bracket.

CQ2

7 !8 !

Electric Actuator/Slider Type

0 #3 @3 @6 @7 @9 @4 #8 o t @0 @2 !6 !5 w r e #7!3!4 !7 #1 !8 #0 @5 @1 @8 !9 #6 #5 #2 Motor details Component Parts No. Description Material Note No.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

) 192 to 255: 132.8 ms 9 0..7 PortCycleTime 10 0..7 VendorID[0] (MSB) Vendor ID for validation comparison 11 0..7 VendorID[1] (LSB) 12 0..7 Reserved 0 13 0..7 DeviceID[0] (MSB) Device ID for validation comparison 14 0..7 DeviceID[1] 15 0..7 DeviceID[2] (LSB) PortConfig Por t 2 16..25 0..7 See above See above PortConfig Por t 3 26..35 0..7 See above See above PortConfig Por t 4 36..45 0

LEC-OM07605CN

13 7. 7.2 7.2.1 (1) (2) (3)() 7 14 7. 7.2.2 [Pr.

Fluoropolymer Piping Equipment

8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1/2" x 3/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 3/4" x 5/8" 3/4" x 5/8" 1/4" x 5/32" 1/4" x 5/32" 1/4" x 5/32" 1/2" x 3/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1/4" x 5/32" 3/8" x 1/4" 1/8" x 0.086" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/8" x

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

7 !7 !8 !1 !3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

Air Slide Table

Common Adjuster Options Model Stroke 10 20 30 40 50 75 100 125 150 MXQ6(L)-Zmm(6, 7, 8, 9) v v v v v MXQ8(L)-Zmm(6, 7, 8, 9) v v v v v v MXQ12(L)-Zmm(6, 7, 8, 9) v v v v v v v MXQ16-Zmm(6, 7, 8, 9) u v v v v v v v MXQ20-Zmm(6, 7, 8, 9) u v v v v v v v v MXQ25-Zmm(6, 7, 8, 9) v v v v v v v v v MXQ6A, 8A, 12A 10, 20 mm stroke Auto switch is not mountable End plate Adjustment block MXQ16(A)

ZP

32 40 50 ZP50U 53 7 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no.

Made to Order

17 4 14 12 16 4.5 5.5 0.07 0.15 52 57 52 40 14 9 depth 12 9 depth 7 M10 x 1.5 22 17 7.5 5 14 5 6 M6 x 1.0 12 5 16 5.5 0.07 0.15 64 71 50 17 11 depth 14 11 depth 8 M12 x 1.75 12 6 19 7 64 28 22 15 7 M8 x 1.25 7 20 6.6 0.07 0.15 84 22 M16 x 2 10 7 77 60 6 19 77 21 8 M10 x 1.5 34.5 28.5 25 14 depth 16.5 14 depth 10.5 7 9 Nil TN TF P Bore size Clamp stroke: 50 mm Clamp stroke: 20 mm Clamp stroke

Smooth Cylinder/Low Speed Cylinder

11 9.5 7 5.5 1 0 6 4 3 0.5 0 6 5 2.5 1.5 7 10 10 6 6 2 1 7 5 4 1.5 0.5 7 6 3.5 2.5 8 11.5 10.5 7.5 6.5 7 6 12 10 9 6.5 5.5 12 11 8.5 7.5 13 17.5 15.5 13.5 11.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Free Mount Cylinder

7.